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SEMI S21-1103 © SEMI 2003 1 SEMI S21-1103 SAFETY GUIDELINE FOR WORKER PROTECTION This safety guideline was technically approved by th e Global Environmental, Health, & S afety Committee and is the direct responsibili…
SEMI S20-0303 © SEMI 2003 9
RELATED INFORMATION 3
EXAMPLE OF A LOTO EID DIFFERENTIATION MARKING
NOTICE: This Related Information is not an official part of SEMI S20 and was derived from task force activity and
individual task force participants. This related information was approved for publication by inclusion in the ballot
and by vote of the SEMI Standards EHS Committee. It is included to assist the user of the document in
understanding what the graphical representations should provide in the way of information and location
identification.
R3-1 Differentiation Marking
R3-1.1 In addition to a unique identifier, it may be beneficial to differentiate LOTO EIDs from non-LOTO EIDs
by using the following symbol. This symbol may be on or adjacent to, or combined with the unique identifier
marking for that specific LOTO EID.
R3-1.2 SEMI S8 provides guidance for sizing of this differentiation symbol so it will be readable from the normal
viewpoint of a person’s access to the LOTO EID.
R3-1.3 Where LOTO EIDs are located behind a panel, it is useful to mark the exterior of the panel in order to
indicate the path of access to the LOTO EID or approximately where the EID is hidden.
NOTICE: SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for
any particular application. The determination of the suitability of the guideline is solely the responsibility of the
user. Users are cautioned to refer to supplier’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These guidelines are subject to change without notice.
By publication of this standard, SEMI takes no position respecting the validity of any patent rights or copyrights
asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that
determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their
own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S21-1103 © SEMI 2003 1
SEMI S21-1103
SAFETY GUIDELINE FOR WORKER PROTECTION
This safety guideline was technically approved by the Global Environmental, Health, & Safety Committee
and is the direct responsibility of the Japanese Environmental, Health, & Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at
www.semi.org October 2003; to be published November 2003.
1 Purpose
1.1 This safety guideline identifies preferred methods
for the protection of persons from safety and health
hazards as they perform work on or around
semiconductor manufacturing equipment.
2 Scope
2.1 This guideline describes methods for protection
against hazards that workers may encounter in the work
area, such as hazardous energies, physical hazards, or
hazardous chemicals.
2.2 This guideline is intended to recommend
considerations for protecting all persons that work on or
around semiconductor equipment.
2.3 This guideline applies to equipment suppliers and
users of equipment, including activities related to
semiconductor manufacturing, and equipment and
process development activities.
2.4 This guideline includes the following sections:
1 Purpose
2 Scope
3 Limitations
4 Referenced Standards
5 Terminology
6 General Worker Safety
7 Chemical Hazards
8 Control of Hazardous Energy
9 EEW at Hazardous Voltage or Energy Levels
10 Radiation-Producing Equipment
11 Physical Hazards
12 Personal Protective Equipment
13 Emergency Preparation and Managing
Abnormal Situations
NOTICE: This safety guideline does not purport to
address all of the safety issues associated with its use.
It is the responsibility of the users of this safety
guideline to establish appropriate safety and health
practices and determine the applicability of regulatory
or other limitations prior to use.
3 Limitations
3.1 This guideline is intended to be used by the
equipment suppliers and users in consideration of
worker protection. This guideline is not intended to be
all-inclusive or used to verify conformance to any
regulatory requirements.
3.2 Equipment design criteria are outside the scope of
this document.
4 Referenced Standards
4.1 SEMI Standards
SEMI F34 — Guide for Liquid Chemical Pipe Labeling
SEMI S2 — Environmental, Health, and Safety
Guidelines for Semiconductor Manufacturing
Equipment
SEMI S8 Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
SEMI S13 Safety Guideline for Operation and
Maintenance Manuals Used with Semiconductor
Manufacturing Equipment
SEMI S19 — Safety Guideline for Training of
Semiconductor Manufacturing Equipment Installation,
Maintenance and Service Personnel
4.2 ANSI Standards
1
ANSI B 11.21 — Machine Tools - Machine Tools
Using Lasers for Processing Materials - Safety
Requirements for Design, Construction, Care, and Use
ANSI Z136.1 — Safe Use of Lasers
ANSI/NFPA 70E Standard for Electrical Safety
Requirements for Employee Workplaces 2000 Edition
1 American National Standards Institute, New York Office: 11 West
42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;
Fax: 212.398.0023 Website: www.ansi.org
SEMI S21-1103 © SEMI 2003 2
4.3 European Directives
2
89/686/EEC — Personal Protective Equipment
Directive
4.4 European Standards
3
EN207 — Personal Eye-Protection - Filters and Eye-
Protection Against Laser Radiation
EN208 — Personal Eye-Protection - Eye-Protectors for
Adjustment Work on Lasers and Laser Systems (Laser
Adjustment Eye-Protectors)
4.5 JIS Standards
4
JIS C 6802 — Safety of Laser Products
4.6 OSHA Standards
5
29 CFR 1910.147 — The Control of Hazardous Energy
(lockout/tagout)
29 CFR 1910.1200 Hazard Communication
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CPR — cardiopulmonary resuscitation
5.1.2 EEW — energized electrical work – Also known
as Working On Energized Electrical Circuitry.
5.1.3 EMO — Emergency Off
5.1.4 ERT — Emergency Response Team
5.1.5 MSDS — Material Safety Data Sheet
5.1.6 PPE — Personal Protective Equipment
5.2 Definitions
5.2.1 confined space a space that:
(1) is large enough and so configured that an employee
can bodily enter and perform assigned work; and (2)
has limited or restricted means for entry or exit (e.g.,
chambers, space in enclosures are spaces that may have
limited means of entry.); and (3) is not designed for
continuous employee occupancy.
2 European Commission, Available through the European Union
On-Line at http://europa.eu.int/index_en.htm.
3 European Committee for Standardization, Available through the
ON-CEN Sales Point, P.B. 130, A-1021 Vienna. Fax
43.1.213.00.818; Website: www.on-norm.at/cen/index_e.htm
4 Japanese Industrial Standards, Available through the Japanese
Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo
107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014
Website: www.jsa.or.jp
5Occupational Safety and Health Administration, U.S. Government
Printing Office, Washington, DC 20402, USA
5.2.2 e-diagnostic electronic access to equipment
for the purpose of diagnosing problems from a distance
(e.g., via dial-up, network connection, or wireless
communication means).
5.2.3 electrical PPE — personal protective equipment
specially designed to provide protection from electrical
arc, shock or other effect that could cause injury to a
person touching an electrical circuit or causing an
electrical fault.
5.2.4 emergency a sudden, serious event or
situation, such as earthquake, explosion, fire, or release
of hazardous energy or chemicals.
5.2.5 emergency response team a team who is
responsible for responding to emergencies.
5.2.6 employer entity that directly supervises
employees.
5.2.7 energized electrical work — work performed on
energized equipment or systems containing hazardous
voltages.
5.2.8 facility operator entity that controls activities
at the site.
5.2.9 facility owner the actual owner of the property
that may not be the actual operator of the facility.
5.2.10 hazardous energy any energy that can
potentially result in serious injury, illness, or death.
NOTE 1: Hazardous energies include electrical (e.g.,
capacitors, batteries), chemical, thermal/cryogenic, stored
pressure (e.g., pressurized containers), suspended weight,
stored mechanical (e.g., springs), generated pressure (e.g.,
hydraulics and pneumatics), and other sources that may lead
to the risk of injury.
5.2.11 operator a person who interacts with the
equipment only to the degree necessary for the
equipment to perform its intended function. [SEMI S2]
5.2.12 hazardous voltage voltages greater than 30
volts rms, 42.4 volts peak, 60 volts DC [SEMI S2].
NOTE 2: To avoid confusion between hazardous voltage and
non-hazardous electrical energy, see definition for non-
hazardous electrical energy.
5.2.13 non-hazardous electrical energy — electrical
energy of which voltage considered to need no further
protection to be safe for human contact. Includes
voltages less than the value specified as “hazardous
voltage” and power less than 240 volt-amps (VA) (as
used in EMO circuits and interlock circuits that must
remain active during maintenance).
5.2.14 supplier party who provides equipment to
and communicates directly with the user. A supplier