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SEMI S2-0703a E © SEMI 1991, 2004 54 RELATED INFORMATION 2 ADDITIONAL STANDARDS TH AT MAY BE HELPFUL NOTICE : This rel ated information i s not an of ficial part of SEMI S2 and was de rived from practical application by …

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R1-5.3.2 Data — This should consist of summaries of
data used to determine the safety aspects of design
features.
R1-5.3.3 Hazard Analysis Results — This should
consist of a summary or a total listing of the results of
the hazard analysis. Contents and formats may vary
according to the individual requirements of the
program. The following data elements may be used for
documenting the results of hazard analyses:
R1-5.3.3.1 System/Subsystem/Unit — The particular
part of the system that is the concern in this part of the
analysis. This is generally a description of the location
of the component being considered.
R1-5.3.3.2 Component/Phase — The particular
phase/component with which the analysis is concerned.
This could be a system, subsystem, component,
software, operating/maintenance procedure or
environmental condition.
R1-5.3.3.3 Hazard Scenario Description — A
description of the potential/actual hazards inherent in
the item being analyzed, or resulting from normal
actions or equipment failure, or handling of hazardous
materials.
R1-5.3.3.4 Effect of Hazard — The detrimental effects
that could be inflicted on the subsystem, system, other
equipment, facilities or personnel, resulting from this
hazard. Possible upstream and downstream effects can
also be described.
R1-5.3.3.5 Recommended Action(s) — The
recommended action(s) that are necessary and sufficient
to eliminate or control the hazard. Sufficient technical
detail is required in order to permit the design engineers
and the customer to adequately develop and assess
design criteria resulting from the analysis. Include
alternative designs and life cycle cost impact where
appropriate.
R1-5.3.3.6 Risk Assessment — A risk assessment for
each hazard (classification of severity and likelihood).
This may include an assessment of the risk prior to
taking any action(s) to eliminate or control the hazard
and a separate assessment of the risk following
implementation of the Recommended Action(s). (See
SEMI S10.)
R1-5.3.3.7 Remarks — Any information relating to the
hazard not covered in other blocks; for example,
applicable documents, previous failure data on similar
systems, or administrative directions.
R1-5.3.3.8 Status — The status of actions to
implement the recommended control, or other, hazard
controls. The status should include not only an
indication of “open” or “closed,” but also reference to
the drawing(s), specification(s), procedure(s), etc., that
support closure of the particular hazard. The person(s)
or organization(s) responsible for implementation of the
control should also be recorded.
SEMI S2-0703a
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© SEMI 1991, 2004 54
RELATED INFORMATION 2
ADDITIONAL STANDARDS THAT MAY BE HELPFUL
NOTICE: This related information is not an official part of SEMI S2 and was derived from practical application by
task force members. This related information was approved for publication by vote of the responsible committee on
October 21, 1999.
Table R2-1
International Standards Title
IEC 60204-1 Safety of Machinery - Electrical Equipment of Machines, Part 1
IEC 60417 Graphical Symbols for Use on Equipment
IEC 60664 Insulation Coordination for Equipment within Low-voltage Systems
IEC 60825-1 Safety of Laser Products, Part 1: Equipment Classification, Requirements and User’s
Guide
IEC 60950 Safety of Information Technology Equipment, including Electrical Business Equipment
IEC 60990 Methods of measurement of touch current and protective conductor current
IEC 61310-1 Safety of Machinery - Indication, Marking and Actuation - Part 1: Requirements for
Visual, Auditory and Tactile Signals
ISO 3461-1 General Principles for the Creation of Graphical Symbols - Part 1: Graphical Symbols for
Use on Equipment
ISO 3864 Safety Colours and Safety Signs
ISO 7000 Graphical Symbols for Use on Equipment - Index and Synopsis
USA Standards Title
ANSI Z535.1 to ANSI Z535.5 Labeling and Marking
ANSI/UL 94 Tests for Flammability of Plastic Materials for Parts in Devices & Appliances
ANSI/UL 499 Electric Heating Appliance
ANSI/UL 508 Industrial Control Equipment
ANSI/UL 991 Tests for Safety-Related Controls Employing Solid-State
UL 1012 Power Units Other than Class 2
ANSI/UL 1778 UPS Equipment
ANSI/UL 1950 Information Technology Equipment
ANSI/UL 1998 Safety-Related Software
ANSI/UL 3101-1 Electrical Equipment for Laboratory Use; Part 1: General Requirements
ANSI Z136.1 American National Standard for Safe Use of Lasers
ASTM Volume 10.03 Electrical Protective Equipment
ISA S82.02 Electrical and Electronic Test and Measuring Equipment
ISA S82.03 Electrical and Electronic Process Measuring and Control
Factory Mutual Data Sheet 7-7 Semiconductor Fabrication Facilities
FMRC 3810 Electrical and Electronic Test, Measuring and Process Control Equipment
NFPA 70 National Electrical Code
NFPA 70E Electrical Safety Requirements for Employee Workplaces
NFPA 79 Electrical Standard for Industrial Machinery
NFPA 318 Standard for the Protection of Cleanrooms
NEMA 250 Enclosures for Electrical Equipment (1000 Volts Maximum)
NEMA ICS 1.1 Safety Guidelines for the Application, Installation, and Maintenance of Solid-State
Control
OSHA 29 CFR 1910.132-138 Personal Protective Equipment
OSHA 29 CFR 1910.147 The control of hazardous energy (lockout/tagout)
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OSHA 29 CFR 1910.332-335 Safety Related Work Practices [electrical]
1997 Uniform Building Code,
Section 1632
Structural Design Requirements -- Earthquake Design -- Lateral Force on Elements of
Structures, Nonstructural Components and Equipment Supported by Structures
UL73 Motor Operated Appliances
UL471 Commercial Refrigerators and Freezers
UL698 Industrial Control Equipment for use in Hazardous Locations
UL1450 Motor-Operated Air Compressors, Vacuum Pumps and Painting Equipment
UL1740 Robots and Robotic Equipment
UL1995 Heating and Cooling Equipment
UL2011 Factory Automation Equipment
UL3111-1 Electrical Measuring and Test Equipment
UL3121-1 Process Control Equipment
Canadian Standards Title
CAN/CSA C22.1 Canadian Electrical Code, Part I
CAN/CSA C22.2 No. 0 General Requirements - Canadian Electrical Code, Part II
CAN/CSA C22.2 No. 107.1 Commercial and Industrial Power Supplies
CAN/CSA C22.2 No. 234 Safety of Component Power Supplies
CAN/CSA C22.2 No. 950 Safety of Information Technology Equipment, including Electrical Business Equipment
CAN/CSA C22.2 No. 1010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory
Use
European Standards Title
EN 292-1 Safety of Machinery - Basic terminology and Technical principles
EN 292-2 Safety of Machinery - Technical Principles and Specifications
EN 294 Safety of Machinery - Safety distance to prevent danger zones being reached by upper
limbs
EN 418 Functional Aspects of Machinery Emergency Stop Equipment
EN 626-2 Elimination or reduction of risk to health from hazardous substances emitted by
machinery - Part 2: Methodology leading to verification procedures
EN 811 Safety of Machinery - Safety distance to prevent zones being reached by lower limbs
EN 953 Safety of machinery - guards - general requirements for the design and construction of
fixed and moving guards
EN 954-1 Safety of machinery - safety-related parts of control systems, Part 1: General principle for
design.
EN 1037 Safety of machinery - Prevention of unexpected start-up
EN 1088 Safety of Machinery - Interlocking devices with and without guard locking
EN 1093-1 Evaluation of the emission of airborne hazardous substances - Part 1: Selection of test
methods
EN 1093-9 Evaluation of the emission of airborne hazardous substances - Part 9: Pollutant
concentration parameter - Room Method
EN 50178 Electronic equipment for use in power installations
EN 60204-1 Safety of Machinery - Electrical equipment of machines, Part 1
EN 60529 Degree of Protection Provided by Enclosure (IP Codes)
EN 60825-1 Safety of Laser Products, Part 1: Equipment Classification, Requirements and User’s
Guide
EN 60950 Specifications for Safety of Information Technology Equipment, including Electrical
Business Equipment
EN 61010-1 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory