semi合集-English.pdf - 第4807页
SEMI C58-0305 © SEMI 2005 8 10.6.4.3 Introduce the span gas standa rd in hydroge n and, using the span adjust knob, set the needle (or out put reading) to m atch the level of hyd rocarbons in t he span gas. 10.6.4.4 Repe…
SEMI C58-0305 © SEMI 2005 7
10.2.4.8 Inject the sample to be tested in the same manner as the calibration standard. Record the retention times
and peak areas.
10.2.4.9 Compare the average peak area of the hydrogen sample being tested to that of the calibration standard.
Calculate the concentration of nitrogen, using the formula below.
10.2.4.10 The result may not exceed the specification in Table 1 of this standard.
10.3 Oxygen — This procedure is for the determination of oxygen in hydrogen using a continuous flow analyzer
using an electrochemical method.
10.3.1 Detection Limit — 50 ppb (mol/mol).
10.3.2 Instrument Parameters — Set the sample pressure and flow rates in accordance with the instrument
manufacturer's instructions.
10.3.3 Calibration Standard — 1–10 ppm (mol/mol) oxygen in hydrogen or in accordance with the instrument
manufacturer’s instructions.
10.4 Operating Procedure
10.4.1 Do not change the initial sample flow setting once established.
10.4.1.1 Introduce hydrogen containing less than 2 ppm oxygen through a deoxygenation catalyst to verify that
there is no leakage of air into the system and to demonstrate that the detection limit can be achieved.
10.4.1.2 Introduce the calibration standard. Using the span adjust knob, set the needle (or output reading) to match
the level oxygen in the calibration gas.
10.4.1.3 Introduce hydrogen sample and record the oxygen reading. The result may not exceed the specification in
Table 1 of this standard.
10.5 Water — Use procedure in ¶9.5 for the determination of water.
10.6 Total Hydrocarbons — This procedure is for the determination of total hydrocarbons in hydrogen using a
continuous flow flame ionization detector equipped total hydrocarbon analyzer.
NOTE 13: The 0–1 ppm range can be used provided that zero and span gas standards in hydrogen with known levels of
hydrocarbons between 0–1 ppm are used in the calibration of the analyzer.
10.6.1 Detection Limit — 0.1 ppm (mol/mol).
10.6.2 Flow Requirements
10.6.2.1 High-purity, hydrocarbon-free (less than 1.0 ppm) hydrogen: 35–40 mL/min or 40% hydrogen in either
helium or nitrogen matrix at 75–80 mL/min.
10.6.2.2 Dry, hydrocarbon-free (less than 1.0 ppm) air: 350–400 mL/min.
10.6.2.3 Set sample flow rates in accordance with the instrument manufacturer's instructions.
10.6.3 Calibration Standards
10.6.3.1 Zero hydrogen with known quantity of hydrocarbons at 0.1 ppm level.
10.6.3.2 Span Gas — Hydrogen with known quantity (1–10 ppm) hydrocarbons.
10.6.4 Operating Procedure
10.6.4.1 Do not change the initial flow setting for hydrogen, air and sample once established.
10.6.4.2 Introduce the zero hydrogen with known quantity of hydrocarbons and, using the 0–10 ppm range, set the
needle (or output) to read the correct level using the zero adjust knob.
Sample Peak
Area
Standard Peak Area
Concentration
of Standard
Concentration
of Sample
SEMI C58-0305 © SEMI 2005 8
10.6.4.3 Introduce the span gas standard in hydrogen and, using the span adjust knob, set the needle (or output
reading) to match the level of hydrocarbons in the span gas.
10.6.4.4 Repeat ¶10.6.4.2 and ¶10.6.4.3 until reproducibility of readings is better than 1% of full scale.
10.6.4.5 Introduce hydrogen sample into the analyzer and read the quantity of hydrocarbons on the analyzer meter.
The result may not exceed the specification in Table 1 of this standard.
Figure 1
Analysis of Nitrogen
Figure 2
Flow Diagram for Discharge Ionization Detector Gas Chromatograph
with Integral Hydrogen Separator
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Copyright by SEMI® (Semiconductor Equipment and Materials
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consent of SEMI.
SEMI C59-1104 © SEMI 2002, 2004 1
SEMI C59-1104
SPECIFICATIONS AND GUIDELINES FOR NITROGEN
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in November 2002; previously published November 2003.
1 Purpose
1.1 The purpose of this document is to provide a series
of specifications for different grades of Nitrogen (N
2
)
that are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades
of nitrogen used in the semiconductor industry.
2.2 If analytical methods are not complete, the
requirements are presented as a guideline.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Description
3.1 Nitrogen is an odorless, tasteless, noncombustible
diatomic gas comprising approximately 78% of the
earth’s atmosphere; at cryogenic temperatures it is a
colorless liquid. Noncombustible; a cryogenic gas
derived from liquid air by fractional distillation.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined
in SEMI C3.
Table 1 Impurity and Other Requirements for Various Grades of Nitrogen
Previous SEMI Reference #
C3.5-93
(Specification)
C3.15-93
(Specification)
C3.48-0200
(Specification)
C3.29-96
(Specification)
C3.28-0200
(Guideline)
C3.49-94
(Specification)
Grade 4.8 5.2 5.4 5.5 5.6 7.0
Purity 99.998% 99.9992% 99.9994% 99.9995%
#1
99.9996% 99.99999%
Impurities Maximum Acceptable Level (ppm)
#2
Carbon Dioxide (CO
2
) 1 1 0.5 0.2 0.5 0.010
Carbon Monoxide (CO) 5 2 2 2 0.5 0.010
Hydrogen (H
2
) 2 2 2 2 1 0.010
Oxygen (O
2
) 3 1 0.5 0.2 0.5 0.010
Water (H
2
O) (ppmv) 1 1 0.5 0.2 0.5 0.050
Total Hydrocarbons expressed
as Methane (THC)
1
1
0.5 0.2 0.5 0.010
TOTAL SPECIFIED
IMPURITIES
13
8
6 4.8 3.5 0.100
Particles
#3
#3
#3
#3
#3
Max. 20/ft
3
>
0.02 m
#4
#1
A purifier is allowed to be used to meet this specification.
#2
An analysis of significant figures has not been considered. The number of significant figures is based on analytical accuracy and the precision
of the provided procedure.
#3
To be determined between supplier and user.
#4
May be determined after purifier/filter. Sampling point top be agreed between supplier and user.