semi合集-English.pdf - 第1561页

SEMI E36-0704  1995, 2004 8 6.2 Maint enance of Semicond u ctor E quipment Manufacturin g Informat ion Tag g ing - This base port ion of the SEMI E36 s pecification is intended to be debated and balloted once and change…

SEMI E36-0704  1995, 2004

should be optional and considered advisory by the

rendering agent.

5.7 Data Markup Rules - To create SGML documents

that are maximally re-useable and compatible with

XML, the following restrictions are placed upon the

tagged instances produced in accordance with

Semiconductor Equipment Manufacturing Information

Tagging:

• The characters “<” and “&” must always be

escaped as “<” and “&” respectively.

• No Marked Sections will be allowed in data

content.

• The replacement text of general text entities must

be well-formed, for example, an element that starts

within an entity must also end within it.

• All attributes should be present (even default

attributes) and attribute values should be well-

formed, that is with the name, equal sign, and

quotation marks present.

• Processing Instructions are prohibited with the

exception of the XML declaration, for example:

<? XML version=˝1.0˝ RMD=' INTERNAL' >.

6 How Semiconductor Equipment

Manufacturing Information Tagging Should Be

Used

6.1 Conformance - A conforming document is one that

meets the markup rules defined for the document class

in Semiconductor Equipment Manufacturing

Information Tagging. A non-conforming document is

one that does not use the markup properly or follow the

markup rules defined in Semiconductor Equipment

Manufacturing Information Tagging. A conforming

document created by an application must be

interchangeable with another conforming application

without significant information loss. A conforming

application may also deliver the markup rules

(information models) for the document or information

class being interchanged to another system.

Conforming applications are those that create, render,

or work with conforming documents. Such applications

may include browsers and online rendering software,

print and composition engines, editors and authoring

systems, search and retrieval engines, etc. In addition

to strictly conforming applications, it is expected that

many applications will accept conforming documents as

input, converting them to the internal format of the

software.

6.1.1 Conforming Authoring Application - A

conforming authoring application must be able to

produce conforming information. An application may

state that it is conformant with Semiconductor

Equipment Manufacturing Information Tagging if it has

the ability to:

• Create and manipulate conforming documents;

• Create and manipulate one or more classes of

conforming documents;

• Import conforming documents into the application

and output matching conforming documents; or

• Turn non-conforming documents into conforming

documents.

6.1.2 Conforming Rendering Application - There is no

rendering specification stated or required by

Semiconductor Equipment Manufacturing Information

Tagging at this time. This specification does not define

style conventions or endorse any particular language for

the interchange of stylistic information. That said, a

conforming rendering application is one that can render

(print, display, pronounce, etc.) conforming documents

without significant loss of information. The

presentation should be consistent with the intent of the

originating system, but need not be an exact, facsimile-

reproduction match.

To call itself conforming, a rendering application must

be able to take any conforming document, which is by

definition legal according to this base specification and

the models defined and explained in other parts of the

specification, and render that document in some visual

or non-visual fashion. A conforming rendering

application may not impose additional requirements or

constraints such as content requirements. For example,

a rendering engine may not require the presence of an

element that is optional in the models or require a more

restrictive range of values for an attribute than the

models state.

6.1.3 Validation - Documents tagged according to

Semiconductor Equipment Manufacturing Information

Tagging must parse cleanly according to their SGML or

XML models and must follow the rules stated in this

base document and the Tag Library and other

documentation. Tagging validation must be

accomplished through the use of validating SGML or

XML parsers, in standalone form or as incorporated

into other software packages. (Note: Validation of

some of the rules described in this base document and

the Tag Library documentation cannot be accomplished

using only an XML or SGML parser. This does not

mean that such rules can be ignored, merely that other

validation techniques may be required.) SEMI E36

rules include both rules that can be checked with

software and content rules that can only be verified

intellectually; a conforming SEMI E36 document must

conform to both types of rules.

SEMI E36-0704  1995, 2004

6.2 Maintenance of Semiconductor Equipment

Manufacturing Information Tagging - This base portion

of the SEMI E36 specification is intended to be debated

and balloted once and change little over time.

Additional parts of the specification will contain the

actual information models that describe the markup to

be used. New information models may be proposed at

any time. Such models will be distributed, discussed,

and balloted individually or in small groups, in the form

of one or more SEMI E36 modules, as they are created.

Modules that are approved will be appended to

Semiconductor Equipment Manufacturing Information

Tagging. The documentation will be changed and

balloted in parallel, to match any changes in the models.

6.2.1 Module Library - A growing module library

containing all approved modules will be maintained,

adding modules as additional subject areas and

document types are defined. Once a module has been

approved, it will be provided as part of Semiconductor

Equipment Manufacturing Information Tagging. Place-

holding modules may be introduced into the library that

are designated as “Temporary”, for use only until a

formal analysis and balloting process can provide a

more appropriate module. Initially modules will be

XML and SGML DTDs and DTD fragments. As XML

alternative modeling syntaxes such as schema become

supported by software, these may be used to

supplement SEMI E36 information models.

6.2.2 Modules - Each module will be given a unique

short name (to be used as a file name), a version

number, and a unique public identifier written

according to the rules of ISO 8879 and incorporating

the version number.

File names will be all lower case, constructed by

concatenating the following, in order:

• A 3- to 8-character descriptive name;

• A hyphen;

• The file type as “xml” or “sgml”;

• A period; and

• A 3-character descriptive extension that defines the

type of file (such as “dec”, “sgm”, etc.) These

extensions will be defined in the Tag Library.

Each module will contain:

• An initial comment which names the module, states

the purpose of the modules, types the modules as

Temporary or Implemented, and states how the

module should be integrated with other modules;

• A growing change history comment that describes

(in sedimentary order; that is, the most recent at the

top) all modifications made to the model. Each

item in the change history should be numbered,

dated, provide a description of the change, give a

brief rationale, and name the changing agent.

• Whatever syntax is employed, internal comments

should be used throughout the module to name and

describe the elements and provide information that

may not be stated directly in the syntax used.

6.2.3 Consolidated Tag Library - A single,

consolidated Tag Library will be maintained which will

describe the elements, attributes, and entities defined in

all the modules. Each description will contain

sufficient detail to indicate the meaning and correct

usage of the data markup. The library (or changes to

the library) will be reissued whenever a module is

added or modified in a way that affects any of the

elements, attributes, or entities.

Modules should use elements (tags) that are already in

the Tag Library wherever the definition of the element

matches the need. If the definition of an existing tag

does not meet the need, a new tag should be created.

A diagram of the structure of each element will be

included in the Tag Library, except for elements that

are empty, contain only character data, or contain a

simple “or” group in which all contents may appear at

any point in the model.

For each element, the Tag Library will contain:

• Element Title, consisting of its Tag and Name;

• Definition in clear, plain English, including

description of intended use and application when

appropriate;

• Remarks (if needed);

• Related Elements (if needed);

• For each Source, or module in which the element is

defined:

• Attributes Associated with the Element (if

any);

• The model of the Element in SGML syntax

and narrative form;

• Presentation information (if needed);

• Formatted examples of the element (if

needed);

• Tagged examples of the elements (if needed);

and

• The Name of the Source, or module in which

the element is defined.

For each Attribute, the Tag Library will contain:

SEMI E36-0704  1995, 2004

• Attribute Title, consisting of the short form of the

attribute which appears in the documents, and the

attribute Name;

• Attribute usage, describing how that attribute is

used;

• For each possible value of an attribute with a

specified set of values, the meaning or implications

of each value; and

• The default value of the attribute.

6.3 Creation of More Specific Authoring or Rendering

Models - The DTDs and models described in

Semiconductor Equipment Manufacturing Information

Tagging will not be designed for optimal use in

document creation. To create and display documents,

data creators may wish to create more enforcing

authoring models based on this markup. Such authoring

models may:

• Require the presence of specific elements;

• Specify the sequence of elements; and/or

• Include additional elements for internal use (which

would need to be removed before interchange). For

example, such information might include elements

for tracking the internal authoring and validation

processes or for company-confidential information.

Similarly, it is likely that viewing, print rendition,

search and retrieval, or other display applications will

create display-only models based on Semiconductor

Equipment Manufacturing Information Tagging. To

load display tools, it is quite likely that the specified

models will be transformed into a form that is

optimized for the particular search and retrieval or

display system. Such display models might:

• Resequence the data;

• Add additional markup such as “container” tags

around structures to be considered one element for

formatting purposes;

• Transform the form of some elements; or

• Remove parts of the information that are not

relevant to a particular application.

7 Related Documents - SEMI Content

Standards and Specifications

As described in section 2.4, the following list contains

examples of SEMI content-related or content guideline-

related standards and specifications.

SEMI C16 — Guide for Precision Reporting/Data

Traceability

SEMI D9 — Definitions for Flat Panel Display

Substrates

SEMI D13 — Terms and Definitions for FPD Color

Filter Assemblies

SEMI E6 — Facilities Interface Specifications

Guideline and Format

SEMI E10 — Standard for Definition and Measurement

of Equipment Reliability, Availability, and

Maintainability (RAM)

SEMI E29 — Standard Terminology for the Calibration

of Mass Flow Controllers and Mass Flow Meters

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E35 — Cost of Ownership for Semiconductor

Manufacturing Equipment Metrics

SEMI E58 — Automated Reliability, Availability, and

Maintainability Standard (ARAMS): Concepts,

Behavior, and Services

SEMI G57 — Guideline for Standardization of

Leadframe Terminology

SEMI M10 — Standard Nomenclature for Identification

of Structures and Features Seen on Gallium Arsenide

Wafers

SEMI P22 — Guidelines for Photomask Defect

Classification and Size Definition

SEMI P29 — Guideline for Description of

Characteristics Specific to Halftone/Attenuated Phase

Shift Masks and Mask Blanks

SEMI P30 — Practice for Catalog Publication of

Critical Dimension Measurement Scanning Electron

Microscopes (CD-SEM)

SEMI S1 — Safety Guideline for Visual Hazard Alerts

SEMI S7 — Safety Guidelines for Environmental,

Safety, and Health (ESH) Evaluation of Semiconductor

Manufacturing Equipment

SEMI S13 — Safety Guidelines for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI T6 — Procedure and Format for Reporting of

Test Results by Electronic Data Interchange (EDI)