semi合集-English.pdf - 第1090页
SEMI E5-1104 © SEMI 1982, 2004 32 Name Format Description Values Where Used RECLEN 3(), 5() Maximum length of a Discrete record S13F4 REFP 3() Reference Point S12F1, F4 REPGSZ 20, 3(), 5() Reporting group size S2F23; S17…
SEMI E5-1104 © SEMI 1982, 2004 31
Name Format Description Values Where Used
RCPID 20 Recipe identifier. Formatted
text conforming to the
requirements of OBJSPEC.
S15F21, F23,
F28, F29, F30,
F33, F35, F37,
F41, F44, F53
RCPNAME 20 Recipe name
S15F11
RCPNEWID 20 The new recipe identifier
assigned as the result of a
copy or rename operation.
S15F19, F41,
F44
RCPOWCODE 11 Indicates whether any pre-
existing recipe is to be
overwritten (= TRUE) or not
(= FALSE) on download
S15F27, F49
RCPPARNM 20 The name of a recipe variable
parameter. Maximum length
of 256 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPPARRULE 20 The restrictions applied to a
recipe variable parameter
setting. Maximum length of
80 characters.
S15F25
RCPPARVAL 10, 11,
20, 3(),
4(), 5()
The initial setting assigned to
a recipe variable parameter.
Text form restricted to
maximum of 80 characters.
S15F25, F33;
S16F3, F11,
F13, F15, F23
RCPRENAME 11 Indicates whether a recipe is
to be renamed (= TRUE) or
copied (= FALSE)
S15F19
RCPSECCODE 10 Indicates the sections of a
recipe requested for transfer
or being transferred:
1 = Generic attributes only
3 = Generic attributes and body
4 = All agent-specific datasets
(zero or more)
7 = Generic attributes, body,
and all agent-specific datasets
8 = Single agent-specific
dataset (zero or one)
11 = Generic attributes, body,
and single agent-specific
datasets
All other values reserved
S15F15, F16,
F17
RCPSECNM 20 Recipe section name:
“Generic”, “Body”, or
“ASDS”
S15F15, F18
RCPSPEC 20 Recipe specifier. The object
specifier of a recipe.
S15F1, F9, F13,
F15, F17, F19,
F27, F28, F31,
F32, F45, F49,
F51, F53;
S16F11, F13,
F15, F23
RCPSTAT 51 The status of a managed
recipe
0 = Does not exist
8 = Unprotected
9 = Protected
S15F10
RCPUPDT 11 Indicates if an existing recipe
is to be updated (= True) or a
new recipe is to be created (=
False)
S15F13
RCPVERS 20 Recipe version
S15F10, F12
READLN 3(), 5() Maximum length to read
S13F5
SEMI E5-1104 © SEMI 1982, 2004 32
Name Format Description Values Where Used
RECLEN 3(), 5() Maximum length of a
Discrete record
S13F4
REFP 3() Reference Point
S12F1, F4
REPGSZ 20, 3(),
5()
Reporting group size
S2F23;
S17F5
RESC 31, 51 Resolution code for numeric
data
1 = Absolute. Value may be
specified to nearest increment
of RESV
2 = Significant Digits. Value
may be specified with no more
significant digits than RESV
allows
S7F22
RESPEC 20 Object specifier for the recipe
executor
S15F29, F33,
F35
RESV 3(), 4(),
5()
Resolution value for numeric
data
If RESC=1, then RESV contains
smallest increment allowed for
parameter
S7F22
RETICLEID 20 The object identifier for a
reticle. Conforms to
OBJSPEC.
S3F35
RETPLACEINSTR 51 Instructions to indicate which
pod slots will have reticles
placed. Possible values for
ReticlePlacementInstruction
are:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
S3F35
RETREMOVEINSTR 51 Instructions to indicate which
pod slots will have reticles
removed
0 = REMOVE
1 = PASS BY
S3F35
RIC 31, 51 Reset code, 1 byte
0 = Not used
1 = Power up reset
>1 Other reset conditions
2-63 Reserved
S2F19
RMACK 51 Conveys whether a requested
action was successfully
completed, denied, completed
with errors, or will be
completed with notification to
the requestor
0 = Successful completion
1 = Cannot perform action
2 = Completed with errors
3 = Action will be completed
and notification sent
4 = No request for this action
exists
S15F4, F6, F8,
F10, F12, F14,
F16, F18, F20,
F22, F24, F25,
F26, F28, F30,
F32, F34, F36,
F38, F40, F42,
F44, F48, F53
RMCHGSTAT 5() Indicates the change that
occurred for an object
0 = No change
1 = Created
2 = Updated
3 = Stored (new)
4 = Replaced
5 = Deleted
6 = Copied (new object)
7 = Renamed
8 = Unprotected
9 = Protected
10 = Verified
11 = Linked
12 = Unlinked
13 = Certified
14 = De-certified
15 = Selected
16 = Deselected
S15F25
SEMI E5-1104 © SEMI 1982, 2004 33
Name Format Description Values Where Used
RMCHGTYPE 5() Indicates the type of change
for a recipe
0 = No change
1 = Create
2 = Update
5 = Delete
6 = Copy (new object)
7 = Rename
8 = Unprotect
9 = Product
10 = Verify
11 = Link
12 = Unlink
13 = Certify
14 = De-certify
15 = Change generic attribute
16 = Change agent-specific
attribute
17 = Change both generic and
agent-specific attributes
S15F37, F41,
F44, F46, F47,
F48
RMDATASIZE 5() The maximum total length, in
bytes, of a multi-block
message, used by the receiver
to determine if the anticipated
message exceeds the
receiver’s capacity
S15F1
RMGRNT 10 Grant code, used to grant or
deny a request. 1 byte.
0 = Permission granted
1 = Cannot accept now, try
again
2 = No space
3 = Request is on hold
4-64 Reserved
S15F2, F37,
F46
RMNEWNS 20 New name (identifier)
assigned to a recipe
namespace
S15F5
RMNSCMD 51 Action to be performed on a
recipe namespace
1 = Created
5 = Deleted
0, 2-4, 6-63 Reserved
S15F3
RMNSSPEC 20 The object specifier of a
recipe namespace
S15F3, F5, F7,
F11, F21, F23,
F25, F47
RMRECSPEC 20 The object specifier of a
distributed recipe namespace
recorder
S15F39, F41,
F43
RMREQUESTOR 11 Set to TRUE if initiator of
change request was an
attached segment. Set to
FALSE otherwise.
S15F41, F44,
F46
RMSEGSPEC 20 The object specifier of a
distributed recipe namespace
segment
S15F37, F39,
F41, F44, F46,
F47
RMSPACE 5() The amount of storage
available for at least one
recipe in a recipe namespace,
in bytes
S15F8
ROWCT 5() Row count in die increments
S12F1, F4