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SEMI E54.4-0704 © SEMI 1997, 2004 8 9 Specific Device Model Mappings 9.1 This section provides for the mapping of network- visible specific device struct ure and behavior, speci fied in a SEMI standard SDM specification,…

SEMI E54.4-0704 © SEMI 1997, 2004 7

object combines both the DM object and the SAC

object into a single object for DeviceNet. The DM and

SAC, as well as their common required and optional

attributes, services, and behavior, are described in the

CDM standard. The presentation of object attributes

and services to the DN network shall be as indicated in

Table 3.

Table 3 Network Presentation of DM Object

Attributes and Services

S-Device Supervisor Object - - Object ID == 48

Attributes

ID Name CDM

Tag

3 Device Type DmA1

4 Standard Revision Level DmA2

5 Device Manufacturer Identifier DmA3

6 Manufacturer Model Number DmA4

7 Software or Firmware Revision Level DmA5

8 Hardware Revision Level DmA6

9 Serial Number (optional) DmA7

10 Device Configuration (optional) DmA8

11 Device Status DmA9

-- * Reporting Mode DmA10

-- * Exception Status Report Interval (optional) DmA11

12 Exception Status DmA12

13 Exception Detail Alarm (optional) DmA13

14 Exception Detail Warning (optional) DmA14

Services

(hex)

Name (SEMI) Name (DN) CDM

Tag

05 Reset Reset DmS1

4B Abort Abort DmS2

4C Recover Recover DmS3

0E Get_Attribute Get_Attribute_Single DmS4

10 Set_Attribute Set_Attribute_Single DmS5

06 Execute Start DmS6

4E Perform_Diagnostic

Perform_Diagnostics DmS7

* There is no one-to-one mapping of the Reporting Mode attribute in

DeviceNet. Instead, DeviceNet specifies several attributes, services

and behaviors for its Connection Object to effect a superset of the

behaviors associated with the DM attributes Reporting Mode and

Exception Status Report Interval. See the DeviceNet specification for

details.

7.10.1 Note that the format of DM object attributes is

detailed in the CDM document; the presentation of DM

object attributes to the DN network is detailed in Table

3 and the DN specification; the format of DM object

services is detailed in the CDM document and the DN

specification; and the presentation of the DM object

services is detailed in Table 3 and the DN specification.

7.11 Sensor Object, Actuator Object, Controller

Object, and Other Object Types — These object types

are used collectively to model the type-specific

structure and behavior of the device. The requirement

and number of each of these object types in a device

model is device type-specific. Further, the attributes,

services, and behavior associated with each of these

object classes and instances in a device is also device

type-specific, but must be compliant with both SEMI

and DN specifications. The specification of these object

types for a specific device type can be found in the

appropriate SDM. The method of presentation of object

structure and behavior to the DN network for objects

defined for, and associated with, a specific device type

can be found in Section 9 of this document.

8 Protocol Compliance

8.1 A method of testing protocol compliance is

required to verify implementation conformance to the

standard. The test plan includes tests for duplicate

address resolution, mandatory objects, etc.

8.2 The compliance test suite for this protocol

necessarily includes the DeviceNet protocol compliance

specification and test suite as well as the “Conformance

Test Procedures for DeviceNet Devices on

Semiconductor Manufacturing Tools” which is

published as part of the DeviceNet specification.

Additional compliance specification required for

compliance to this NCS is provided as a set of Protocol

Specification Sheets.

8.3 Any enhancements to DeviceNet presented in this

document must be accepted by the Open DeviceNet

Vendors Association (ODVA) and incorporated into the

DeviceNet Specification before they can be

implemented as a DeviceNet product.

8.4 Protocol Specification Sheets — Compliance to this

NCS necessarily requires adherence to a set of protocol

specification sheets. These sheets are included as

Appendix 1 of this document and are included here for

reference only. For compliance with this NCS, it is

necessary to reference the latest revision of the Protocol

Specification Sheets from ODVA. Note that these

sheets provide statements of compliance for general

device data, physical conformance data,

communications data, required object implementation

(see also Section 7 or this document), and optional

object implementation. Note also that these

specification sheets must conform with DeviceNet

specifications for “Statement of Compliance” forms.

Finally note that additional specification sheets shall be

completed as necessary to specify compliance with

objects defined in SDM’s and SDM mappings (see

Section 9).

9 Specific Device Model Mappings

9.1 This section provides for the mapping of network-

visible specific device structure and behavior, specified

in a SEMI standard SDM specification, to the DN

network. Each subsection is devoted to a single SDM

specification (e.g., 9.1: Mass Flow Controller).

Additional SDM mappings are added as sub-sections to

this NCS specfication according to SEMI guidelines

and the guidelines of the SEMI SAN Interoperability

standard.

APPENDIX 1

PROTOCOL SPECIFICATION SHEETS

NOTICE: This appendix is not an official part of SEMI E54.4 and is not intended to modify or supercede the

official standard. Determination of the suitability of the material is solely the responsibility of the user. This

appendix contains a set of protocol specification sheets. Compliance to this NCS necessarily requires adherence to

this set of protocol specification sheets (see Section 8.1).

A1-1 The protocol specification set of sheets contains the following components:

• A General Device Data/Physical ConformanceData/ DeviceNet Communication Data statement of compliance.

(Form F_1, 1 page.)

• DeviceNet required object implementation statements of compliance (for Identity, Message Router, and

DeviceNet objects, see Section 7). (Forms F_2 through F_5, 4 pages.)

• NCS - DeviceNet required object implementation statements of compliance (for Device Manager and

Sensor/Actuator/Controller objects, see Section 7). (Form F_6, 2 pages.)

• Open object- and vendor- specific implementation templates (for utilization by SDMs, vendors, etc.). (Forms

F_6 through F_7, 2 pages.)

A1-1.1 Note that these protocol specification sheets are aligned with DeviceNet specifications for “Statement of

Compliance” documentation, available with the DeviceNet specification from ODVA. Detailed instructions on

completing these forms are in this “Statement of Compliance” documentation. The set of protocol specification

sheets begins on the following page.