semi合集-English.pdf - 第1281页

SEMI E5-1104 © SEMI 1982, 2004 223 Stream,Function Name (Mnemonic) Direction S15,F50 Large Recipe Download Acknowledge (LRDA) S,H<-E Description Acknowledge or error. A returned status of “accepted” means only that th…

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SEMI E5-1104 © SEMI 1982, 2004 222
Stream,Function Name (Mnemonic) Direction
S15,F48 DRNS Manager Rebuild Acknowledge M,H<->E
Description
This message is used to acknowledge the request to rebuild a distributed recipe namespace.
Structure
L,2
1. <RMACK>
2. L,P
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
p = 0 if and only if RMACK indicates no errors.
Stream,Function Name (Mnemonic) Direction
S15,F49 Large Recipe Download Request (LRDR) S,H->E,reply
Description
This is a request by the host for the equipment to request the download of a recipe via the Stream 13 Data Set Transfer protocol.
The Data Set name, DSNAME, is the text string identifier of the recipe, RCPSPEC. The Data Set is subsequently transferred as
a Stream with the following internal SECSII structured data:
L,4
1. <RCPSPEC>
2. <DATAID>
3. L,m (m = # of attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
4. <RCPBODY>
Structure
L,2
1. <DSNAME>
2. <RCPOWCODE>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 223
Stream,Function Name (Mnemonic) Direction
S15,F50 Large Recipe Download Acknowledge (LRDA) S,H<-E
Description
Acknowledge or error. A returned status of “accepted” means only that the message is understood. Upon completion of the
large recipe download
request (Stream 13 Data Set transfer scenario) the equipment initiates a separate verification transaction
(S15,F53/S15,F54) that provides the result of the verification.
Structure
<ACKC15>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F51 Large Recipe Upload Request (LRUR) S,H->E,reply
Description
This is a request by the host for the equipment to request the host to upload a recipe via the Stream 13 Data Set Transfer
protocol. The Data Set name, DSNAME, is the text string identifier of the recipe, RCPSPEC. The Data Set is subsequently
transferred as a Stream with the following internal SECSII structured data:
L,3
1. <RCPSPEC>
2. L,m (m = # of attributes)
1. L,2
1. <RCPATTRID
1
>
2. <RCPATTRDATA
1
>
.
.
m. L,2
1. <RCPATTRID
m
>
2. <RCPATTRDATA
m
>
3. <RCPBODY>
Structure
<DSNAME>
Exception
None
Stream,Function Name (Mnemonic) Direction
S15,F52 Large Recipe Upload Acknowledge (LRUA) S,H<-E
Description
Acknowledge or error. A returned status of “accepted” means only that the message is understood. The completion of the
request is signaled by an event report.
Structure
<ACKC15>
Exception
It is possible to use the ACKC15 code “command will be performed with completion signaled later” for this message.
SEMI E5-1104 © SEMI 1982, 2004 224
Stream,Function Name (Mnemonic) Direction
S15,F53 Recipe Verification Send (RVS) M,H<-E,reply
Description
This message indicates to the host that a large recipe that was transferred via Stream 13 Data Set Transfer Protocol had been
received and checked by the equipment. RCPID contains the identifier of a derived object form recipe if created during
verification. The result of the check is specified by the list of errors. An empty error list indicates no errors were found in the
recipe. The equipment is responsible for sending a single copy of this message to the host after any reception of a recipe through
S15,F49.
Structure
L,3
1. <RCPSPEC>
2. <RCPID>
3. L,2
1. <RMACK>
2. L,n (n = number of errors being reported)
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
n = 0 if and only if RMACK indicates no error. If RCPSEPC is a zero length item, then the recipe was not verified or failed
verification. If RCPID is zero length, then no derived object form recipe was originated.
Stream,Function Name (Mnemonic) Direction
S15,F54 Recipe Verification Acknowledge (RVA) S,H->E
Description
Reply by host to equipment providing response to Recipe Verification Send (RVS).
Structure
Header only
Exception
None
10.20 Steam 16 Processing Management — This stream provides protocol for a set of messages that enable the
control of material processing at equipment and equipment resources. Control is implemented by supporting two
job types; the control job and the process job. A process job is a single unit of work that ensures that the appropriate
processing is applied to a particular material by a processing resource. The Process Job provides a widely applicable
supervisory control capability for automated processing of material in equipment, irrespective of the particular
process being used. The Process Job creates a transient link between the three elements of the manufacturing
process; the first is the material to be processed. The second is the equipment on which the process will occur. The
third is the process specification, a Process Recipe. When a Process Job has completed, it ceases to exist; its Process
Job ID is no longer valid. The control job is used to group a set of related process jobs. The group is logically
related from the host’s viewpoint. For instance; if a carrier contains multiple lots, then the process jobs for each lot
(in the carrier) could be included in the control job specification. Control jobs also provide mechanisms for
specifying the destination for processed material.