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SEMI F11-0998 © SEMI 1993, 1998 1 SEMI F11-0998 TEST METHOD TO OBTAIN AN INDICATION OF THE THERMAL CHARACTERISTICS OF TUBE FI TTING CONNECTIONS MADE OF FLUOROCARBON MATERIALS 1 Purpose 1.1 Th is method provides a uniform…

SEMI F10-0698 © SEMI 1993, 1998 4

RELATED INFORMATION 1

SAMPLE TEST DATA SHEET

NOTE: This related information is not an official part of SEMI F10 and is not intended to modify or supercede the official

standard. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.

Determination of the suitability of the material is solely the responsibility of the user.

Test Date: Operator: Test Facility:

Tube Manufacturer: Fitting Manufacturer:

Tube O.D.: Fitting Tube:

Tube Wall Thickness: Fitting Size:

Tube P/N: Fitting P/N:

Tube Material: Fitting Material:

Max. Pressure — kPa T = Tube Failure, F = Fitting Connection Failure

Actual Temperature

Sample 25°C T 25°C F 75°C T 75°C F 100°C T 100°C F 125°C T 125°C F

Average =

Standard Deviation =

Actual Temperature

Sample 150°C T 150°C F 175°C T 175°C F 200°C T 200°C F

Average =

Standard Deviation =

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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SEMI F11-0998 © SEMI 1993, 1998 1

SEMI F11-0998

TEST METHOD TO OBTAIN AN INDICATION OF THE THERMAL

CHARACTERISTICS OF TUBE FITTING CONNECTIONS MADE OF

FLUOROCARBON MATERIALS

1 Purpose

1.1 This method provides a uniform procedure to

determine the thermal characteristics of tube fitting

connections made of fluorocarbon materials.

2 Scope

2.1 This method can be used to characterize tube fitting

connections on the basis of test data developed under

the conditions described herein, but the results are not

intended to imply a performance rating.

2.2 Tube defined in this method has a circular cross

section and is made of fluorocarbon materials.

2.3 Tube fittings defined in this method are made of

fluorocarbon materials for all parts in contact with the

internal fluid.

2.3.1 Parts such as a nut or gripper are not limited to

being made of a fluorocarbon material.

2.4 Only the seal between the tube and tube fitting

being evaluated is within the scope of this document.

All other, threaded seals are beyond the scope of this

document.

2.5 When using this method for making comparisons

among various tube fittings and/or manufacturers, the

user must be specific in the selection of the tube and

tube fittings to be evaluated.

2.6 The International System of Units (SI) is used as

the standard unit of measure in this document. The U.S.

Customary units are in parentheses for reference

purposes only and have been rounded to the nearest

whole value.

3 Summary of Method

Subject tube fitting connections made of fluorocarbon

materials to extreme internal pressure and temperature

conditions.

3.1 Test specimens are subjected to a constant internal

pressure while controlling the increase of fluid

temperature in uniform increments, with a cool down

period between each elevated temperature condition.

3.2 After completion of the entire temperature range,

test a new set of fittings and tubing with an increased

pressure.

4 Significance and Use

4.1 In the manufacturing of semiconductor products,

many types of hazardous chemicals and solvents are

required. As a result, tubing and various fitting designs

made of fluorocarbon materials (which are chemically

resistant to these fluids) are used to transport those

fluids. It is important to control the testing process

when evaluating various fitting designs, so that accurate

comparisons of the thermal characteristics can be made.

4.2 It is the intent of this method to provide a

procedure in which thermal transition testing of tube

fitting connections made of fluorocarbon materials will

be performed. By using this method, accurate

comparisons of various tube fitting designs can be

achieved.

4.3 The results obtained when using this method are

applicable only to conditions that specifically duplicate

the procedures used within this document.

4.4 When using this test method, it is assumed that the

test specimens are truly representative of the material

and manufacturing process specified for that product.

Departure from this assumption could introduce

discrepancies that are greater than those introduced by

departure from the details of the procedure outlined in

this method.

5 Terminology

5.1 Acronyms

5.1.1 O.D. — Outside Diameter

5.1.2 P/N — Part number

5.2 Definitions

5.2.1 characterize — To describe the quality of.

5.2.2 free end closure — A metal tube fitting

connection which is securely fastened to the tube and

does not contribute to the restraint of the test specimen.

5.2.3 subject — To expose to.

5.2.4 thermal transition — A change from a specific

elevated fluid temperature down to room temperature

and then to an elevated temperature higher than

previously tested, with the entire process repeated for

multiple temperature conditions.

SEMI F11-0998 © SEMI 1993, 1998 2

6 Description of Test Equipment

6.1 A hydraulic system capable of applying a constant

internal hydraulic pressure to all test specimens while

allowing a uniform fluid flow rate through each

specimen.

6.1.1 The pressure capability shall range from 100 to

1200, ± 35 kPa (15 to 174, ± 5 psig).

6.1.2 The fluid flow rate shall be adequate to maintain

the fluid temperature at each specimen to ± 2.8° C (±

5° F) of the specified fluid temperature.

6.1.3 The fluid temperature capability shall range from

25° C to 200° C (77° F to 392° F), within a one hour time

interval from hot to cool and vice versa.

6.2 An enclosure that will allow observation of the test

specimens and is capable of controlling the ambient

temperature to 31° ± 6° C (88° ± 11° F).

6.3 An instrument to monitor pressure within ± 1% of

full scale.

6.4 An instrument to monitor temperature within ± 1° C

(2° F).

6.5 An instrument to monitor time.

6.6 Specimen Support — Any support is acceptable as

long as it does not contribute to the restraint of the

specimen in either the circumferential or axial direction.

6.7 See Figure 1 for basic test system.

Figure 1

Basic Test System

7 Safety Precautions

WARNING: This test method will subject test

specimens to conditions that may exceed the

normal performance ratings of the products

under evaluation. Adequate precautions must

be taken to prevent injury to the person

conducting the test. The hydraulic plumbing

and safety enclosure are to be constructed of

materials which are capable of containing a

fluid at 200°C (392°F).

8 Test Specimens and Conditioning

8.1 Sample Size — A minimum of three specimens

shall be tested at each pressure condition.

8.2 Specimen Surface — All surfaces of the specimens

shall be free of visible flaws, scratches, or other

imperfections, unless typically found on a

representative sample of the product.

8.3 Specimen Conditioning — All specimens must be

conditioned for a minimum of one hour in an air

environment of 23° ± 2.8° C (73° ± 5° F) prior to being

subjected to pressure.

9 Test Procedure

9.1 Install three fitting connections, assembled per

manufacturer’s specifications, to the test manifold.

Allow for a minimum of 30 cm (12 in) of tube length

between the test fitting connection and free end closure.

(See Figure 1.)

9.1.1 The apparatus should include a section of flexible

line from the free end enclosure to return manifold to

allow for expansion.

9.2 Circulate 25° C (77° F) fluid through the test

samples with a constant pressure of 100 kPa (15 psig)

for one hour.

9.2.1 When three failures occur at any given pressure

during the initial room temperature condition (prior to

the specimens having been subjected to any elevated

temperature conditions), testing is terminated.

9.3 Increase the fluid temperature to 75° C (167° F) for

a total time of two hours from the time the temperature

was initially increased. The maximum time allowed to

achieve the elevated temperature is one hour. (See

Figure 2.)