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SEMI E30.5-0302 © SEMI 2001, 2002 25 13 Scenarios 13.1 T he purpose of this section is to d o cum e nt any MSEM specific sc enarios that must be perform ed by this cla ss of equi p ment. 13.2 Normal Reporting COMMENTS HO…

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SEMI E30.5-0302 © SEMI 2001, 2002 24
12.8 Remote Command and Processing State Relationship
Table 14 Remote Commands versus Processing States Table
Command
ABORT
CLEANUP
PP-ASSIGN
NEXT-MATERIAL
PAUSE
PP-SELECT
PP-UPDATE
RESUME
START
STOP
PROCESSING STATE
IDLE X X
PROCESSING ACTIVE
PROCESS
SETTING UP X X X X
READY X X X X X
EXECUTING X
LOAD X X X X
WORKING
ALIGN X X X X X
MEASURING X X X X X
TAKE MEASURE X X X X X
TAKE SAMPLE X X X X X
SAMPLE COMPLETE X X X X X
MEAS COMPLETE X X X X X
UNLOAD X X X X
STOPPING X X
PAUSE
PROCESS PAUSE
PAUSING X X X
PAUSED X X X X X
CHECKING X X X
ALARM PAUSED X X X
ABORTED X X
SEMI E30.5-0302 © SEMI 2001, 200225
13 Scenarios
13.1 The purpose of this section is to document any MSEM specific scenarios that must be performed by this class
of equipment.
13.2 Normal Reporting
COMMENTS HOST EQUIPMENT COMMENTS
The equipment is in the IDLE processing state and in the
ONLINE REMOTE control state. Material arrives on input
port 1.
PP-ASSIGN S2,F63-->
<--S2,F64 Positive Acknowledge.
<--S6,F11 IDLE -> SETTING UP
Positive Acknowledge. S6,F12-->
<--S6,F11 SETTING UP -> READY
Positive Acknowledge. S6,F12-->
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD.
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD->WORKING
2) Sample and/or Site level data reporting.
3) WORKING->UNLOAD
4) Substrate level data reporting.
5) UNLOAD->LOAD.
[ENDWHILE].
<--S6,F11 LOAD->STOPPING.
Positive Acknowledge. S6,F12-->
Run level data reporting.
<--S6,F11 STOPPING->IDLE.
Positive Acknowledge. S6,F12-->
13.3 ABORT/ CLEANUP Remote Command Scenario
Host issues the ABORT/CLEANUP remote command
COMMENTS HOST EQUIPMENT COMMENTS
ABORT S2,F41--> ("CLEANUP" not specified)
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to ABORTED.
Positive Acknowledge. S6,F12-->
CLEANUP S2,F41-->
<--S2,F42 Positive Acknowledge.
Equipment performs cleanup activities.
<--S6,F11 CEID is posted.
[IF] cleanup is successful:
Transition to IDLE
[ELSE]
Remain in the ABORTED state.
[ENDIF].
Positive Acknowledge. S6,F12-->
SEMI E30.5-0302 © SEMI 2001, 2002 26
13.4 PP-UPDATE Remote Command Scenario
Host issues the PP-UPDATE remote command.
COMMENTS HOST EQUIPMENT COMMENTS
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD->WORKING
2) WORKING->UNLOAD
3) UNLOAD->LOAD
[ENDWHILE]
Sometime during the
[WHILE]:
PAUSE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to PAUSING
Positive Acknowledge. S6,F12-->
<--S6,F11 PAUSING -> PAUSED
Positive Acknowledge. S6,F12-->
PP-UPDATE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 PAUSED->CHECKING
Positive Acknowledge. S6,F12-->
<--S6,F11 CEID is posted.
[IF] the updates are valid:
Return to the previous process state thru history
[ELSE]
Return to the PAUSED state. The Process Program
remains unchanged.
[ENDIF]
Positive Acknowledge. S6,F12-->
13.5 PP-ASSIGN / PP-UNASSIGN Scenario
Host issues the PP-ASSIGN/PP-UNASSIGN remote commands.
COMMENTS HOST EQUIPMENT COMMENTS
PP-ASSIGN S2,F41-->
<--S2,F42 Positive Acknowledge.
PP-UNASSIGN S2,F41-->
<--S2,F42 Positive Acknowledge.
This may occur during the
STOPPING state.
13.6 The host may setup the material for additional processing without the cassette being removed and replaced on
the equipment.