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SEMI E58-0703 © SEMI 1997, 2003 35 PROCESS MODULE 1 PROCE SS MODUL E 2 10 MANUFACTURIN G TOTAL TIME SCHEDULED DOWNTIME UNSCHE DULE D DOWNTIME NON- SCHED ULED TIM E STA NDBY PROD UCT IVE ENGINE ERING 11 4 3 13 C 1 C 2 12 …
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15 ARAMS States for Multi-Module Equipment
4.3 The preceding sections define how ARAMS is to
be supported by simple equipment. Simple equipment
includes equipment with at most one process chamber,
and a single process capability, where individual
modules are not treated separately from the equipment.
NOTE 22: Process capability, in this context, refers to the
factory’s manufacturing process. Equipment with more than
one process capability may be used in different ways at
different steps, typically through different process recipes.
Such equipment may be “available” for one process but not
for another. This type of complexity is neither addressed nor
affected by SEMI E10 or by ARAMS.
4.4 This section addresses the application of ARAMS
to complex equipment, including modular equipment
where individual modules may be in different ARAMS
states/substates. Complex equipment includes cluster
tools and any other type of equipment that is organized
into separate subsystems that can be addressed
individually. In this case, it is advantageous for each
module or subsystem to be given its own ARAMS state
model. In addition, the overall equipment system itself
has an ARAMS state model. This situation is illustrated
in Figure 6.
4.5 The complexities of possible interactions between
ARAMS states of the individual modules and the
ARAMS state of the cluster tool as a whole are beyond
the scope of this document. The following approach is
recommended:
• Each module complies to fundamental
requirements for the ARAMS state model, data
variables, and message services.
• The integrated cluster tool complies to
requirements for the ARAMS state model, data
variables, and message services.
• The set of all the ARAMS models above are
simultaneously active, as represented in Figure 6.
• The relationships between the ARAMS state for
the cluster tool and the ARAMS states for the
individual modules are user-configurable wherever
possible. (Certain relationships between the cluster
and critical modules, such as central wafer handler
or central load lock, may not be configurable: e.g.,
if the critical module is down, the cluster is down.)
SEMI E58-0703 © SEMI 1997, 2003 35
PROCESS MODULE 1
PROCESS MODULE 2
10
MANUFACTURING
TOTAL TIME
SCHEDULED
DOWNTIME
UNSCHEDULED
DOWNTIME
NON-
SCHEDULED
TIME
STANDBY
PRODUCTIVE
ENGINEERING
11
4
3
13
C
1
C
2
12
7
8
15
14
9
5
6
10
MANUFACTURING
TOTAL TIME
SCHEDULED
DOWNTIME
UNSCHEDULED
DOWNTIME
NON-
SCHEDULED
TIME
STANDBY
PRODUCTIVE
ENGINEERING
11
4
3
13
C
1
C
2
12
7
8
15
14
9
5
6
CLUSTER
TRANSPORT MODULE
10
MANUFACTURING
TOTAL TIME
SCHEDULED
DOWNTIME
UNSCHEDULED
DOWNTIME
NON-
SCHEDULED
TIME
STANDBY
PRODUCTIVE
ENGINEERING
11
4
3
13
C
1
C
2
12
7
8
15
14
9
5
6
10
MANUFACTURING
TOTAL TIME
SCHEDULED
DOWNTIME
UNSCHEDULED
DOWNTIME
NON-
SCHEDULED
TIME
STANDBY
PRODUCTIVE
ENGINEERING
11
4
3
13
C
1
C
2
12
7
8
15
14
9
5
6
Figure 6
ARAMS Model for Cluster
SEMI E58-0703 © SEMI 1997, 2003
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NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
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