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SEMI S9-1101 © SE MI 1995, 2001 5 9.9 Safety Circuit Funct ion Test 9.9.1 Test Equipment  Depends on safety de vices being t ested . 9.9.2 Procedure — Functionally tes t each safety circu it (e.g., EMO, Em er gen cy Sto…

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SEMI S9-1101 © SEMI 1995, 2001 4
9.5.2 Procedure — With the equipment disconnected
from its supply, apply a dielectric withstand potential of
1500 Volts AC or 2121 Volts DC between live metal
parts of primary circuit(s) and dead metal parts. Surge
suppression components and devices, and electronic
components certified by an accredited testing laboratory
that may be damaged may be disconnected from the
circuit for this test. For this test, the following
conditions need to be set:
• The equipment should be at its maximum operating
temperature
• Switches should be placed in the “on” position
• Circuits through contactors be completed by
manually engaging the contacts or bypassing the
contactor terminals.
9.5.2.1 Achieve the test potential gradually, starting
from zero and holding at the maximum value for a
period of one minute.
NOTE 7: A grounded circuit (neutral) conductor, if used in
the circuit, is considered a live part.
NOTE 8: Where line-to-ground filter components are
installed in the equipment, the DC dielectric potential
specified above may be used as an equivalent.
9.5.3 Acceptable Results The equipment does not
have a dielectric breakdown as indicated by a puncture,
flashover or sparkover.
NOTE 9: Breakdown is often indicated by an abrupt decrease
or nonlinear advance of voltage as the voltage is increased.
Similarly, a breakdown is often indicated by an abrupt
increase in current. Partial discharge (corona) and similar
phenomena are disregarded during application of the test
voltage.
9.6 Strain Relief Test
9.6.1 Test Equipment — Timer with accuracy of ± 5
seconds. A calibrated weight to apply a force of 156
Newtons (35 lb) ± 1.56 Newtons (0.35 lb). A
supporting surface to secure the equipment.
9.6.2 Procedure — For cord-and-plug connected
equipment, strain relief is provided to prevent
mechanical stress such as a pull or twist being
transmitted to terminals, splices or interior wiring.
Support the equipment on a surface so it will not move
when the force is applied to the cord. Apply a direct
pull of 156 N (35 pounds) to the equipment supply cord
from the least favorable angle. If necessary use pulleys
or other means to adjust the angle of force applied to
the strain relief on the equipment. Apply the force
gradually by slowly suspending the weight on the cord
and maintain the applied force for a period of one
minute.
9.6.3 Acceptable Results The equipment supply
cord does not displace to the extent that stress could be
applied to the internal connections.
9.7 Transformer Output Short Circuit Test
9.7.1 Test Equipment Timer with accuracy of ± 5
minutes. A substantial conductor suitable for carrying
the short circuit current.
9.7.2 Procedure — With the equipment in its standby
condition, short circuit the output of each power
transformer.
NOTE 10: If overcurrent protection is connected to the output
of the transformer under test, connect the short-circuit jumper
after this protective device.
EXCEPTION 1: Where the overcurrent protective
devices on the input or output of the transformer are
rated at not more than 125% of the rated current of the
transformer respectively and the overcurrent protective
devices are certified by an accredited testing laboratory,
the transformer need not be subjected to this test.
EXCEPTION 2: A thermally-protected or impedance-
protected transformer that is certified by an accredited
testing laboratory need not be subjected to this test.
9.7.3 Acceptable Results A hazardous condition
(e.g., smoke, fire, or molten material) does not exist
within 8 hours or before activation of overcurrent
protection, thermal protection, or other protective
circuit/device whichever occurs first.
9.8 Power Supply Output Short Circuit Test
9.8.1 Test Equipment Timer with accuracy of ± 5
minutes. A substantial conductor suitable for carrying
the short circuit current.
9.8.2 Procedure — With the equipment in its standby
condition, short circuit the output of each power supply,
one at a time.
NOTE 11: If overcurrent protection is connected to the output
of the power supply under test, connect the short circuit
jumper after this protective device.
EXCEPTION: A power supply that is certified by an
accredited testing laboratory and used in accordance
with its certification and the manufacturer’s instructions
need not be subjected to this test.
9.8.3 Acceptable Results A hazardous condition
(e.g., smoke, fire, or molten material) does not exist
within 8 hours or before activation of overcurrent
protection, thermal protection, or other protective
circuit/device whichever occurs first.
SEMI S9-1101 © SEMI 1995, 20015
9.9 Safety Circuit Function Test
9.9.1 Test Equipment Depends on safety devices
being tested.
9.9.2 Procedure — Functionally test each safety circuit
(e.g., EMO, Emergency Stop, End-of-travel sensors,
loss of exhaust sensors, light curtains, and safety
interlocks) by actuation and resetting.
9.9.3 Acceptable Results The following sections
provide the acceptable results for the applicable safety
systems.
9.9.3.1 When the EMO is actuated, all hazardous
voltage and all power greater than 240 volt-amps in the
equipment beyond the main power enclosure should be
de-energized, except where permitted by SEMI S2.
9.9.3.2 Actuation of the emergency stop and safety
interlocks causes the equipment, or relevant parts of the
equipment, to be automatically brought to a safe
condition.
9.9.3.3 Resetting of the safety circuit should not cause
the system to resume operation.
NOTE 12: This test documents the electrical functionality of
the safety circuit(s). It is not intended to determine or
document the appropriateness of the shutdown actions taken.
9.10 Safety Circuit Conductor Disconnection Test
9.10.1 Test Equipment None.
9.10.2 Procedure — For each independent safety
interlock (such as door interlock), EMO, and safety
sensor (e.g., exhaust sensor, low fluid level sensor),
disconnect each conductor, in turn, and each connector,
in turn.
9.10.3 Acceptable Results The following sections
provide the acceptable results for the applicable safety
circuits.
9.10.3.1 The opening of the safety circuit causes the
equipment to be placed in a safe condition as if the
safety device had been actuated
9.10.3.2 Reconnecting the conductor should not cause
the system to resume operation.
9.11 Capacitor Stored Energy Discharge Test
9.11.1 Test Equipment — Timer with accuracy of ± 1
seconds. DC voltmeter with sensitivity of 1.0%.
9.11.2 Procedure — Test each capacitor which stores a
hazardous energy (20 J or more). Monitor the voltage
across the capacitor terminals continuously.
Disconnect the equipment from the supply. Record the
voltage across the capacitor terminals after 10 seconds.
9.11.3 Acceptable Results The capacitor is
discharged to less than 20 J within 10 seconds of
equipment disconnection from the supply.
NOTE 13: The following formula is provided to calculate the
energy.
J
=
1
2
C V
2
where J is the energy in joules,
C is the capacitance in farads and
V is the potential in volts.
EXCEPTION: This criterion does not apply if a tool is
necessary to remove a panel to reach the capacitor and
the equipment is marked specifying the discharge
time—5 minutes maximum—that is required for the
capacitor to discharge to less than 20 J.
9.12 Temperature Test
9.12.1 Test Equipment Timer with accuracy of ± 5
seconds. A thermometer with a full range resolution of
0.1°C.
9.12.2 Procedure — The equipment is to be operated
at the manufacturer’s maximum design load for 8 hours
or until thermal equilibrium is reached (whichever
occurs first). Measure and record the ambient room
temperature. Measure and record the temperatures of
the various components and devices for comparison
with Table 1.
NOTE 14: Thermal equilibrium is considered to be attained
when three successive readings taken at five minutes intervals
indicate that there is no temperature change of the part
exceeding 1.0 °C.
9.12.3 Acceptable Results The measured
temperatures do not exceed the values listed in Table 1.
SEMI S9-1101 © SEMI 1995, 2001 6
Table 1 Maximum Temperature Limit
Parts of the Equipment Temperature Limit (°C)
Knife switch blade and contact jaws 55
Fuse and fuse clip 110
Rubber and thermoplastic insulated conductors See Note 1.
Field wiring terminals --
Equipment marked for 60°C or 60/75°C supply wires
75
Equipment marked for 75°C supply wires
90
Buses and connecting straps or bars 125
Capacitors See Note 2.
Power switching semiconductors See Note 3.
Printed wiring boards See Note 4.
Motors and Transformers See Note 5.
NOTE 1: The temperature as marked on the conductor.
NOTE 2: The temperature marked on the capacitor.
NOTE 3: The case temperature for the applied power dissipation recommended by the semiconductor manufacturer.
NOTE 4: The operating temperature of the board as specified by the board manufacturer.
NOTE 5: The rated temperature of the motor or transformer as specified by the manufacturer, if provided. When not provided, use appropriate
standards such as IEC 61010-1 for guidance.
10 Reporting Test Results
10.1 Include the following information on the test data form:
• Name, model, and serial number of the equipment
• Date of tests
• Name(s)/signature(s) of tester(s)
• Complete test methods and conditions
• Complete test results
• Complete test equipment information (type of test equipment, manufacturers' names, model numbers, serial
numbers, and calibration information).
10.2 The general configuration and actual operating mode that was used for the test should be clearly documented.
Where components are tested separately or only parts of the overall system are operational, this should be
documented as a condition for the test results reported. This information can be on the test data form(s), or
incorporated in the test report.
10.3 See Table 2 for a sample blank test data form.