semi合集-English.pdf - 第5798页
SEMI P23-0200 © SEMI 1993 , 2000 21 50 u m 50 u m D e ta il 1 u m 1 u m 14 .0 2.5 11 .5 7.0 0.5 2.0 1.5 1.5 2.5 45.0 de g. 4.5 ; Film Pattern Figure 16 Sub Cell Wiring (Type B)
SEMI P23-0200 © SEMI 1993, 2000 20
50 um
50 um
Detail
1 um
1 um
1.5
14.0
2.5
11.5
7.0
0.5
2.0
1.5
2.5
4.5
C
D
A
B
; Film Pattern
; Defect Position
Figure 15
Sub Cell
Wiring (Type A)
SEMI P23-0200 © SEMI 1993, 200021
50 um
50 um
Detail
1 um
1 um
14.0
2.5
11.5
7.0
0.5
2.0
1.5
1.5
2.5
45.0 deg.
4.5
; Film Pattern
Figure 16
Sub Cell
Wiring (Type B)
SEMI P23-0200 © SEMI 1993, 2000 22
50 um
50 um
Detai l
1 um
1 um
7.0
14.0
3.0 11.0
7.0
2.0
1.5
2.0
G/ H/ K/ L/ Q
; Film Pattern
; Defect Position
Figure 17
Sub Cell
Wiring (Type C)