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SEMI E54.1-1000 © SEMI 1996, 2000 1 SEMI E54.1-1000 STANDARD FOR SENSOR/ACTUATOR NETWORK COMMON DEVI CE MODEL This st andard w as technica lly approve d by the Global Inform ation & Contr ol Comm ittee and is the dir…

SEMI E54-0705 © SEMI 1997, 2005 10

RELATED INFORMATION 2

INDEX FOR SENSOR/ACTUATOR STANDARDS

NOTICE: This related information is not an official part of SEMI E54 and is not intended to modify or supercede the official

standard. After approval of this document, publication of this Related Information was authorized by the committee chairs solely

to aid in identifying the relationships between the current Sensor Bus standards and documents in process. Determination of the

suitability of the material is solely the responsibility of the user.

R2-1 Scope

R2-1.1 The table below is based on Figure 1 in SEMI E54.1, and is intended to show the relationships between

standards that are currently published, as well as describe documents in process in SEMI Standards that, if approved,

will be added to SEMI E54.

R2-1.2 There are five categories:

Main Document

Templates

Specific Device Model

Common Device Model

Network Communication Standards

R2-1.3 Standard titles with a designation number are published documents, and descriptors without designation

numbers are documents in process.

Table R2-1 Sensor/Actuator Network (SAN) Standards

SEMI E54, Sensor/Actuator Network (SAN) Standard

Templates (How to Write Network Communications Standards (NCS) and Specific Device Models (SDM))

Specific Device Models Common Device Models Network Communications Standards

SEMI E54.4, Standard for SAN

Communications for DeviceNet

SEMI E54.5, Standard for SAN

Communications for the Smart Distributed

System (SDS)

Mass Flow Controller SDM

SEMI E54.1, Standard for Sensor/Actuator

Network Common Device Model

SEMI E54.6, Standard for SAN

Communications for LONWorks

NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E54.1-1000 © SEMI 1996, 20001

SEMI E54.1-1000

STANDARD FOR SENSOR/ACTUATOR NETWORK COMMON DEVICE

MODEL

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on July 14, 2000. Initially available at www.semi.org

August 2000; to be published October 2000. Originally published in 1996; previously published February

1999.

NOTE: This document was previously designated SEMI E54.

Because this document is part of a suite of documents, its

designation has been reassigned for ease of reference.

1 Purpose

This standard defines a model comprised of device

objects which are common to all devices on a semicon-

ductor equipment sensor/actuator communications

network.

2 Scope

2.1 This document describes common device structure

and behavior (i.e., the minimum data structure and

behavior all devices must support to operate on the

network). These devices may range from simple sensors

and actuators through hosts, masters, or controllers.

2.2 The model specified in this do cument is used in

conjunction with a sensor/actuator network specific

device model which describes the data structure and

behavior characteristic of the specific device. Together,

these two models are sufficient to completely describe a

device as it appears from the network interface.

2.3 This standard, together with a sensor/actuator

network interoperability guideline, a sensor/actuator

network communication specification, and one or more

specific device model specifications, form a complete

interoperability specification. The sensor/actuator

network document architecture is shown in Figure 1.

2.4 To comply with this standard, a device must

implement and support instances of the objects, object

attributes, object services, and object behaviors ident-

fied in this document, unless explicitly stated otherwise.

3 Limitations

3.1 This standard is a companion to a suite of sensor/

actuator network communication network specifica-

tions. Therefore, using portions of this standard that re-

late to network communications necessarily requires an

understanding of the associated network specification.

3.2 As this document is a standard for a common

device model, it does not contain any information (e.g.,

object, attribute, services, or behavioral descriptions)

that relates to a specific device or device type.

3.3 While the standards depicted in Figure 1 are

sufficient to completely describe a device as it appears

from the network, they do not fully describe behavior of

the device which is not visible from the network. Some

of the behavior detail within standard objects is inten-

tionally left to the manufacturer to define. This allows

flexibility for product differentiation and creates room

for technology evolution. Manufacturer-specific objects

may be defined by the manufacturer as appropriate, but

are by definition outside the scope of this standard.

3.4 This standard is compatible, but not compliant,

with SEMI E39. This means that although this standard

does not require compliance with SEMI E39, it is

extensible such that implementations may be developed

that are fully compliant with both standards. Note that

the concepts and terminology of this standard are

compatible with those of SEMI E39. However, SEMI

E39 has specific requirements that are intended for

higher level applications and thus are not applied to the

Common Device Model.

4 Referenced Documents

4.1 SEMI Documents

SEMI E30 — Generic Model for Communications and

Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

4.2 Other Documents

ISO 7498

— Basic Reference Model for Open

Systems Interconnection

David Harel, “Statecharts: A Visual Formalism for

Complex Systems,” Science of Computer Programming

8, 1987

James Rumbaugh, Michael Blaha, William Premerlani,

Frederic Eddy, William Lorensen, Object-Oriented

Modeling and Design, Englewood Cliffs, New Jersey:

Prentice-Hall, 1991

1 International Organization for Standardization, 1 rue de Varembe,

Case postale 56, CH-1211, Geneva 20, Switzerland. Available in the

US from American National Standards Institute, 11 West 42nd Street,

13th Floor, New York, NY10036.

SEMI E54.1-1000 © SEMI 1996, 2000 2

Figure 1

Sensor/Actuator Network-Related Documents

5 Terminology

Terminology may be reproduced here which is defined

in other SEMI documents.

5.1 Device Component Terminology

5.1.1 attribute — Externally visible information

concerning an object.

5.1.2 behavior — A specification of how an object

acts. Actions result from different events the object

detects, such as receiving service request, detecting

internal faults, or elapsing timers.

5.1.3 class — A specific type or classification of

objects.

5.1.4 device — A tangible thing consisting of: (1) at

least one sensor and/or actuator and/or controller, (2) a

communications controller which supports a single

point of access to a network as specified in this docu-

ment, and (3) interconnection and management hard-

ware and software that provides for the consolidation of

(1) and (2) into a system that has the capability to

comply with the specification detailed in this document.

Examples of devices are given in Figure 2.

5.1.5 device model — An abstractio n of a device for

the purpose of understanding it before building it or

using it.

5.1.6 embedded object — An embedded object is sim-

ilar in functionality or purpose to the object in which it

is embedded, or supports the functionality of the object

in which it is embedded. The embedding construct is

utilized solely for purposes of documentation structure

and understanding. As such, it does not imply any

direct relationship, inheritance, similarity in structure,

or connectivity in addressing scheme between the em-

bedded object and the object in which it is embedded.

5.1.7 instance — A specific and real occurrence of an

object.

5.1.8 manufacturer — In the context of this document,

this refers to the manufacturer of the device.

5.1.9 object — An entity with a specific set of data

and behaviors. Objects may be physical or conceptual.

An object may be described in terms of its attributes,

services it provides, and behavior it exhibits.

5.1.10 service — A function offered or supported by

an object. A service consists of a sequence of service

primitives, each described by a list of parameters. A

service excludes definition of message structure and

protocol.

5.1.11 state diagram — A means of representing state

transitions, where the boxes represent states and the

arrows represent transitions between states.

5.2 Data Type Terminology — Unless otherwise

noted, data type terminology defined in SEMI E39 will

be used in this document. The following terminology

will also be used:

5.2.1 Boolean (BOOL) — A binary bit representing 0

and 1 corresponding to FALSE and TRUE or

DISABLE and ENABLE respectively.

5.2.2 byte — A string of eight adjacent bits,

interpreted as a unit and often representing a character.

5.2.3 character — A text symbol, letter, digit, or mark

used to represent, control, or organize information that

is one byte in length.

5.2.4 character string — A text string.