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SEMI E2-93 © SEMI 1986, 2003 3 APPLICATION NOTE NOTE: The material contained in these applic ation notes is not an official part of SEMI E2 and is not mean t to modify or supersede it in an y way. Rather, these notes are…

SEMI E2-93 © SEMI 1986, 2003 2

4 Referenced Documents

SEMI M1 — Specifications for Polished

Monocrystalline Silicon Wafers

SEMI M3 — Specifications for Polished Mono-

crystalline Sapphire Substrates

SEMI M9 — Specifications for Polished Mono-

crystalline Gallium Arsenide Slices

Figure 1

Style 1: Non-Contiguous 25 & 50 Slot

Figure 2

Style 2: Contiguous 25 & 50 Slot

SEMI E2-93 © SEMI 1986, 2003 3

APPLICATION NOTE

NOTE: The material contained in these application notes is not an official part of SEMI E2 and is not meant to modify or

supersede it in any way. Rather, these notes are provided primarly as a source of information to aid in the application of the

standard, as such, they are to be considered as reference material only. The standard should be referred to in all cases.

Table A1-1 lists the dimensions in linear, versus

angular, measurements for ease of dimensional

verification. The dimensions fall within SEMI

specification; however, they correspond closer to an

“L” angular dimension of 140 degrees versus the 150

degrees. The figures A1-1 and A1-2 illustrate these

dimensions for non-contiguous and contiguous style

quartz carriers.

A1-1 Carrier — Dimension L

Automated mass transfer of silicon wafers requires

edge contact below the centerline of the wafer

according to Table 1. These dimensions have been

determined as the minimum distance below the wafer

center line allowing the gripping mechanism to overlap

the vertical tangent of the wafer edge below the

centerline. This overlap allows the wafers to be

passively crattled. Contacting the wafer any higher

toward the centerline will require clamping force on the

wafers.

Table A1-1

Wafer Size 100 mm 125 mm 150 mm 200 mm

A 18 mm 21 mm 25 mm 32 mm

Style I & II (0.70" ) (0.82" ) (1.00" ) (1.25" )

Figure A1-1

Style 1: Non-Contiguous

Figure A1-2

Style 2: Contiguous

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user' s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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