semi合集-English.pdf - 第5515页

SEMI P10-0705 © SEMI 1990, 2005 10 [ TRANSMISSION_MARK_DRAWING ] ] [PHASE_ANGLE_TARGET [PHASE_ANGLE_REFERENCE_ONLY] [PHASE_ANGLE_TOLERANCE] [PHASE_ANGLE_RANGE] [PHASE_ANGLE _ERROR] {PHASE_ANGLE_EQUIP_REQD [PHASE_A NGLE_M…

SEMI P10-0705 © SEMI 1990, 2005 9

[ROTATE_TITLE] [ROTATE_TITLE_CHARACTERS] END_TITLE

<barcode_data> = START_BARCODE [BARCODE_TYPE] [BARCODE_TEXT] [BARCODE_LOCATION]

[BARCODE_ROTATION] END_BARCODE

<substrate> = START_SUBSTRATE

[

BLANK_SIZE] [BLANK_TYPE] [BLANK_GRADE] [BLANK_FLATNESS]

[

MASK_COATING] [RESIST_TYPE] [RESIST_THICKNESS]

[BLANK_BIREFRINGENCE_REQD]

[

ATTENUATOR] [COATING_GRADE]

euv_blank_type>]

END_SUBSTRATE

<euv_blank_type> = EUV_BLANK_TYPE

EUV_FLATNESS_FRONT

EUV_FLATNESS_BACK

EUV_MULTILAYER_COMPOSITION

EUV_CAPPING_COMPOSITION

EUV_MMR_WAVELENGTH

EUV_MEAN_PEAK_REFLECTIVITY

EUV_PEAK_REFLECTIVITY_UNIFORMITY

EUV_ABSORBER_COMPOSITION

EUV_ABSORBER_OPTICAL_PROPERTIES

EUV_BLANK_RESISTANCE

EUV_EXPANSION_COEFF

<ship_plot> = START_SHIP_PLOT

PLOT_TYPE PLOT_SCALE QUANTITY [PRICE]

[PLOT_FORMAT] [PATTERN_PLOT_NORMAL_TONE]

[<ship_to>]

END_SHIP_PLOT

<films> = SHIP_FILM [QUANTITY]

[FILM_SCALE] [FILM_SIZE] [FILM_COLOR] [FILM_NORMAL_TONE]

[PRICE] [<

ship_to>] END_SHIP_FILM

<phase_shift> =

START_PHASE_SHIFT [PHASE_SHIFT_QUALITY_ID]

PSM_WAVELENGTH

[TRANSMISSION_TARGET

[TRANSMISSION_REFERENCE_ONLY]

[TRANSMISSION_TOLERANCE]

[TRANSMISSION_RANGE] [TRANSMISSION_ERROR]

{TRANSMISSION_EQUIP_REQD [TRANSMISSION_MODE_REQD] }

{ [

TRANSMISSION_MARK_SITE_ID] TRANSMISSION_MARK_LOCATION }

[

TRANSMISSION_MARK_FEATURE]

[TRANSMISSION_MARK_LOCATION_DRAWING]

SEMI P10-0705 © SEMI 1990, 2005 10

[TRANSMISSION_MARK_DRAWING] ]

[PHASE_ANGLE_TARGET

[PHASE_ANGLE_REFERENCE_ONLY]

[PHASE_ANGLE_TOLERANCE]

[PHASE_ANGLE_RANGE] [PHASE_ANGLE_ERROR]

{PHASE_ANGLE_EQUIP_REQD [PHASE_ANGLE_MODE_REQD] }

{ [

PHASE_ANGLE_SITE_ID] PHASE_ANGLE_MARK_LOCATION }

[

PHASE_ANGLE_MARK_FEATURE]

[

PHASE_ANGLE_MARK_LOCATION_DRAWING]

[

PHASE_ANGLE_MARK_DRAWING] ]

[ETCH_DEPTH_TARGET

[ETCH_DEPTH_REFERENCE_ONLY]

[ETCH_DEPTH_TOLERANCE]

[ETCH_DEPTH_RANGE] [ETCH_DEPTH_ERROR]

{ETCH_DEPTH_EQUIP_REQD [ETCH_DEPTH_MODE_REQD] }

{ [

ETCH_DEPTH_SITE_ID] ETCH_DEPTH_MARK_LOCATION }

[

ETCH_DEPTH_MARK_FEATURE]

[

ETCH_DEPTH_MARK_LOCATION_DRAWING]

[ETCH_DEPTH_MARK_DRAWING] ]

END_PHASE_SHIFT

<registration> = START_REGISTR [

REGISTR_QUALITY_ID]

[REGISTR_ERROR] [REGISTR_SCALE [REGISTR_SCALE_REFERENCE_ONLY] ]

[REGISTR_RESIDUAL [REGISTR_RESIDUAL_REFERENCE_ONLY] ]

[REGISTR_THREE_SIGMA [REGISTR_THREE_SIGMA_REFERENCE_ONLY] ]

[REGISTR_RESIDUAL_THREE_SIGMA

[REGISTR_RESIDUAL_THREE_SIGMA_REFERENCE_ONLY] ]

[REGISTR_TOLERANCE]

[REGISTR_ORTHO [REGISTR_ORTHO_REFERENCE_ONLY] ]

[REGISTR_RELATIVE [REGISTR_RELATIVE_REFERENCE_ONLY] ]

{REGISTR_REF_MASK_ID REGISTR_REF_MASK_SET_ID}

{REGISTR_REF_MASK_NAME REGISTR_REF_MASK_SET_NAME

[REGISTR_REF_MASK_SET_VERSION] }

{REGISTR_EQUIP_REQD} {EQUIP_SITE_REQD}

[REGISTR_STD_GRID] {REGISTR_REF_METHOD_REQD}

[REGISTR_ALGORITHM] [REGISTR_COMPENSATION_TEMPERATURE]

{ [REGISTR_MARK_ID] [MASK_REGISTR_MARK] [

CELL_REGISTR_MARK]

[MEASURE_FILE_NAME]

[

REGISTR_MARK_FEATURE]

[

REGISTR_MARK_LOCATION_DRAWING] [REGISTR_MARK_DRAWING]

[REGISTR_MARK_SEPARATION REGISTR_MARK_COUNT] }

SEMI P10-0705 © SEMI 1990, 2005 11

END_REGISTR

<cd_group> = START_CD

cd_definition>]

[NUMBER_OF_CDS]

{ [

CD_SITE_ID] CD_LOCATION } [CD_MATRIX_FILE_NAME]

END_CD

<cd_definition> = [

CD_QUALITY_ID] [CD_DATA] [CD_DIGITIZED] [CD_TONE_CLEAR]

[

CD_MORPHOGRAPHY]

[

CD_PERCENT_CLEAR] [CD_PERCENT_CLEAR_WINDOW]

[CD_TARGET] [CD_ORIENTATION] [

CD_PITCH]

[

CD_FEATURE] [CD_LOCATION_DRAWING] [CD_DRAWING]

[CD_REFERENCE_ONLY]

[CD_TOLERANCE]

[CD_RANGE] [CD_THREE_SIGMA]

[CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]

[CD_STD] [CD_CORRELATION_ID]

{CD_EQUIP_REQD} {EQUIP_SITE_REQD}

<cd_set> = START_CD_SET

{

CD_GROUP_NAME}

[

CD_REFERENCE_ONLY]

[

CD_QUALITY_ID]

[

CD_TOLERANCE] [CD_RANGE] [CD_THREE_SIGMA]

[

CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]

[

CD_STD] [CD_CORRELATION_ID]

END_CD_SET

<cd_xy_definition> = START_CD_XY_DEFINITION

{CD_X_GROUP} {CD_Y_GROUP}

cd_xy_site>}

[

CD_XY_TOLERANCE] [CD_XY_DEVIATION]

[

CD_XY_REFERENCE_ONLY]

END_CD_XY_DEFINITION

<cd_xy_site> = START_CD_XY_SITE

{ [

CD_HORIZONTAL_ID] CD_HORIZONTAL_LOCATION

[

CD_VERTICAL_ID] CD_VERTICAL_LOCATION }

END_CD_XY_SITE

<cd_iso_dense_definition> = START_CD_ISO_DENSE

{

CD_ISO_GROUP} {CD_DENSE_GROUP}

[

CD_ISO_DENSE_TOLERANCE]

[

CD_ISO_DENSE_REFERENCE_ONLY]

END_CD_ISO_DENSE