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SEMI E52-0703 © SEMI 1995, 2003 1 SEMI E52-0703 PRACTICE FOR REFERENCING GA SES AND GAS MIXTURES USED IN DIGITAL MASS FLOW CONTROLLERS This practice was technically approved by the Global Ga ses Committee and is the dire…

SEMI E51-0200 © SEMI 1995, 2000 10

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SEMI E52-0703 © SEMI 1995, 2003 1

SEMI E52-0703

PRACTICE FOR REFERENCING GASES AND GAS MIXTURES USED

IN DIGITAL MASS FLOW CONTROLLERS

This practice was technically approved by the Global Gases Committee and is the direct responsibility of the

North American Gases Committee. Current edition approved by the North American Regional Standard

Committee on April 11, 2003. Initially available at www.semi.org May 2003; to be published July 2003.

Originally published in 1995; previously published March 2002.

NOTICE: This document was completely rewritten in

2003.

1 Purpose

1.1 To provide a numerical index of gases and gas

mixtures used in the semiconductor industry that will

give an ordered reference for the gases and gas

mixtures when used in mass flow devices. This index or

list will facilitate the production and use of digital mass

flow devices.

2 Scope

2.1 The list includes gases, gas mixtures, and

vaporizable materials that can be used in mass flow

devices. The list will supplement, not replace, existing

DOT/OSHA or other identification systems. For ease of

use, the list is presented sorted by gas code, gas name,

and symbol for gases and vaporizable materials and by

code and mixture percentage for gas mixtures.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to

use.

3 Limitations

3.1 This list does not provide information related to the

safe use and intended application of listed materials.

4 Referenced Standards

4.1 NIST Standard

NIST AD732-043 — JANAF Thermochemical Tables,

2nd Edition

4.2 Miscellaneous Publications

Dangerous Properties of Industrial Materials, 5th

1 National Institute of Standards and Technology, 100 Bureau Drive,

Stop 3460, Gaithersburg, MD 20899-3460, USA. Telephone:

301.975.6478, Website: www.nist.gov

2 CRC Press LLC, (Headquarters) 2000 Corporate Blvd., NW, Boca

Raton, FL 33431, 561.994.0555

The Merck Manual Index, 6th Edition

4.3 Data Sheets

American Cyanamid Data Sheet

DuPont Data Sheet

Schumacher Material Safety Data Sheet, No. R&D 49.3

JN, Revision Date 1/95

Schumacher Product Data Sheet, No. 23, Revision 3

4.4 Handbooks

Chemical Engineers’ Handbook, 5th Edition

CRC Handbook of Chemistry and Physics, 75th

4.5 Other Standard

Nomenclature of Organic Chemistry, authored by

International Union of Pure and Applied Chemistry

3 Litton Publishing

4 Matheson Gas Products, Inc., 959 Route 46 East, P.O. Box 624,

Parsippany, NJ 07054, 973.257.1100

5 This publication is available from Franklin Electronic Publishers, 1

Franklin Plaza, Burlington, NJ 08060, 1.800.266.5626

6 Air Products & Chemicals Inc.-PA, Rural Route 1, Tamaqua, PA

18252, 717.467.2981

7 American Cyanamid Company, CALI Corporation Center, 50 Tice

Blvd., Woodcliff Lake, NJ 07675, 201.930.0455

8 Callery Chemical Company, P.O. Box 429, Pittsburgh, PA 15230,

412.967.4100

9 E.I. du Pont de Nemours and Company, 1007 Market St.,

Wilmington, DE 19898, 302.774.1000

10 Schumacher, 1969 Palomar Oaks Way, Carlsbad, CA 92009-1307,

619.931.9555

11 McGraw-Hill Inc., Princeton Rd., Hightstown, NJ 08520,

609.426.5934

12 CRC Press LLC Headquarters,2000 NW Corporate Blvd, Boca

Raton,FL 33431, USA, Phone: 1(800)272-7737 or (561)994-0555

Fax: 1(800)374-3401 or (561)989-9732

13 This publication is available from Franklin Book Company, 7804

Montgomery Ave., Elkon’s Park, PA 19027, 215.635.5252

SEMI E52-0703 © SEMI 1995, 2003 2

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 formula — the structural representation of a gas, indicating the molecular groupings. Formulas are unique and

unambiguous except in the case of isomers.

5.1.2 gas code — an integer that is uniquely associated with a particular gas.

5.1.3 gas name — the accepted name for a gas as specified in Nomenclature of Organic Chemistry.

5.1.4 symbol — commonly accepted, unambiguous, and unique identification using ASCII characters with no

subscripts, superscripts, or parenthesis.

6 Gas Table Sorted by Code

Table 1 Gases Sorted by Code

Code Gas Name Symbol Formula Synonym Ref

1 Helium He He 1

2 Neon Ne Ne 1

3 Radon Rn Rn 2

4 Argon Ar Ar 1

5 Krypton Kr Kr 1

6 Xenon Xe Xe 1

7 Hydrogen H2 H

8 Air Air 1

9 Carbon Monoxide CO CO 1

10 Hydrogen Bromide HBr HBr 1

11 Hydrogen Chloride HCl HCl 1

12 Hydrogen Fluoride HF HF 1

13 Nitrogen N2 N

14 Deuterium D2 H

D2 2

15 Oxygen O2 O

16 Nitric Oxide NO NO 2

17 Hydrogen Iodide HI HI 1

18 Fluorine F2 F

19 Chlorine Cl2 Cl

20 Water Vapor H2O H

O 2

21 Bromine Br2 Br

22 Hydrogen Sulfide H2S H

S 1

23 Hydrogen Selenide H2Se H

Se 1

24 Hydrogen Cyanide HCN HCN 1

25 Carbon Dioxide CO2 CO

26 Nitrogen Dioxide NO2 NO

27 Nitrous Oxide N2O N

O 1

28 Methane CH4 CH

29 Ammonia NH3 NH

30 Ozone O3 O

31 Phosphine PH3 PH