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SEMI E117-1104 © SEMI 2002, 2004 5 890   H  2690 (exp. eqpt .) H = 925 ± 35 (others) H1  60 D  250 equipment boundary facial reference plane RSP front load face plane S  290 [358] equipment top (see SEMI E72 ) o…

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SEMI E117-1104 © SEMI 2002, 2004 4
a. Exposure Equipment with RSP Load Ports on Rear
b. Exposure Equipment with RSP Load Ports on One Side, and an Optional View of a 90
OHV Track Orientation.
Figure 1
Easement for Overhead Transport
SEMI E117-1104 © SEMI 2002, 2004 5
890

H
2690
(exp. eqpt.)
H = 925 ± 35
(others)
H1
60
D 250
equipment
boundary
facial
reference
plane
RSP
front
load
face
plane
S 290
[358]
equipment
top
(see SEMI
E72
)
overhead
track
clearance
bilateral
reference
planes
RSP
horizontal
reference
plane
floor
H2
2600
(reticle stockers
and inspection
equipment)
H2 2900
(exposure
equipment)
C2
50
C1
75
Front
View
Side
View
D1
196
a. Reticle Stockers, Inspection Equipment, and Exposure Equipment with Load Ports on the Rear
H6
3200
890
H
2690
(exp. eqpt.)
H = 925 ± 35
(others)
H2
2900
H1
60
D
250
C2
50
C1
75
equipment
boundary
facial
reference
plane
RSP
front
load
face
plane
equipment
top
(see SEMI
E72)
overhead
track
clearance
bilateral
reference
planes
RSP
horizontal
reference
plane
floor
S 290
[358]
Front
View
Side
View
D1
196
b. Exposure Equipment with Load Ports on One Side
Figure 2
Reticle Load Port Requirements
SEMI E117-1104 © SEMI 2002, 2004 6
D
250
bilateral reference plane facial reference plane
RSP footprint
C1
75
equipment boundary above H1
load face
plane
C2
50
C2
50
C1
75
horizontal reference plane
bilateral reference plane
(reticle
centroid)
equipment
boundary
above H1
C1
75
RSP
H1 60
Figure 3
Exclusion Volumes at Horizontal Reference Plane of Reticle Load Port