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SEMI S3-91 © SEMI 199 1 4 Figure 1
SEMI S3-91 © SEMI 1991, 19963
6.3 Joseph Lotti, “Electric Immersion Heater
Redundant Control System”, presented to
Semiconductor Safety Association Annual Conference,
May 1986.
6.4 Factory Mutual Insurance Corporation, “Plastics
and Plastic-Lined Tanks with Electric Immersion
Heaters,” 7-6.
6.5 National Electrical Code, “Articles 500, 501,
Hazardous Locations,” latest edition.
6.6 National Electrical Code, “Art icles 250, 422, 427,
and 516, Grounding, Appliances, Fixed Electrical
Heating for Pipe Lines and Vessels and Spray
Application, Dipping and Coating Processes.”
6.7 SEMI S2, Safety Guidelines for Semiconductor
Manufacturing Equipment.
SEMI S3-91 © SEMI 1991 4
Figure 1
SEMI S3-91 © SEMI 1991, 19965
NOTICE: These guidelines do not purport to address
all of the safety issues associated with their use. It is the
responsibility of the users of these guidelines to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use. SEMI makes no warranties or
representations as to the suitability of the guidelines set
forth herein for any particular application. The
determination of the suitability of these guidelines is
solely the responsibility of the user. Users are cautioned
to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
guidelines are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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