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SEMI P41-0304 E © SEMI 2004 14 M a sk Or ig i n P o int To o l O r i g in Po in t Mas k Tool O ff se t X an d Y S tag e or H ol d e r Sk ew Sc a l e Coo r d i nat e S yst e m Figure 9 Tool Coordi nate

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Mask S ize
Inspecti on Are a
Chip Size
Inspection Area Chip
Reference Point
Figure 8
Inspection Area
SEMI P41-0304
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© SEMI 2004 14
Mask Origin Point
Tool Origin Point
Mask
Tool Offset X and Y
Stage or Holder
Skew
Scale
Coordinate System
Figure 9
Tool Coordinate
SEMI P41-0304
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Reference mark
Mask
Stage or Holder
I D
Figure 10
Direction
Image Reference
Image Data
Image Referenc Point
Position Information X and Y
Figure 11
Image Reference