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SEMI E98-1102 © SEMI 2000, 2002 39 12.15 Resume — Table 28 defines the service for starting an activ it y at a designated Equi pmentModul e or at the Equipment . Table 28 ResumeService Defi nition Parameter Req/Ind Rsp/C…

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SEMI E98-1102 © SEMI 2000, 2002 38
12.9 Cleanup — This service directs the equipment to return all substrates that have been removed from their
carriers to their appropriate destinations. Table 22 defines the Cleanup service.
Table 22 Cleanup Service Definition
Parameter Req/Ind Rsp/Conf Description
RequestStatus - M Result status
12.10 GetDateTime — Table 23 defines the GetDateTime service.
Table 23 GetDateTime Service Definition
Parameter Req/Ind Rsp/Conf Description
DateTime - M Date and time.
RequestStatus - M Result status
12.11 ChangeService — Table 24 defines the ChangeService service. This service requests that the target object be
placed either in service or out of service. The user shall only be allowed to place an object back into service if it was
originally put out of service by a user.
Table 24 ChangeService Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
Service M - New substate for SERVICE.
RequestStatus - M Result status
12.12 Pause — Table 25 defines the Pause service.
Table 25 Pause Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
RequestStatus - M Result status
12.13 RemoveProcessCapability — Table 26 defines the service to remove a process capability from the
ProcessCapabilityList.
Table 26 RemoveProcessCapability Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
ProcessCapability M - Capability to be removed
RequestStatus - M Result status
12.14 RemoveElement — Table 27 defines the service to remove an element previously added by a user.
Table 27 RemoveElement Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for element to be removed
RequestStatus - M Result status
SEMI E98-1102 © SEMI 2000, 2002 39
12.15 Resume — Table 28 defines the service for starting an activity at a designated EquipmentModule or at the
Equipment.
Table 28 ResumeService Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
RequestStatus - M Result status
12.16 SelectProgram — Table 29 defines the service to select a program for an EquipmentIODevice.
Table 29 SelectProgram Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target object.
DeviceProgramID M - Text
RequestStatus - M Result status
12.17 SetDateTime — Table 30 defines the service for setting the equipment’s date and time.
Table 30 SetDateTime Service Definition
Parameter Req/Ind Rsp/Conf Description
DateTime M - Date and time
RequestStatus - M Result status
12.18 Shutdown — Table 31 defines the service to shut down the equipment or one of its modules.
Table 31 Shutdown Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
RequestStatus - M Result status
12.19 Start — Table 32 defines the service for starting an activity at a designated EquipmentModule or at the
Equipment.
Table 32 Start Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for EquipmentModule or Equipment.
RequestStatus - M Result status
12.20 Startup — Table 33 defines the service to start up the equipment or one of its modules.
Table 33 Shutdown Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for target
RequestStatus - M Result status
SEMI E98-1102 © SEMI 2000, 2002 40
12.21 Stop — Table 34 defines the service for stopping an activity at the equipment or one of its modules.
Table 34 Stop Service Definition
Parameter Req/Ind Rsp/Conf Description
ObjSpec M - Object specifier for EquipmentModule or Equipment.
RequestStatus - M Result status
12.22 SynchDate&Time — The SynchDate&Time service instructs the equipment to synchronize date and time with
the network at its next opportunity to do so at a time where a timestamp series for work in process will not be
compromised by a change in date or time. This service is defined in Table 35.
Table 35 SynchDate&Time Service
Parameter Req/Ind Rsp/Conf Description
RequestStatus - M Result status
13 Services Provided by Factory Systems
13.1 This section describes the services provided by the factory system. These are messages sent by the equipment
to the factory system.
13.2 Date and Time Request — The equipment may request the current date and time from the factory system. This
message service is identical to the GetDateTime service defined in Section 12.6 and Table 23.
13.3 Event Notification — The factory system will receive standard event notifications from the equipment. Event
notifications used will depend upon the protocol used.
13.4 Alarm and Error Notifications — The factory system will receive notifications of errors and alarms. Errors
may be recoverable. Equipment shall comply to SEMI E41.
14 OBEM Compliance
NOTE 6: Section must be completed in order for the provisional status of OBEM to be removed.
15 Scenarios
NOTE 7: Section must be completed in order for the provisional status of OBEM to be removed.
15.1 This section contains scenarios showing typical interactions between factory and equipment, including
interactions defined by other standards.
NOTICE: SEMI makes no warranties or representations as to the suitability of the provisional standards set forth
herein for any particular application. The determination of the suitability of the provisional standard is solely the
responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data
sheets, and other relevant literature respecting any materials mentioned herein. These provisional standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this provisional standard may require use of
copyrighted material or of an invention covered by patent rights. By publication of this provisional standard, SEMI
takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item
mentioned in this provisional standard. Users of this provisional standard are expressly advised that determination of
any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their own responsibility.