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SEMI E109-0305 © SEMI 2001, 2005 30 14.4.3.2.1.3.1 RETICLE ID VERIFICATION — This is a sub state of RETICLE QUALIFICATION and is active when the reticle ID has not been verified. There a r e two substates, READING ID and…

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SEMI E109-0305 © SEMI 2001, 2005 29
14.4.2 Reticle State Model Diagram
RETICLE STATE
RETICLE AT
EQUIPMENT
RETICLE NOT PRESENT
3
UNQUALIFIED RETICLE
4
8
RETICLE QUALIFICATION
QUALIFIED RETICLE
REJECTED
QUALIFIED
IN USE
20
22
1
2
13
WAITING
QUALIFICATION
18 19
11
10
21
6
PARTICLE
INSPECTION
15
RETICLE ID VERIFICATION
9
14
7
5
READING ID
RETICLE
WAITING FOR
HOST
16
17
Figure 7
Reticle State Model Diagram
14.4.3 Reticle State Definition
14.4.3.1 RETICLE NOT PRESENT This is a subset of RETICLE STATE and is active when the reticle is not
present on the Equipment. The reticle has been instantiated with a Bind, PodNotification, ReticleTransferJob, or
MoveReticle service.
14.4.3.2 RETICLE AT EQUIPMENT This is a subset of RETICLE STATE and is active when the reticle is
present. The reticle is physically present on the Equipment. There are two substates, UNQUALIFIED RETICLE
and QUALIFIED RETICLE.
14.4.3.2.1 UNQUALIFIED RETICLE
This is a substate of RETICLE AT EQUIPMENT and is active when the
reticle is physically present but not QUALIFIED. There are three substates, WAITING QUALIFICATION,
RETICLE QUALIFICATION, AND REJECTED.
14.4.3.2.1.1 WAITING QUALIFICATION This is a substate of UNQUALIFED RETICLE and is active when
the reticle is waiting to be selected for qualification. The physical ReticleID is not read in this state.
14.4.3.2.1.2 REJECTED This is a substate of UNQUALIFIED RETICLE and is active when the reticle did not
pass the qualification(s) due to an unexpected ReticleID or poor inspection results. The operator or the host
(depending on the control mode) will have to decide if the reticle must be re-qualified or removed from the
equipment.
14.4.3.2.1.3 RETICLE QUALIFICATION This is a substate of UNQUALIFIED RETICLE and is active when
the reticle is being qualified for production. The ReticleID is being read from the ReticleID and/or a reticle
inspection for particles is being performed. There are two substates: RETICLE ID VERIFICATION and
PARTICLE INSPECTION.
SEMI E109-0305 © SEMI 2001, 2005 30
14.4.3.2.1.3.1 RETICLE ID VERIFICATION — This is a substate of RETICLE QUALIFICATION and is active
when the reticle ID has not been verified. There are two substates, READING ID and RETICLE WAITING FOR
HOST.
14.4.3.2.1.3.1.1 READING ID — This is a substate of RETICLE ID VERIFICATION and is active when the
Reticle ID is being read.
14.4.3.2.1.3.1.2 RETICLE WAITING FOR HOST — This is a substate of RETICLE ID VERIFICATION and is
active when the Reticle ID has been read successfully or unsuccessfully and has not yet been verified by the host.
14.4.3.2.1.3.2 PARTICLE INSPECTION — This is a substate of RETICLE QUALIFICATION and is active when a
reticle is being evaluated for particles.
14.4.3.2.2 QUALIFIED RETICLE
This is a substate of RETICLE AT EQUIPMENT and is active when the
reticle may be used for production. It has two substates QUALIFIED and IN USE.
14.4.3.2.2.1 IN USE This is a substate of QUALIFIED RETICLE and is active when any kind of processing on
the reticle is being done (i.e. the reticle is not at an inventory position).
14.4.3.2.2.2 QUALIFIED This is a substate of QUALIFIED RETICLE and is active when the reticle is at an
inventory position, including either the internal reticle buffer or a reticle pod.
14.4.4 Reticle State Transition Table Table 13 indicates the triggers and the expected behavior of the instantiated
reticle object.
Table 13 Reticle State Transition Definition
# Current State Trigger New (Sub-)State Action Comment
1
This
transition
is not
currently
used.
-
2
This
transition
is not
currently
used.
-
3 (no state) A reticle is instantiated via the Bind,
PodNotification, or
ReticleTransferJob, message in
which the content map is provided,
or the reticle is instantiated via a
MoveReticle service for which the
Reticle Pod has not been received by
the equipment.
RETICLE NOT
PRESENT
Data required to be
available for this event
report:
PodID
4 (no state) A reticle is instantiated after placing
a reticle pod on a load port via a
reticle PodID tag read that provided
the content map or via a
MoveReticle service for which the
Reticle Pod has been received by the
equipment.
WAITING
QUALIFICATION
None. This transition happens
only if the content map
has not been provided
to the equipment prior
to reticle pod load port
receiving a reticle pod.
5 (no state) A reticle is instantiated via a
ReticleID read and a particle
inspection is still required.
PARTICLE
INSPECTION
Data required to be
available for this event
report:
ReticleLocationID
SEMI E109-0305 © SEMI 2001, 2005 31
# Current State Trigger New (Sub-)State Action Comment
6 (no state) A reticle is instantiated via a
ReticleID read and no particle
inspection is required.
QUALIFIED Data required to be
available for this event
report:
ReticleLocationID
7 (no state) A reticle is instantiated via a reticle
ID read and Host based ID
verification is required.
RETICLE
WAITING FOR
HOST
Data required to be
available for this event
report:
ReticleLocationID
8 RETICLE NOT
PRESENT
A Reticle Pod load port receives a
previously instantiated reticle pod
for which the equipment holds the
content map attribute.
WAITING
QUALIFICATION
9 WAITING
QUALIFICATION
The equipment has begun to qualify
a previously instantiated reticle.
READING ID
10 RETICLE
QUALIFICATION
Equipment based: Equipment
decides based on preset criteria that
a reticle is suited for use.
Host based – The equipment
receives the ProceedWithReticle
Service.
QUALIFIED Reticle qualification
includes both ID
verification and quality
verification. Reticle is
able to be used.
11 QUALIFIED Host based: The equipment receives
a Re-qualify service.
PARTICLE
INSPECTION
Start reticle
inspection.
12 RETICLE
QUALIFICATION
Equipment based – Equipment
determines that an incorrect reticle
has been delivered or that a reticle
inspection failed.
Host based – The equipment
receives a RejectReticle service from
the host.
Operator based – An operator issues
a RejectReticle command from the
equipment operator interface.
REJECTED Data required to be
available for this event
report:
ReticleLocationID
Reject Reason
13 REJECTED Host based – The equipment
receives a Re-qualify service.
Equipment based – A re-inspection
is automatically triggered by the
Equipment.
PARTICLE
INSPECTION
Start reticle
inspection.
14 QUALIFIED
RETICLE
Host based - The equipment receives
a RejectReticle service from the
host.
Equipment based -Inspection results
of the reticle are expired.
Operator based – An operator issues
a RejectReticle command from the
equipment operator interface.
REJECTED
15 RETICLE ID
VERIFICATION
Equipment based – The reticle ID is
verified to be the correct one and a
particle inspection is required.
Host based – The equipment
receives a ProceedWithReticle
Service and a particle inspection is
required.
PARTICLE
INSPECTION
Comment – this
transition occurs when
particle inspection is
needed.