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SEMI E19.3-0697 © SEMI 1991, 2002 1 SEMI E19.3-0697 (Reapproved 0702) PORT STANDARD FOR MECHANI CAL INTERFACE OF WAFER CASSETTE TRANSFER, 150 mm (6 inch) PORT This standard was techni cally approved by the Global P hysic…

SEMI E19.2-0697 © SEMI 1991, 2002 2

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

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the risk of infringement of such rights, are entirely their own responsibility.

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SEMI E19.3-0697 © SEMI 1991, 2002 1

SEMI E19.3-0697 (Reapproved 0702)

PORT STANDARD FOR MECHANICAL INTERFACE OF WAFER

CASSETTE TRANSFER, 150 mm (6 inch) PORT

This standard was technically approved by the Global Physical Interfaces & Carriers Committee and is the

direct responsibility of the North American Physical Interfaces & Carrier Committee. Current edition

approved by the North American Regional Standards Committee on March 17, 2002. Initially available at

www.semi.org June 2002, to be published July 2002. Originally published in 1991; previously published June

1997.

The complete specification for this interface includes all general requirements of SEMI E19.

Table 1 Port Dimensions for 150 mm (6 in.) Wafer Cassette

A1 98.48 mm ± 0.13 mm (3.875 in. ± 0.005 in.)

A2 98.48 mm ± 0.13 mm (3.875 in. ± 0.005 in.)

Port Door

A3 9.53 mm ± 0.25 mm (0.375 in. ± 0.010 in.)

B1 115.57 mm ± 0.13 mm (4.550 in. ± 0.005 in.)

B2 107.95 mm ± 0.13 mm (4.250 in. ± 0.005 in.)

B3 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

B4 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

B5 17.78 mm (0.700 in.) maximum

B7 12.70 mm (0.500 in.) minimum

B8 3.18 mm ± 0.25 mm (0.125 in. ± 0.010 in.)

Guide Rails

B9 6.35 mm (0.250 in.) maximum radius

C1 106.68 mm ± 0.13 mm (4.200 in. ± 0.005 in.)

C2 6.35 mm ± 0.13 mm (0.250 in. ± 0.005 in.)

C3 63.50 mm ± 0.13 mm (2.500 in. ± 0.005 in.)

C4 3.18 mm ± 0.05 mm (0.125 in. ± 0.002 in.) diameter

C6 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

C7 Full spherical radius

Latch Pins

C8 4.44 mm (0.175 in.) minimum

D1 152.40 mm ± 0.13 mm (6.000 in. ± 0.005 in.)

D2 76.20 mm ± 0.13 mm (3.000 in. ± 0.005 in.)

D3 165.10 mm ± 0.13 mm (6.500 in. ± 0.005 in.)

D4 82.55 mm ± 0.13 mm (3.250 in. ± 0.005 in.)

D5 6.35 mm ± 0.08 mm (0.250 in. ± 0.003 in.)

D6 10.16 mm ± 0.25 mm (0.400 in. ± 0.010 in.)

Registration

D7 Full spherical radius

F1 1.36 kg (3 lb) minimum Latch Pin Force each

F2 1.36 kg (3 lb) minimum

G1 12.70 mm ± 0.25 mm (0.500 in. ± 0.010 in.) Position of Cassette

G2 0.50 mm (0.020 in.) maximum

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,