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SEMI E47.1-0305 © SEMI 1997, 2005 23 z314= 5.00±0.25 y241=8.5±0.25 z315=1.3±0.5 y240 =158.0±0.5 Facial Datum Plane Horizontal Datum Plane r70  0.25 (2X) r71= 0.50±.25  =17.5°±2.5° Figure R1-4 Side View Detail of Exampl…

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SEMI E47.1-0305 © SEMI 1997, 2005 22
y240
=158.0±0.5
BILATERAL DATUM PLANE
x251=132±1
r67240
[242]
(r67=240.0+0.0/-2.0
for conveyor
groove example)
FACIAL DATUM
PLANE
EXAMPLE
CONVEYOR GROOVE
Example Conveyor Groove
Lead In Detail- See Fig. R4-4
Figure R1-2
Bottom View of FOUP Showing Example Conveyor Groove
HORIZONTAL DATUM PLANE
Example Conveyor Groove
Lead In Detail- See Fig. R4-4
y240=158.0±0.5
FACIAL DATUM PLANE
FOUP BOTTOM
SURFACE
Figure R1-3
Side View of FOUP Showing Example Conveyor Groove Feature
SEMI E47.1-0305 © SEMI 1997, 2005 23
z314=
5.00±0.25
y241=8.5±0.25
z315=1.3±0.5
y240
=158.0±0.5
Facial Datum Plane
Horizontal Datum Plane
r700.25
(2X)
r71=
0.50±.25
=17.5°±2.5°
Figure R1-4
Side View Detail of Example Conveyor Groove on Bottom of FOUP
=3°±1°
x251=132±1
Example Conveyor
Groove Center Line
Figure R1-5
Example Conveyor Groove on Bottom of FOUP
SEMI E47.1-0305 © SEMI 1997, 2005 24
R1-5 Alternate Conveyor Features may be incorporated into FOUPs. One example is a Rear Conveyor Recessed
Rib. A Rear Conveyor Recessed Rib is defined as below. This design, and/or the application of this design in
AMHS systems may be protected by one or more patents.
Table R1-2
Symbol Used Value Specified Datum Measured From Feature Measured To
r500 240.0 +0.0/-2.0mm y67 in front of nominal
wafer center line (same as
r67)
Extreme ends of recessed rib in X
direction.
y501
162.25 0.5mm
(6.39 0.02 in.)
facial datum plane centerline of recessed rib
y502 4.0 +0.0/-0.5mm
(0.157 +0.000/-0.020 in.)
conveyor rib wall furthest
from facial datum plane
conveyor rib wall closest from facial
datum plane
z503
1.21 0.5mm
(0.050 0.020 in.)
bottom surface of conveyor
rib
beginning of conveyor rib lead in
radius
z504
4.0 0 .5mm
(0.157 0.020 in.)
beginning of conveyor rib
lead in radius
bottom surface of recess
505 10.0 2.5
conveyor rib centerline lead in surface or rib
r506 0.25 +0.0/-0.25mm
(0.010 +0.000/- 0.010 in.)
not applicable conveyor rib convex corners
r507
0.5 0.5mm
(0.020 0.020 in.)
not applicable conveyor rib concave corners
y501
=162.25±0.5
BILATERAL DATUM PLANE
FACIAL DATUM
PLANE
EXAMPLE CONVEYOR
RECESSED RIB
r500=240.0+0.0/-2.0
for conveyor
recessed rib example
Figure R1-6
Bottom View of FOUP Showing Example Conveyor Recessed Rib