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SEMI E36.1-0704 © SEMI 2004 3 5.5.1 Element Description — The Manual element is used t o define the d ocuments i n a docum ent manual set. The content of the Manual element is not interp reted. 5.5.2 Metadata — In additi…
SEMI E36.1-0704 © SEMI 2004 2
5.3 Attributes associated with the elements appearing below are multi-valued; no restrictions on cardinality are
expressed or implied. If an attribute has multiple values, the attributes statement must be repeated, once for each
value.
5.4 Element Name — E36Item
5.4.1 Element Description — This element serves as the basic super type from which, by default, all of the elements
in the SEMI E36 tag set are derived. An E36Item element can contain arbitrary content. The E36Item element has
the following attributes:
• ItemID — Globally unique URI
1
used to distinguish each E36Item. This attribute partitions the space of
E36Items into equivalence classes, each of which represents an individual item of information.
• EditionID — Globally unique URI
2
used to distinguish each member of an equivalence class, as defined by the
ItemID. This attribute is used to control variation within an equivalence class.
5.4.2 Metadata The following namespaces are defined for E36Item metadata:
5.4.2.1 DC — representing the Dublin Core
3
namespace.
5.4.2.2 RDF — representing the Resource Description Framework
4
namespace.
5.4.2.3 e36base — representing the E36 basic namespace.
5.4.3 In the DC namespace, standard interpretations of the following items of metadata are utilized:
5.4.3.1 Title
5.4.3.2 Publisher
5.4.3.3 Subject
5.4.3.4 Description
5.4.3.5 Format
5.4.3.6 Source
5.4.3.7 Language
5.4.3.8 Rights
5.4.4 In the e36base namespace, the following items of metadata are utilized:
5.4.4.1 ReleaseDate — This item is a Date describing the moment when the content contained in the tag becomes
valid. (mandatory)
5.4.4.2 ExpirationDate — This item is a Date describing the moment when the content contained in the tag
becomes invalid.
5.4.4.3 VersionString — This is a string to be used in assigning a human-readable version name to an individual
edition of an E36Item.
5.4.5 In the RDF namespace, we make use of the following metadata item:
5.4.5.1 Type (see:
http://www.w3.org/TR/2000/CR-rdf-schema-20000327/#s2.3.1
).
5.5 Element Name — Manual
1 We recommend using GUID-based URI for this function, although any scheme which generates URI which are guaranteed to be globally
unique is acceptable.
2 See footnote number one.
3 See
http://dublincore.org/ for information relating to the Dublin Core Metadata Initiative (DCMI). See
http://dublincore.org/schemas/xmls/simpledc20020312.xsd
for the related XML schema. For a list of Dublin Core metadata elements, see
http://dublincore.org/documents/dces
4 See
http://www.w3.org/TR/2000/CR-RDF-schema-20000327/ for the latest RDF specification.
SEMI E36.1-0704 © SEMI 2004 3
5.5.1 Element Description — The Manual element is used to define the documents in a document manual set. The
content of the Manual element is not interpreted.
5.5.2 Metadata — In addition to the metadata available from the E36Item tag, the Manual element supports the
following additional metadata, all in the e36base namespace:
5.5.2.1 ManualType
5.5.2.1.1 OperationsManual — Manual type typically used by equipment operators at customer sites to perform the
tasks for which the equipment was designed.
5.5.2.1.2 InstallationManual — Manual type typically used by supplier and customer engineers to install the
equipment at the customer site.
5.5.2.1.3 MaintenanceManual — Manual type typically used by trained maintenance technicians at customer sites
to perform repair and upkeep of equipment.
5.5.2.1.4 MaintenanceSchedule — Manual type typically used by site coordinators and customer facility managers
to schedule and document normal preventive maintenance.
5.5.2.1.5 PartsList — Manual type typically used by on-site field service engineers and customers to identify parts
to order and to maintain a sufficient stocking level to ensure prompt delivery of parts.
5.5.2.1.6 TroubleshootingManual — Manual type typically used by equipment operators and qualified maintenance
technicians to identify and correct equipment problems.
5.5.2.1.7 ReleaseNotes — Manual type typically used by operators, technicians and system administrators to
identify changes in software configuration.
5.5.2.1.8 TrainingManual — Manual type typically used by supplier training personnel and customers to train
operators and maintenance technicians.
5.6 Element Name — Configuration
5.6.1 Element Description — The Configuration element is used to describe a unique piece of semiconductor
manufacturing equipment. The content of the Configuration element is not interpreted.
5.6.2 Metadata — In addition to the metadata available from the E36Item tag, the Configuration element supports
the following additional metadata, all in the e36base namespace:
5.6.2.1 WaferSize — Specific to the wafer size for the specific semiconductor manufacturing equipment set; may be
200mm, 300mm, or “Other”. (mandatory)
5.6.2.2 Mainframe — Designation of mainframe type for the specific semiconductor manufacturing equipment set.
5.6.2.3 TechnologyArea — The area in which the semiconductor manufacturing equipment set is located in the
semiconductor manufacturing process.
5.6.2.3.1 Lithography
5.6.2.3.2 Etch
5.6.2.3.3 Planarization
5.6.2.3.4 Diffusion
5.6.2.3.5 Thin Film
5.6.2.3.6 Implant
5.6.2.3.7 Analytical
5.6.2.3.8 Sort
5.6.2.3.9 Assembly/Test
5.6.2.4 Process — Free text field allowable for process type used in the specific semiconductor manufacturing
equipment.
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5.6.2.5 Equipment — Supplier-defined identifier for a specific type of semiconductor manufacturing equipment.
5.7 Element Name — Recipe
5.7.1 Element Description — The Recipe element defines a semiconductor manufacturing equipment recipe or set
of instructions pertaining to the process, test or qualification on the specified semiconductor manufacturing
equipment. The content of the Recipe element is not interpreted.
5.7.2 Metadata — In addition to the metadata available from the E36Item tag, the Recipe element supports the
following additional metadata, all in the e36base namespace:
5.7.2.1 RecipeType
5.7.2.1.1 Process — Use this value if the recipe is for the processing of wafers on the specific semiconductor
manufacturing equipment.
5.7.2.1.2 Test — Use this value if the recipe is for testing to validate an adjustment or functional operation of a
component or semiconductor manufacturing equipment.
5.7.2.1.3 Qualification — Use this value if the recipe is for the qualification of equipment parameters within the
specified range limits on the specified semiconductor manufacturing equipment.
5.8 Element Name — Procedure
5.8.1 Element Description — The Procedure element describes a sequence of equipment related operations,
typically performed by operations or service personnel. The content of a Procedure element is interpreted as
information describing the sequence of operations or instructions represented by the procedure.
5.8.2 Metadata — In addition to the metadata available from the E36Item tag, the Procedure element supports the
following additional metadata, all in the e36base namespace:
5.8.2.1 ProcedureType
5.8.2.1.1 Maintenance — To include procedures but not limited to calibrations, qualifications, retrofits, cleaning,
repair, preventive, corrective, diagnostic, troubleshooting, and software around semiconductor manufacturing
equipment.
5.8.2.1.2 Installation — To include procedures but not limited to, setup, startup, and install around semiconductor
manufacturing equipment.
5.8.2.1.3 Operation — To include procedures around the operation of semiconductor manufacturing equipment.
5.8.2.1.4 ToolRemoval — To include procedures but not limited to, shipping, decontamination, and de-install
around semiconductor manufacturing equipment.
5.8.2.1.5 Safety — To include procedures concerning safety during the handling, assembly, installation, use, and
removal of semiconductor manufacturing equipment.
5.8.2.1.6 Usage — To include procedures of usage of a non-technical nature.
5.8.2.2 ScheduleType — For periodic procedures, describes the frequency pattern exhibited by the procedure. On
specific semiconductor manufacturing equipment, one of:
5.8.2.2.1 Wafer Based.
5.8.2.2.2 CalendarTimeBased.
5.8.2.2.3 ProcessTimeBased.
5.8.2.3 ScheduleUnits — For periodic procedures, describes the nominal frequency for performing the procedure.
5.8.2.3.1 When scheduleType is Wafer Based, this is the number of wafers.
5.8.2.3.2 When scheduleType is CalendarTimeBased, this is the number of elapsed days.
5.8.2.3.3 When scheduleType is ProcessTimeBased, this is the number of elapsed process hours based on the
specific semiconductor manufacturing equipment.