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SEMI S17-0701 © SEMI 2001 2 4 Referenced Stand ards NOTE 2: Unless otherwise indicated, all docu ments cited shall be t he latest p ublished v ersions. 4.1 SEM I Standar ds SEMI E15.1 — Specif ication for 300 mm Tool Loa…

SEMI S17-0701 © SEMI 20011

SEMI S17-0701

SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV)

SYSTEMS

This safety guideline was technically approved by the Global Environmental Health and Safety Committee

and is the direct responsibility of the Japanese Environmental Health and Safety Committee. Current edition

approved by the Japanese Regional Standards Committee on February 1, 2001. Initially available at

www.semi.org April 2001; to be published July 2001.

NOTICE: Paragraphs entitled “NOTE:” are not an

official part of this document and are not intended to

modify or supersede the official guideline.

1 Purpose

1.1 These guidelines are intended as a set of

environmental, safety, and health considerations for

unmanned transport vehicle (UTV) systems. UTV

systems are used to automate the movement of material

within semiconductor factories. Unmanned transport

vehicle systems include both floor-traveling vehicle

systems and space-traveling vehicle systems.

2 Scope

2.1 This guideline applies to UTV systems used in

semiconductor manufacturing.

2.2 This guideline addresses both floor-traveling and

space-traveling UTV systems. Floor-traveling vehicle

systems include automatic guided vehicle (AGV)

systems and rail guided vehicle (RGV) systems. Space-

traveling vehicle systems include interbay overhead

transport vehicle systems and intrabay overhead hoist

transport vehicle (OHT) systems.

2.3 Evaluations for conformance to this document

should include all equipment that is provided by the

UTV system supplier including separate items such as

rails, control panels, power panels, and any other type

of equipment necessary for operation of the unmanned

transport vehicles.

2.4 This safety guideline does not purport to address

all of the safety issues associated with its use. It is the

responsibility of the users of this guideline to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

2.5 This document contains the following sections:

• Purpose

• Scope

• Limitations

• Referenced Standards

• Terminology

• Equipment Evaluation

• Clearances and Interfaces

• Emergency Shutdown

• Manual Operation

• Vehicle Travel

• Material Protection

• Load/Unload Operation

• Hazard Indicators

• Hazardous Materials

• Related Documents

3 Limitations

3.1 This safety guideline may have only limited

application to vehicles without on-board power (direct

or induced) such as primary-grounded linear–motor-

driven overhead transport vehicle systems used for

interbay transport. Determinations of applicability

should be made by section when evaluating such

systems.

3.2 This safety guideline does not address rail-guided

or robotic mechanisms included as part of

semiconductor processing equipment. This type of

equipment should be evaluated as part of the processing

equipment per SEMI S2.

3.3 Person Guided Vehicles (PGVs) are not unmanned

vehicles, therefore PGVs are not addressed by this

standard.

3.4 This document does not supersede international,

national or local codes, regulations and laws, which

may impose separate requirements for assessing the

safety of installations.

NOTE 1: Users should provide information to UTV suppliers

about regulations for the location of use.

SEMI S17-0701 © SEMI 2001 2

4 Referenced Standards

NOTE 2: Unless otherwise indicated, all documents cited

shall be the latest published versions.

4.1 SEMI Standards

SEMI E15.1 — Specification for 300 mm Tool Load

Port

SEMI E23 — Specification for Cassette Transfer

Parallel I/O Interface

SEMI E84 — Specification for Enhanced Carrier

Handoff Parallel I/O Interface

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

4.2 ANSI Standard

ANSI/RIA R15.06 — Industrial Robots and Robot

Systems - Safety Requirements

4.3 CENELEC Standards

EN775 — Manipulating Industrial Robots – Safety

4.4 ISO Standards

ISO 10218 — Manipulating Industrial Robots – Safety

5 Terminology

5.1 automated operation — system operation under

full pre-programmed control of the computer controller.

5.2 automatic guided vehicle (AGV) — a floor based

vehicle, with or without robotic manipulators, used for

transporting loads and operating without the need for

assistance by factory personnel. AGVs travel without

mechanical guidance.

5.3 bumper — a shock absorber for a UTV. A

bumper is typically equipped with a contact switch or

sensor on it. And if the bumper switch or sensor is

activated, the UTV will stop immediately.

5.4 EMO — an actuator (e.g., button) which, when

activated, places the equipment into a safe shutdown

condition, without generating any additional hazard to

personnel or the facility.

5.5 E-Stop — emergency stop feature provided to stop

all moving parts but not necessarily isolating or

controlling all energy sources.

1 American National Standards Institute, 11 West 42nd St., 13th

Floor, New York, NY 10036

2 International Organization for Standardization (ISO), 1 rue de

Varembe, Case postale 56, CH-1211 Geneve 20, Switzerland

5.6 end user customer — as related to UTVs, the

company operating the factory in which the UTVs are

installed.

5.7 fault-tolerant — designed so that a reasonably

foreseeable single point failure does not result in an

unsafe condition.

5.8 floor-traveling vehicle — a vehicle that

automatically travels on the factory floor to a specified

station where a load/unload operation is performed

automatically or manually. Floor-traveling vehicles

include automatic guided vehicles (AGV) and rail

guided vehicles (RGV).

5.9 hoist — the assembly on a space-traveling vehicle

that performs the load/unload operation by transferring

a load [e.g., carrier(s), pod(s)] to and from an overhead

vehicle.

5.10 interbay transport — moveme nt of loads [e.g.,

carrier(s), cassette(s), reticle(s)] between functional

work areas or bays.

5.11 intrabay transport — movement of loads [e.g.,

carrier(s), cassette(s), reticle pod(s)] within a functional

work area or bay.

5.12 load — load is the object to be transported by

UTV. Load includes a carrier (cassette, box, pod, etc.)

and its contents.

5.13 load/unload operation — the action necessary to

move a load [e.g., carrier(s), cassette(s) reticle pod(s)]

to and from a vehicle. This operation may involve

hoisting, manual, or robotic manipulation to transfer

loads between a vehicle and semiconductor

manufacturing equipment (such as process equipment

or stockers). See Figure 1.

5.14 manual operation — defined as any control

outside of automated operation.

5.15 overhead hoist transport (OHT) — a rail guided

vehicle and hoist used to transport material above the

factory floor over the heads of factory personnel.

5.16 rail guided vehicle (RGV) — a floor-based

vehicle, with or without robotic manipulators, used to

transport loads and operating on a guide rail without the

need for assistance by factory personnel.

5.17 space-traveling vehicle — a vehicle that

automatically travels through space, such as in the

region just below a factory ceiling, to a specified station

where a load/unload operation is performed

automatically or manually. Space-traveling vehicles

include interbay overhead transport vehicles and

intrabay overhead hoist transport vehicles (OHT).

SEMI S17-0701 © SEMI 20013

5.18 station — the destination point where an

unmanned transport vehicle is programmed to stop for

load/unload operation (also known as a control point).

5.19 travel — the automated motion of a vehicle along

a rail or programmed path from one station to another

station. Travel does not include load/unload operation.

See Figure 1.

5.20 unmanned transport vehicle (UTV) — a vehicle

used to automate the movement of production material

within semiconductor factories. There are two types of

UTVs, floor-traveling vehicles and space-traveling

vehicles.

Travel

Station to Station

Load/Unload

Overhead or Floor Vehicle

Figure 1

Delineation of Travel vs. Load/Unload

6 Equipment Evaluation

6.1 Equipment Evaluation for both Floor-Traveling

and Space-Traveling Vehicles — All UTV equipment

should be evaluated against the following referenced

provisions.

6.2 All UTV equipment should be evaluated against

appropriate sections of SEMI S2 for environmental,

safety, and health considerations.

6.2.1 Evaluations to the provisions in the following

sections of SEMI S2 are applicable to declare

conformance to this document.

a) Electrical Design

b) Emergency Shutdown

c) Automated material handlers (This Automated

material handlers section only applies to the

robotics portion of UTV equipment, when

provided.)

d) Hazard Warning Labels

e) Seismic Protection

f) Documents provided to User

6.2.2 At the discretion of the evaluator, additional

provisions in SEMI S2 may be considered for

evaluation based on the functionality of the UTV

equipment.

6.3 All UTV equipment should be evaluated against

SEMI S8 for ergonomic considerations.

6.4 All UTV equipment should be evaluated against

the applicable Electro Magnetic Compatibility (EMC)

regulations of the proposed installation site.

6.5 In addition to the provisions referenced in Section

6.1, UTV equipment should also be evaluated to the

provisions contained in the following sections of this

document.

7 Clearances and Interfaces

7.1 Body Shape of both Floor-Traveling and Space-

Traveling Vehicles — The body of a UTV should be

free of any dangerous parts such as sharp edges and

protrusions. The UTV body surface should have a

smooth finish.

7.2 Minimum Clearance for Floor-Traveling Vehicles

— Where passageways are used for emergency egress,

they should be provided on at least one side of the

UTV. International, national or local codes,

regulations, and laws should be used to determine

passageway width.

7.3 Minimum Clearance for Space-Traveling Vehicles

— The lowest part of the space-traveling vehicle,

including the load, should maintain a minimum

clearance of 2135 mm (7 feet) above the walking floor.

NOTE 3: Some end user customers may request a higher

minimum clearance, or a minimum clearance between the

space-traveling vehicle and the top of other equipment, to

accommodate clearances specified by SEMI E15.1.

7.4 Interfaces with Building Structures for both Floor-

Traveling and Space-Traveling Vehicles



UTV

suppliers should provide for optional vehicle interfaces

with building structures like doors, elevators, and walls.

7.4.1 If UTVs are required to operate in conjunction

with building structures, such as automatic doors or

elevators, UTVs should be capable of communicating

with the facility to assure safe door opening/closing.

7.4.2 If it is necessary for a UTV to travel through a

building firewall, the firewall pass through should be

specified and/or designed to maintain the fire rating of

the wall in the event of a fire.