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SEMI E111-0305 © SEMI 2001, 2005 7    d63 = 35 + 0.9 / -0.1 Figure 5 Detail B: Top Robotic Handling Flange Hole Feature  1.5  Figure 6 Detail C: Reticle Seating and Capture Detail

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SEMI E111-0305 © SEMI 2001, 2005 6
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Figure 2
Detail A: External Top View of Side Handling Flange Alignment Notch
RFID PLACEMENT ZONE
Figure 3
External Rear View of RSP150
Figure 4
Internal Front View of RSP150
SEMI E111-0305 © SEMI 2001, 2005 7
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
1.5
Figure 6
Detail C: Reticle Seating and Capture Detail
SEMI E111-0305 © SEMI 2001, 2005 8
Figure 7
Section A-A: Door Only Top View of RSP150
Figure 8
Section C-C: Door Only Side View of RSP150