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SEMI E102-0600 © SEMI 2000 52 Factory Operations Durable Management MTSC AMHS E quipment Controll ers 30: DurableLocationChangedE vent 31: makeManualControl() 32: MaterialLocationS tateChangedEvent 35: informJobStateChan…

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SEMI E102-0600 © SEMI 200051
R1-2.11 Scenario Eleven — Manual Interruption of Delivery
2: requestJob(JobType TransportJob, Priority 1, Deadline time1, Container aaa, destination stk4)
6: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
8: MaterialContainerStateChangedEvent
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route (Internal Service)
10: Transfer Command to stk6 (carrier aaa, src shelf, dest Bay_Out) (Stocker SEM)
11: Transfer Command Updates (Stocker SEM)
12: Transfer Command Complete (Stocker SEM)
13: Transfer Command to Ohs2 (carrier aaa, source stk6/Bay_Out, destination stk4/Bay_In) (IBSEM)
15: setMaterialTrackingLocation( MaterialTrackingLocation ohs2)
14: Transfer Command Updates (IBSEM)
16: DurableLocationChangedEvent
3: returns Job Handle TrJob1
19: Event Report Send TransferPaused (IBSEM)
21: EventReportSend AlarmSet (IBSEM)
23: Event Report Send TransferCompleted, ResultCode=Error, TransferInfo lists carrier as missing (IBSEM)
Human Intervention required to clear error.
Human intervention to remove carrier from
vehicle. Results in Transport System Error
17: Alarm Report Send AlarmSet (IBSEM)
25: Alarm Report Send Alarm Cleared (IBSEM)
27: Event Report Send AlarmCleared (IBSEM)
18: Acknowledge (IBSEM)
20: Acknowledge (IBSEM)
22: Acknowledge (IBSEM)
24: Acknowledge (IBSEM)
26: Acknowledge (IBSEM)
28: Acknowledge (IBSEM)
29: setMaterialTrackingLocation(MaterialTrackingLocation NULL)
1: setUnit(unitvalue)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-22
Scenario Case 11
SEMI E102-0600 © SEMI 2000 52
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
30: DurableLocationChangedEvent
31: makeManualControl()
32: MaterialLocationStateChangedEvent
35: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobAborted)
33: JobStateChangedEvent(..previousState JobExecuting, newState JobAborting)
36: removeFinishedJob()
37: JobStateChangedEvent(..previousState JobAborted, newState JobUndefined)
Material Transport Manager
aborts the Job.
34: JobStateChangedEvent(..previousState JobAborting, newState JobAborted)
Figure R1-23
Scenario Case 11 (continued)
SEMI E102-0600 © SEMI 200053
R1-2.12 Scenario 12 — Tool to Tool Delivery
MTSC AMHS Equipment
Controllers
Durable
Management
Factory
Operations
MTSC reserves and manages AMHS Equipment Capactiy(internal)
MTSC determines AMHS route(internal)
10: Transfer Command to Agt1(carrier bbb, src. eq.3 Port 1, dest. Stk. 8/Bay_In)(IBSEM)
11: Transfer Command Updates from Agt2 (IBSEM)
14: Transfer Command Complete (IBSEM)
17: Transfer Command to Stk. 2 (carrier bbb, src. Stk. 8/Bay_In, dest. Stk.8 Bay_Out)(StockerSEM)
18: Transfer Command Updates from Stk. 8 (Stocker SEM)
19: Transfer Command Complete (StockerSEM)
20: Transfer Command to Ohs2(carrier bbb, src. Stk. 8/Bay_Out, dest. Stk. 9/Bay_In)(IBSEM)
21: Transfer Command Updates from Ohs2 (IBSEM)
24: Transfer Command Complete (IBSEM)
27: Transfer Command to Stk.4 (carrier bbb, src Stk.9/Bay_In, dest. Stk. 9/Bay_Out) (StockerSEM)
28: Transfer Command Updates from Stk. 9 (StockerSEM)
7: makeInTransit()
12: setMaterialTrackingLocation( MaterialTrackingLocation Agt2)
15: setMaterialTrackingLocation( MaterialTrackingLocation Stk.8)
22: setMaterialTrackingLocation( MaterialTrackingLocation Ohs2)
25: setMaterialTrackingLocation(MaterialTrackingLocation Stk.9)
2: requestJob(Jobtype Transport, Priority 1, Deadline time1, container bbb, SourceMachine eq. 3, SourcePort 1, DestinationMachine eq. 5, Destination Port 1)
3: Return Job Handle TrJob1
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
13: DurableLocationChangedEvent
16: DurableLocationChangedEvent
23: DurableLocationChangedEvent
26: DurableLocationChangedEvent
8: MaterialLocationStateChangedEvent
MTSC determines relay
priorty(internal)
1: setUnit(unitbvalue)
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
9: getUnit()
Figure R1-24
Scenario Case 12