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SEMI T15-0705 © SEMI 2005 1 SEMI T15-0705 GENERAL SPECIFICATION OF JIG ID: CONCEPT This standard was technically approved by the global Traceability Committee . This edition was approved for publication by the global Aud…

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SEMI T14.1-0705 © SEMI 2005 8
RELATED INFORMATION 2
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI T14.1 and was derived from full letter ballot
procedures on May 20, 2005.
R1-2 References
R1-2.1 The following papers may be referred to understand Micro ID technology presented in this document.
Improvement in Reading Precision of Micro-ID Engraved on Wafer, ISSM2003, 2003/09/30
Micro-ID Technology for Single Wafer Management, ISSM2002, 2002/10/17
New Identification System for Individual Wafer Management, ISSM2000; Session II-6 (2000) Page33,
2000/9/26
R1-3 R2-2 SEMI Activities
R1-3.1 Additional information is gathered at the second round robin of the Micro ID Task Force.
R1-3.2 Many of such information turned out to be excellent and valuable in reading the Micro ID.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. Komatsu Ltd. and Toshiba Corp. have filed a statement with
SEMI asserting that licenses will be made available to applicants throughout the world for the purpose of
implementing this standard without unfair discrimination. Attention is also drawn to the possibility that some
elements of this standard may be subject to patented technology or copyrighted items other than those identified
above. Semiconductor Equipment and Materials International (SEMI) shall not be held responsible for identifying
any or all such patented technology or copyrighted items. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI T15-0705 © SEMI 2005 1
SEMI T15-0705
GENERAL SPECIFICATION OF JIG ID: CONCEPT
This standard was technically approved by the global Traceability Committee. This edition was approved for
publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was available at
www.semi.org in June 2005 and on CD-ROM in July 2005.
1 Purpose
1.1 The purpose of this standard is to establish generic Jig ID to identify individual jigs uniquely, mounted on the
jig to process semiconductor devices.
2 Scope
2.1 This Standard specify the following contents of IDs to be installed onto the jigs used in the process of
semiconductor manufacturing.
Types of IDs
Data format
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitation
3.1 This Standard does not restrict the communication protocol for communicating data of Jig ID.
3.2 This Standard does not provide the shape of tags in which the information of Jig ID is written.
3.3 This Standard does not specify the physical interfaces, such as the installation positions of Jig ID and reader or
reader/writer.
4 Referenced Standards and Documents
4.1 SEMI Standard
SEMI T12 — Specification of Tracing Jigs and Implements
4.2 Other Standard
ISO/IEC ISS 16022 — Information Technology - International Symbology Specification - Data Matrix
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Definition
5.1.1 Jig — a kind of attachment used to support measurement or production for material on one or more
equipment, as defined in SEMI T12.
5.1.2 Jig ID — an identifier installed onto a Jig, which is recognized to identify the individual piece.
5.2 Abbreviations and Acronyms
5.2.1 RFID — Radio Frequency Identification
6 Types of IDs
6.1 This Standard describes identification mechanism to allow automatic reading or writing as shown below.
Barcodes
SEMI T15-0705 © SEMI 2005 2
2D Codes — Data Matrix (ECC200)
RFIDs
7 Data Format
7.1 Both of the following ID part and DATA part shall be contained in the JIG ID Tag. They shall exist on the same
tag.
7.1.1 ID part — The ID part within the JIG ID is a part describing consolidated identification data to identify the
jigs. The requirements of the ID part are specified as following.
7.1.1.1 The ID part exists on any JIG IDs.
7.1.1.2 Number of digits – The number of digits contained in the ID part shall be fixed to 16 digits.
7.1.1.3 Attribute — Information on the ID part shall be represented in Visible ASCII Characters (20
16
-7E
16
).
7.1.1.4 Information alteration – No alternation to information on the ID part shall be allowed.
7.1.1.5 Format — Information on the ID part consists of Supplier Code, year and month of manufacturing and a
serial number.
7.1.1.5.1 Supplier Codes
1
— A series of Visible ASCII Characters (20
16
-7E
16
) to identify supplier with 3-character.
NOTE 1: List of Suppliers Codes is to be provided by the separated Auxiliary Document.
7.1.1.5.2 Year and month of manufacturing — The year and month of manufacturing shall be expressed in a four-
digit number as shown below.
YYMM
7.1.1.5.2.1 YY shall be the last two digits of the year. MM shall be two digits month of year. For example, January
shall be designated as 01 and October shall be designated as 10.
7.1.1.5.3 Serial Number — The serial numbers shall be expressed in nine-digit of alpha-numerical codes. Space
codes or Null codes shall not be allowed. Duplicated serial numbers shall not be used if ‘year and month of
manufacturing’ is equivalent.
7.1.2 DATA Part
7.1.2.1 The DATA part is the optional information for the JIG ID. The DATA part contained in JIG ID shall be
used for such supplemental information as notes of the requirements, conditions and history of the JIG. The
specification of the DATA part is as below.
7.1.2.2 Number of Digits — Although the number of digits of the DATA part is not stipulated in particular, the
number shall be the minimum necessary to achieve the purpose abovementioned. The following example may help
understanding: Even though there is a case where approximately. 256 byte letters are used for the primary memory
to describe the number of shots and the history of errors, the limitation on the number of digits for the DATA part
depends on the amount of memory held by the RFID tag.
7.1.2.3 Attribute — Information on the DATA part shall be represented in Visible ASCII Characters (20
16
-7E
16
).
7.1.2.4 Information Alteration — No considerations are given to whether or not information on the DATA part is
available for alteration. This information is available to read only, record, or read and write data.
ID part DATA part
Figure 1
Data format of JIG ID