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SEMI E116.1-1104 © SEMI 2003, 2004 1 SEMI E116.1-1104 SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPM ENT PERFORMANCE TRACKING (EPT) This specification was technically approved by the Globa l Information & Control Comm…
SEMI E116-0705 © SEMI 2002, 2005 26
27 Unloading Started 202:25 BUSY
28 Unloading Complete 202:55 IDLE
29 Carrier Handling Module and all
components returning in “IDLE”
202:55
R1-8 Tracking Performance for Whole Carrier Handling Module
R1-8.1 Even composition and property of equipment are dependent on equipment type, operation and usage
depends on equipment user. Because actual usage deeply affects the whole performance of the Carrier Handling
Module and/or Equipment, the user is responsible for reconstructing the performance from performance tracking
events for each component.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E116.1-1104 © SEMI 2003, 2004 1
SEMI E116.1-1104
SPECIFICATION FOR SECS-II PROTOCOL FOR EQUIPMENT
PERFORMANCE TRACKING (EPT)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published March 2003.
NOTICE: This document was rewritten in its entirety in 2004.
1 Purpose
1.1 This document maps the services and data of the Equipment Performance Tracking Standard (EPT) to SECS-II
streams, functions, and data definitions.
2 Scope
2.1 This document applies to all implementations of EPT that use the SECS-II message protocol (SEMI E5).
Compliance to this standard requires compliance to both SEMI E116 and SEMI E5.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — SECS-II Protocol for Object Services Standard (OSS)
SEMI E116 — Provisional Specification for Equipment Performance Tracking (EPT)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 SECS-II Attribute Definitions
4.1 Table 1 provides the SECS-II structure definitions for the E116 EPTTracker Object. This must be compliant
with the E39 (OSS) protocol. The host does not have the ability to create or destroy these objects. However, the host
must be able to access all attributes via the default E39 GetAttr services (for all attributes) and SetAtt services (for
RW attributes).
4.2 A subset of these object attributes are enumerated via SECS-II Data Variables that may be provided via event-
reports. See the section on Variable Data Item Mapping in this document.
SEMI E116.1-1104 © SEMI 2003, 2004 2
Table 1 EPTTracker Object SECS-II Attributes Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 20 (A[10]) must always be set to “EPTTracker”
“ObjID” 20 (A[1..80]) <OBJECTIDENTIFIER>
ObjID is equipment defined. Examples are “EQUIPMENT”, “CHAMBER A”, “ROBOT
ARM”.
Conforms to the restrictions of ObjID as specified in SEMI E39.1
“BlockedReason” 51 (U1) BlockedReason
where the values are enumerated as:
0 = Not Blocked
1 = Unknown
2 = Safety Threshold
3 = Error Condition
4 = Parametric Exception
5 = Aborting, Aborted
6 = Pausing, Paused
7 = Reserved
8 = Reserved
9 = Reserved
“BlockedReasonText” 20 (A) BlockedReasonText
Usage is equipment defined. Examples: “Abort – Host-requested Abort”, “Fault – Reticle
Stage Error”; “Pause – Host-requested Pause”
“EPTElementType” 51 (U1) EPTElementType
where the values are enumerated as:
0 = Equipment
1 = Production EPT Module
2 = EFEM/Load Port EPT Module
“EPTState” 51 (U1) EPTState
where the values are enumerated as:
0 = Idle
1 = Busy
2 = Blocked
“EPTStateTime” 54 (U4) EPTStateTime
“EPTElementName” 20 (A) EPTElementName
Usage is equipment defined. Examples “EQUIPMENT”, “CHAMBER A”, “ROBOT ARM”.
“PreviousEPTState” 51 (U1) PreviousEPTState
where the values are enumerated as:
0 = Idle
1 = Busy
2 = Blocked
3 = No State
“PreviousTaskName” 20 (A[0..80]) PreviousTaskName
Usage is equipment defined. Examples: “Loading”, “Etching”, “Pumping Down”