semi合集-English.pdf - 第7147页
SEMI S22-1103a © SEMI 2003, 2005 32 21.7 Method for Identifying Rep lacement Parts — A method of i dentifying parts th at are anticipated to be re placed by the user should be includ ed in the instructions provided with …
SEMI S22-1103a © SEMI 2003, 2005 31
d) number of phases,
e) number of wires,
f) frequency,
g) full-load current,
h) ampere rating of the largest motor or load,
i) short-circuit interrupting rating of the equipment main overcurrent protective device,
j) ampere rating of the overcurrent protective device where furnished as part of the equipment, and
k) the electrical diagram number(s) or the number of the index to the electrical diagrams (bill of material).
20.5 Where more than one incoming supply circuit is to be provided, the nameplate should state the above
information for each supply circuit.
EXCEPTION: Where the only load is a single motor or motor controller, the motor nameplate is permitted to serve
as the electrical equipment nameplate when it is plainly visible.
20.6 Full Load Current — The full-load current shown on the nameplate should not be less than the full-load
currents for all motors and other equipment that may be in operation at the same time under normal conditions of
use. Where unusual loads or duty cycles require oversized conductors, the necessary capacity should be included in
the full-load current specified on the nameplate.
20.7 Overcurrent Marking — Where overcurrent protection is provided in accordance with ¶9.1.5, the equipment
should be marked “overcurrent protection provided at machine supply terminals.” A separate nameplate may be
used for this purpose.
20.8 Reference Designations All enclosures, assemblies, control devices, and components should be plainly
identified with the same reference designation as shown in the technical documentation or identified through
equivalent means.
21 Technical Documentation
21.1 Installation Diagram The installation instructions should give all the information necessary for complete
installation and safe start up of the system. This should include:
a) a comprehensive description of the equipment, installation and mounting, and the connection to the electrical
supply or supplies, and
b) an explanation of the equipment’s installation instructions including facilities supply conductors.
21.2 Block (system) Diagrams and Functional Diagrams When it is necessary to facilitate the understanding of
the principles of operation, a block (system) diagram should be provided. A block (system) diagram symbolically
represents the electrical equipment together with its functional interrelationships without necessarily showing all of
the interconnections.
21.3 Circuit Diagrams Circuit diagrams or schematics for power distribution, EMO and interlock circuits should
be provided. Where a block (system) diagram does not sufficiently detail the elements of the electrical equipment
for safe installation and servicing, circuit schematics should be furnished.
21.4 Operating Instructions The end user documentation should include operating instructions detailing proper
procedures for operation of the equipment. Particular attention should be given to the safety measures provided and
to the improper methods of operation that are anticipated.
21.5 Maintenance Instructions The technical documentation should contain maintenance instructions detailing
procedures for servicing and maintaining the equipment. Attention should be given to how these procedures may be
performed safely. A preventative maintenance schedule should be provided with the equipment.
21.6 Functional Description of Interlocks — A functional description of interlocks should be provided which
provides sufficient detail to explain their operation.
SEMI S22-1103a © SEMI 2003, 2005 32
21.7 Method for Identifying Replacement Parts — A method of identifying parts that are anticipated to be replaced
by the user should be included in the instructions provided with the equipment.
21.8 Translations — Where required by law, the information should be provided in the primary language of the
location in which the equipment is to be used. However, the language in which the information was created should
be identified.
21.9 Applicable to All Documentation The document reference designation system should be in accordance with
IEC 61346-1; or a reference key should be provided.
NOTE 54: Additional criteria pertaining to installation, operation, and maintenance instructions are provided in SEMI S2 and
SEMI S13.
22 Testing
22.1 General The tests outlined in this document are to be performed by trained and qualified personnel who
have knowledge of the techniques and the test apparatuses described herein.
22.1.1 All test equipment should be calibrated and traceable to a calibration standards organization (e.g., National
Institute of Standards and Technology (NIST) in the United States or the National Metrology Institute in Japan).
22.1.2 The calibration interval for test equipment should be appropriate to the test equipment; usually this should
not exceed one year.
22.1.3 Except where noted otherwise, the equipment should be tested under the least favorable conditions within the
manufacturer's operating specifications. These conditions include:
a) supply potential,
b) supply frequency,
c) position of movable parts,
d) operating mode (e.g., full temperature conditions, motors in operation), and
e) adjustment of thermostats, regulating devices, or similar controls in operator-accessible areas.
NOTE 55: Least favorable conditions are those conditions in the manufacturer’s operating specifications under which the
equipment is least likely to pass the test.
22.1.4 To determine the least favorable supply potential for a test, consider:
a) multiple-nominal rated potentials (e.g., 120/240 V), and
b) extremes of nominal rated potential ranges (e.g., 208-240 V).
NOTE 56: Consideration of the tolerance on a nominal rated potential (e.g., 120 5 percent) is not necessary.
NOTE 57: Some standards (e.g., IEC 61010-1 and IEC 60950) may specify 90 percent and 110 percent of any rated supply
voltage.
22.1.5 To determine the least favorable supply frequency for a test, consider the nominal frequencies as specified
(e.g., 50 Hz, 60 Hz., or 50/60 Hz).
NOTE 58: Consideration of the tolerance on a nominal rated frequency (e.g., 50 ± 0.5 Hz) is not usually necessary.
22.1.6 As an alternative to carrying out tests on the complete equipment, tests may be conducted on circuits,
components and sub-assemblies independent of the equipment, provided that the results of the tests would be
representative of those performed as part of the assembled equipment.
EXCEPTION: The leakage current and earthing (grounding) continuity tests identified in ¶22.2 and ¶22.3 should be
completed only on fully assembled equipment.
22.2 Leakage Current Test for Cord-and-Plug Equipment
22.2.1 Test Equipment A 1500 ohm resistor shunted by a 0.15µF capacitor (impedance network) and a true RMS
voltmeter with an accuracy of 1.0 percent. The impedance network may be a separate assembly or incorporated
within a leakage current measuring instrument.
SEMI S22-1103a © SEMI 2003, 2005 33
22.2.2 Procedure For equipment connected to the facility branch circuit with a cord-and-plug (plug/socket
combination), ensure that the equipment is isolated (e.g., by placing the equipment on a wooden or other non-
conductive surface). Connect the equipment to its rated source of supply with the protective earthing conductor
disconnected and operate it at the least favorable conditions specified by the manufacturer. Connect the impedance
network between each accessible metal part and the protective earthing conductor. In determining accessibility of
energized parts, remove all doors, panels, etc. that are to be removed by the operator during normal operation. Using
a true RMS voltmeter, measure the voltage drop across the impedance network. Calculate the leakage current using
the formula:
I
leakage
Vo
l
tage
measured
1500 ohms
22.2.3 Acceptable Results The maximum calculated leakage current does not exceed 3.5 mA.
NOTE 59: This test is to be conducted only on cord and plug connected equipment.
22.3 Earthing Continuity and Continuity of the Protective Bonding Circuit Test
22.3.1 Test Equipment Low range ohmmeter with a range to measure 0.10 ohm with an accuracy of 1.0 percent.
The alternate test demands a low voltage current source capable of 10 Amps, a current meter to measure 10 amps
with an accuracy of 1 percent, and a voltage meter with a range to measure 0.01 Volts and an accuracy of 1 percent.
22.3.2 Procedure
Complete the test using one of the following procedures:
22.3.2.1 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect
the protective earthing conductor from the protective earthing conductor terminal. Measure the resistance between
the protective earthing terminal and each accessible metal part (handle, monitor, doors, etc.) on the equipment using
a low-range ohm-meter. Upon test completion, reconnect the protective earthing conductor to the protective
earthing conductor terminal.
22.3.2.2 Disconnect the equipment from the supply. For equipment installed with fixed wiring methods, disconnect
the protective earthing conductor from the protective earthing conductor terminal. Connect the low voltage current
source between the protective earthing conductor terminal and each accessible metal part (handle, monitor, doors,
etc.) on the equipment frame or cover. With a current of 10 amps injected, measure the voltage drop between the
equipment connection point and the protective earthing conductor terminal. Calculate the resistance by dividing the
measured voltage by the injected current. Upon test completion, reconnect the protective earthing conductor to the
protective earthing conductor terminal.
EXCEPTION: Earthing Continuity Test does not need to be conducted where accessible metal surfaces are not
likely to become energized in a single fault condition.
NOTE 60: Some standards (e.g., IEC 60204-1, IEC 61010-1) may specify this test to be performed using a current injection
method using more than 10 Amps.
22.3.3 Acceptable Results The resistance between the protective earthing conductor terminal and each accessible
part should not exceed 0.1 ohm.
22.4 Starting Current Test
22.4.1 Test Equipment None
22.4.2 Procedure — Start the equipment in accordance with manufacturer's instructions three times from a
completely stopped condition. Ensure that the time interval between successive starts is sufficient to allow the
equipment to return to ambient conditions.
22.4.3 Acceptable Results None of the equipment's overcurrent protective devices should trip during this test.
NOTE 61: It is recommended that the peak inrush starting current be measured using an appropriate current measuring device
and recorded in the test report.
22.5 Input Test
22.5.1 Test Equipment True RMS current measuring equipment, with accuracy of 3.0 percent.