semi合集-English.pdf - 第5988页

SEMI P42-0304 © SEMI 2004 21 < X > 1 0 0 0 0 < / X > < Y > 8 6 3 0 < / Y > < / Y - M a r k > <UnitType>um</UnitType> </WaferMarkP osition> <Comment>C T-POSITYPE</C…

SEMI P42-0304 © SEMI 2004 20

<X-Mark>

<X>6150</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>-6080</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G7</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-8810</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-7660</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G8</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-8630</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>8810</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G9</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>7730</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

SEMI P42-0304 © SEMI 2004 21

<X>10000</X>

<Y>8630</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G10</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>7550</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>-7480</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<MarkUseRule>

<FileName>TEST-MARK</FileName>

</MarkUseRule>

</AlignmentMarkDesign>

<AlignmentUSEMark>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-1</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N11</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>385</Y>

</X-Mark>

<Y-Mark>

<X>-5750</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-2</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N40F</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>315</Y>

</X-Mark>

<Y-Mark>

SEMI P42-0304 © SEMI 2004 22

<X>-5450</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-3</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-7050</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-5980</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-4</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-6950</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>7050</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-5</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>6050</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>6950</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>