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SEMI S2-0703a E © SEMI 1991, 2004 43 APPENDIX 5 NON-IONIZING RADIATION (OTHER THAN LASER) AND FIELDS TEST VALIDATION — Design and Test Method Supplement Intended for Internal and Third Party Evaluation Use, But Not for F…

SEMI S2-0703a

APPENDIX 4

IONIZING RADIATION TEST VALIDATION — Design and Test Method

Supplement Intended for Internal and Third Party Evaluation Use

NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot

procedures on December 15, 1999 by the North American Regional Standards Committee.

A4-1 Introduction

A4-1.1 This appendix provides specific technical information relating to Section 24. In general, it provides

information on hazard evaluation methods, examples of control strategies, and test validation criteria.

A4-1.2 This appendix is not intended to limit hazard evaluation methods or control strategies (e.g. design

principles) employed by the manufacturers. Alternative methods are acceptable if they provide an equivalent level of

hazard control.

A4-1.3 Test validation criteria are generally referenced from the applicable internationally recognized standard. It is

the users responsibility to ensure that the most current revision of the standard (or its national equivalent) is used.

Table A4-1 Ionizing Radiation

Ionizing

Radiation Type

Emission Limit

microsievert/hr

(millirem/hr)

Test Method

X or Gamma Operator

2 Sv/hr

(0.2 mrem/hr)

Direct doserate measurement with an Ion Chamber (or equivalent) calibrated

to ± 10% of true doserate at the surface of the equipment (or at the closest

approach) in all areas where the operator may have access with the ionizing

radiation source active.

X or Gamma Maintenance and Service

10 Sv/hr

(1 mrem/hr)

Direct doserate measurement with an Ion Chamber (or equivalent) calibrated

to ± 10% of true doserate during simulated maintenance and service

procedures. Measurements should be made at the surface emitting the

ionizing radiation or the closest approach to the emitting surface with the

ionizing radiation source active.

NOTE: For these measurements, panels and/or shields should be removed

only if removal is required for maintenance or service activities.

A4-2 Basic Radiation Control Methods

Time — If the radiation field exists and it must be entered, then minimize the time spent in the field to minimize the

exposure to the individual. This gives a linear dose reduction.

Distance — If the radiation field is present, stay as far away form the source as possible to perform the required

tasks. Dose is reduced by the square of the distance from the source.

Shielding — If the radiation field is intense and the source is small, shielding the source is generally the most

practical.

Quantity — If there exists an opportunity to minimize the amount of radiation or radioactive material that is required

for the task, then the exposure can be minimized also.

SEMI S2-0703a

APPENDIX 5

NON-IONIZING RADIATION (OTHER THAN LASER) AND FIELDS TEST

VALIDATION — Design and Test Method Supplement Intended for

Internal and Third Party Evaluation Use, But Not for Field Survey of

Installed Equipment

NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot

procedures on December 15, 1999 by the North American Regional Standards Committee.

A5-1 Introduction

A5-1.1 This appendix provides specific technical

information relating to Section 25. In general, it

provides information on hazard evaluation methods and

test validation criteria.

A5-1.2 This appendix is not intended to limit hazard

evaluation methods or control strategies (e.g., design

principles) employed by manufacturers. Alternative

methods are acceptable if they provide an equivalent

level of hazard control.

A5-1.3 Test validation criteria are generally referenced

from the applicable internationally recognized

standards. It is the user’s responsibility to ensure that

the most current revision of the standard is used.

A5-2 Non-Ionizing Radiation Surveys should be

conducted at the maximum operational power level and,

when applicable, at the most limiting frequency.

A5-3 Measurements should be taken at the exterior

surfaces of the equipment and at surfaces that

maintenance and repair personnel could encounter,

whenever practical (electric field measurements with

paddle-shaped sensors may not be possible in some

places due to the size and shape of the sensor).

Measurements for the purpose of evaluating emissions

accessible to operators should be taken at the operators

console and material loading station.

A5-4 Measurements to assess electromagnetic

emissions from equipment for safety purposes should

be taken in an area that is reasonably free of energy of

the wavelengths/frequencies of interest, especially if the

strength of the energy fluctuates in a manner that is

unpredictable. Instruments used for safety-related

measurements should be calibrated at a facility capable

of calibrating such instruments using standards

traceable to the National Institute of Standards and

Technology in the USA or an equivalent standards

service elsewhere, per the guidance of the instrument

manufacturer. This should be determined by conducting

surveys in the test area before the equipment is set up

for the measurements. Measurements taken for safety

purposes can also be combined with measurements

taken to address electromagnetic interference concerns.

The specific measurement locations may vary between

electromagnetic interference and safety-related

measurements.

NOTE A5-1: The values in the table below are shown as 20%

of the limit stated in the applicable standard (referenced).

Table A5-1 Non-Ionizing Radiation

Energy