semi合集-English.pdf - 第5661页
SEMI P10-0705 © SEMI 1990, 2005 156 PRODUCT_TYPE RETICLE PRODUCT_MAGNIFICATION 5X PRODUCT_IMAGING_TYPE BINARY TITLE_TYPE DEVICE TITLE_LOCATION 12500,58500 END_TITLE 1 START_TITLE 2 TITLE_TYPE MASK TITLE_LOCATION 12500,56…
SEMI P10-0705 © SEMI 1990, 2005 155
START_ORDER MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 13-APR-1992, 13:00:00Z
MASK_SET_ID 9999 !<mask_set>
BILLING_CONTACT Jean Doe, Accounts Payable !<mask_set_options>
BILLING_ADDRESS Company Name
BILLING_ADDRESS Street Address
BILLING_ADDRESS City, State ZIP
BILLING_PHONE 4085551212
PRICE_UNITS USD
SHIPPING_CONTACT Joe Doe, Wafer Fab
SHIPPING_ADDRESS Company Name
SHIPPING_ADDRESS Street Address
SHIPPING_ADDRESS City, State ZIP
SHIP_CD_DATA T
START_SHIP_TO CD
EMAIL_ADDRESS CD_Engineer@Fab.com
END_SHIP_TO CD
SHIP_CD_DATA T
START_SHIP_TO CD Data
EMAIL_ADDRESS MaskEngineer@Fab.com
END_SHIP_TO CD Data
DATA_MEDIUM 9 TRACK_TAPE
DATA_ID DEVICE 9999
DATA_FORMAT MEBES
DATA_DENSITY 1600BPI
DATA_PATTERN_NAME VT9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME VT9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-26
PATTERN_FORMAT MEBES_RETICLE
DATA_PATTERN_NAME SC9999X-1A-10
PATTERN_FORMAT MEBES_RETICLE
END_DATA_MEDIUM 9 TRACK_TAPE
STD_PATTERN_NAME GCARMSB-OX-AA
PATTERN_FORMAT MEBES_RETICLE
END_MASK_SET_OPTIONS 9999
!
MASK_GROUP_ID 5X !<mask_group>
BLANKET_PO_NUMBER 101055C
RELEASE_NUMBER 42
MILESTONES T
SEMI P10-0705 © SEMI 1990, 2005 156
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE BINARY
TITLE_TYPE DEVICE
TITLE_LOCATION 12500,58500
END_TITLE 1
START_TITLE 2
TITLE_TYPE MASK
TITLE_LOCATION 12500,56500
END_TITLE 2
START_BARCODE A
BARCODE_TYPE GCA
BARCODE_LOCATION -50000,57500
END_BARCODE A
MIRROR_MASK T
START_SUBSTRATE S1
BLANK_SIZE 5/90
BLANK_TYPE ULTE
BLANK_FLATNESS 2
MASK_COATING LOW_REFLECTANCE_CHROME
RESIST_TYPE POSITIVE
END_SUBSTRATE S1
START_REGISTR RG1
REGISTR_ERROR 0.25
REGISTR_REF_MASK_ID 2
END_REGISTR RG1
START_CD SPECIFICATION
CD_TOLERANCE 0.25
CD_RANGE 0.3
END_CD SPECIFICATION
START_DEFECT_DEFINITION C
DEFECT_SIZE 2.0
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
PACKAGE H60-51-63A09
END_MASK_GROUP_OPTIONS 5X
!
PLACEMENT_TOP_CELL C1
!
MASK_ID 1 !<mask_definition>
DELIVERABLE_MASK T
LINE_ITEM_NUMBER 1
STATUS NEW
DUE_DATE_TIME_REQUESTED 1992-04-20, 14:00Z
SEMI P10-0705 © SEMI 1990, 2005 157
PRICE 2000
START_TITLE 2
TITLE_TEXT DIFFUSION
END_TITLE 2
START_BARCODE A
BARCODE_TEXT 9999-26
END_BARCODE A
MIN_MASK_FEATURE_SIZE 10
END_MASK 1
!
MASK_ID 2 !<mask_definition>
DELIVERABLE_MASK T
LINE_ITEM_NUMBER 2
STATUS NEW
DUE_DATE_TIME_REQUESTED 1992-04-21, 14:00Z
PRICE 2000
PRICE_UNITS USD
START_TITLE 2
TITLE_TEXT POLY
END_TITLE 2
START_BARCODE A
BARCODE_TEXT 9999-10
END_BARCODE A
MIN_MASK_FEATURE_SIZE 10
END_MASK 2
!
CELL_ID C1 !<cell_definition>
END_CELL_OPTIONS C1
CELL_INSTANCE C2 !MAIN ARRAY
END_CELL_INSTANCE_OPTIONS C2
START_PLACEMENT P2
LOCATION 0,0
END_PLACEMENT
P2
END_CELL_INSTANCE C2
PATTERN_GROUP_INSTANCE PG3 !RMS ALIGNMENT KEYS
START_PLACEMENT PG3
LOCATION 0,-57500
LOCATION -11000,57500
END_PLACEMENT PG3
END_CELL C1 !END TOP CELL DEFINITION
!
CELL_ID C2 !MAIN ARRAY DEFINITION
END_CELL_OPTIONS C2
PATTERN_GROUP_INSTANCE PG1 !PRIMARY DIE