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SEMI F79-0703 © SEMI 2003 16 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 132 Trimethylphosphorus 9 C3H9P (CH 3 ) 3 P Trimethylphosphine, TMP 303 Trimethylvinylsilane 9 C5H12Si C 5 H 12 Si Vinylt rimethylsil…

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SEMI F79-0703 © SEMI 2003 15
SEMI Gas # Chemical Name Category Symbol Formula Synonym
316 Tetraethyl lead 9 C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN1649
317 Tetraethyl silane 9 C8H20Si C
8
H
20
Si Tetraethylsilane
315 Tetraethylgermane 9 C8H20Ge (C
2
H
5
)
4
Ge
(C2H5)4Ge; Germanium
tetraethyl
282 Tetrakis (diethylamino) titanium 9 C16H40N4Ti C
16
H
40
N
4
Ti
318
Tetrakis (dimethylamino)
titanium
9 C8H24N4Ti C
8
H
24
N
4
Ti
301 Tetramethoxy Silane 9 C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4)
299 Tetramethoxygermanium 9 C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4
302 Tetramethyl Lead 9 C4H12Pb (CH
3
)
4
Pb
(CH3)4Pb; Plumbane,
tetramethyl;
252 Tetramethyl Tin 9 C4H12Sn (CH
3
)
4
Sn
158 Tetramethylcyclotetra-siloxane 9 C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TMCTS
250 Tetramethylgermanium 9 C4H12Ge (CH
3
)
4
Ge
251 Tetramethylsilane 9 C4H12Si (CH
3
)
4
Si
194 Titanium Tetraisopropoxide 9 C12H28O4Ti Ti(OC
3
H
7
)
4
146 Tributylaluminum 9 C12H27Al
(CH
3
CH
2
CH
2
CH
2
)
3
Al
TBAl
307 Triethoxy Arsine 9 C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid
312 Triethoxy Silane 9 C6H16O3Si (C
2
H
5
O)
3
SiH
308 Triethoxyborane 9 C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide;
311 Triethoxyphosphine 9 C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN2323
306 Triethyl Arsine 9 C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic
313 Triethyl Silane 9 C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH;
257 Triethylaluminum 9 C6H15Al (C
2
H
5
)
3
Al
258 Triethylantimony 9 C6H15Sb (C
2
H
5
)
3
Sb
163 Triethylborate 9 C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane
148 Triethylgallium 9 C6H15Ga (C
2
H
5
)
3
Ga TEGa
309 Triethylindium 9 C6H15In (C
2
H
5
)
3
In Indium triethyl
262 Triisobutylaluminum 9 C12H27Al (C
4
H
9
)
3
Al
287 Trimethoxy Silane 9 C3H10O3Si C
3
H
10
O
3
Si
131 Trimethoxyborine 9 C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate
190 Trimethyl Silane 9 C3H10Si (CH
3
)
3
SiH
149 Trimethylaluminum 9 C3H9Al Al(CH
3
)
3
TMA, TMAl
150 Trimethylantimony 9 C3H9Sb (CH
3
)
3
Sb Trimethylstibene
151 Trimethylarsenic 9 C3H9As (CH
3
)
3
As Trimethylarsine, TMAs
277 Trimethylborane 9 C3H9B (CH
3
)
3
B
152 Trimethylgallium 9 C3H9Ga Ga(CH
3
)
3
TMGa
153 Trimethylindium 9 C3H9In (CH
3
)
3
In TMIn
133 Trimethylphosphite 9 C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine
SEMI F79-0703 © SEMI 2003
16
SEMI Gas # Chemical Name Category Symbol Formula Synonym
132 Trimethylphosphorus 9 C3H9P (CH
3
)
3
P Trimethylphosphine, TMP
303 Trimethylvinylsilane 9 C5H12Si C
5
H
12
Si Vinyltrimethylsilane
6.10 Oxygen and Oxides and
Sulfides
10
8 Air 10 Air
25 Carbon Dioxide 10 CO2 CO
2
40 Carbon Disulfide 10 CS2 CS
2
9 Carbon Monoxide 10 CO CO
34 Carbonyl Sulfide 10 COS COS
298 Diethyl Sulfide 10 C4H10S C
4
H
10
S UN2375; Ethyl sulfide;
230 Iron Carbonyl 10 C5O5Fe Fe(CO)
5
47 Methyl Mercaptan 10 CH4S CH
3
SH
140 Nickel Carbonyl 10 C4O4Ni Ni(CO)
4
15 Oxygen 10 O2 O
2
30 Ozone 10 O3 O
3
32 Sulfur Dioxide 10 SO2 SO
2
246 Sulfur Trioxide 10 SO3 SO
3
273 Tungsten Hexacarbonyl 10 C6O6W W(CO)
6
20 Water Vapor 10 H2O H
2
O
6.11 Nitrogen and Nitrogen
Compounds
11
173 Acetonitrile 11 C2H3N CH
3
CN
276 Acrylonitrile 11 C3H3N CH
2
=CHCN Acrylon; Propenenitrile
29 Ammonia 11 NH3 NH
3
198 Borazine 11 B3N3H6 H
3
B
3
N
3
H
3
59 Cyanogen 11 C2N2 NCCN Oxalodinitrile
37 Cyanogen Chloride 11 ClCN ClCN
213 Diethylamine 11 C4H11N (C
2
H
5
)
2
NH
85 Dimethylamine 11 C2H7N (CH
3
)
2
NH
166 Dimethylethylaminealane 11 C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA
281 Diphenylmethan-4,4' -diisocyanat 11 C15H10N2O C
15
H
10
N
2
O UN2489
280 Diphenylmethylenediamine 11 C13H14N2 C
13
H
14
N
2
275 Hafnium Tetranitrate 11 HfN4O12 Hf(NO
3
)
4
50 Hydrazine 11 N2H4 H
2
NNH
2
269 Hydrazoic Acid 11 HN3 HN
3
52 Methylamine 11 CH5N CH
3
NH
2
Amino Methane
233 Monoethylamine 11 C2H7N C
2
H
5
NH
2
234 Monomethyl Hydrazine 11 CH6N2 CH
3
N
2
H
3
16 Nitric Oxide 11 NO NO
SEMI F79-0703 © SEMI 2003 17
SEMI Gas # Chemical Name Category Symbol Formula Synonym
13 Nitrogen 11 N2 N
2
26 Nitrogen Dioxide 11 NO2 NO
2
95 Nitrogen Tetroxide 11 N2O4 N
2
O
4
Dinitrogenoxide
78 Nitrogen Trioxide 11 N2O3 N
2
O
3
235 Nitromethane 11 CH3NO2 CH
3
NO
2
141 Nitrosyl Chloride 11 NOCl NOCl
27 Nitrous Oxide 11 N2O N
2
O
293 Propenamine 11 C3H7N C
3
H
7
N Allylamine; UN2334
304 Pyridine 11 C5H5N C
5
H
5
N Azabenzene; Azine
320 Triallylamine 11 C9H15N C
9
H
15
N
310 Triethylamine 11 C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine;
260 Trifluoroacetonitrile 11 C2F3N F
3
CCN
109 Trimethylamine 11 C3H9N (CH
3
)
3
N Methylamine
165 Trimethylaminealane 11 C3H12AlN (CH
3
)
3
NAlH
3
TMAA
314 Trimethylisoxazole 11 C6H9NO
CH
3
CH=CHCH=C
HCONH
2
3,4,5-Trimethylisoxazole
6.12 Acids 12
283 Acetic acid 12 C2H4O2 CH
3
COOH Ethanoic acid; UN 2789;
289 Acrylic acid 12 C3H4O2 C
3
H
4
O
2
2-Propenoic acid
167 Nitric Acid 12 HNO3 HNO
3
334 Propanoic acid 12 C3H6O2 CH
3
CH
2
CO
2
H Propionic acid
171 Sulfuric Acid 12 H2SO4 H
2
SO
4
259 Trifluoroacetic Acid 12 CF3CO2H CF
3
CO
2
H
294 Trimethyl Ester Phosphoric acid 12 C3H9O4P C
3
H
9
O
4
P Methyl phosphate
6.13 Other 13
329 Mercury 13 Hg Hg UN2809
330 Zinc 13 Zn Zn UN 1383
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