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SEMI E90-0705 © SEMI 1999, 2005 7 7.4 Identification of Subs trate 7.4.1 Substrate shall be identified by su bstr ate ID. There are options for assigning s u bstrate ID to a substrate.  When a carrier is used for l o ad…

SEMI E90-0705 © SEMI 1999, 2005 6

Substrate Lot

belongs

Equipment

Processes

Substrate

Location

held

Substrate

Carrier

Batch

Location

held

provides

Figure 1

Overview of Substrate Tracking

Car r ier

Location

Carrier

holds

Substrate

Location

Equipment

Substrate

Location

Car rier

Substrate

Location

Mater ial

Location

Substrate

has

Batch

Location

held

Figure 2

Concept of Substrate Location

7.3.4 Material Location is classified into Substrate Location, Batch Location, and Carrier Location. A Carrier

Location may hold a carrier, a Substrate Location may hold a substrate, and a Batch Location may hold a group of

substrates. Typical example of a substrates group is a batch in batch process equipment.

7.3.5 Substrate Location is classified into Equipment Substrate Location and Carrier Substrate Location. Carrier has

Carrier Substrate Locations. A Carrier Substrate Location is the location which can hold a substrate in a carrier. An

Equipment Substrate Location is the location which can hold a substrate on the equipment resource.

7.3.6 Substrate travels on substrate locations and/or batch locations.

SEMI E90-0705 © SEMI 1999, 2005 7

7.4 Identification of Substrate

7.4.1 Substrate shall be identified by substrate ID. There are options for assigning substrate ID to a substrate.

 When a carrier is used for loading substrates and the carrier is given its carrier ID, substrate IDs can be obtained

by utilizing the carrier ID and carrier substrate location. This standard will define the requirement for the

substrate ID assignment to the substrates in a carrier.

 Substrate ID may be read from the substrate directly by a substrate ID reader. The substrate ID read from the

substrate can be used for the identification.

 Substrate ID may be assigned by the user (i.e., host or operator). The substrate ID can be used for the

identification. This standard will define the service for registering substrates.

7.4.2 The recommendation of a particular option for assigning substrate IDs is not within the scope of this standard.

It must be selected based on the equipment design and applications.

8 Substrate Tracking Requirement

8.1 Compliance to Substrate Tracking Service (STS) requires that an implementation also provide certain

capabilities that are defined in other standards.

 STS requires compliance to SEMI E39 (OSS) for Substrate objects. The attributes of these objects may be

accessed through use of the GetAttr and SetAttr services.

 STS requires an event reporting capability. This capability may be satisfied by the Event Reporting capability in

SEMI E30 (GEM) or by SEMI E53 (ERS).

8.2 STS compliant equipment must implement capabilities defined in the following sections of this document:

 §9, Substrate Object Definition,

 §10, Substrate Location Object Definition,

 §12, Substrate Tracking Services,

 §13, Variable Data, if SEMI E53 is not implemented, and

 §11, Batch Location Object Definition, is an optional requirement.

8.3 When the equipment provides a substrate reader, the equipment shall implement an equipment constant to allow

the host to choose between using or not using this capability. The equipment constant: “SubstrateReaderEnabled” is

used to choose whether or not the equipment performs the reading of the substrate and use the Substrate Reading

Status state model. The equipment is responsible for creating the substrate objects. The substrate ID assigned to the

substrate object is the same as the one provided by the host in the ContentMap attribute or created by the equipment

using the following rule when the SubstID in the content map is not provided. The default substrate ID shall be

represented in text as the carrierID, a period and the substrate slot location. For example, if CarrierID = “xyz” and

substrate slot location = “5”, then the substrate ID would be = “xyz.05”.

8.4 All state transitions defined for the three state models specified in this document must be reportable via discrete

collection events as defined in ¶6.1, Harel State Model. The three state models are the Substrate Object State Model

(Figure 3), the Substrate Location State Model (Figure 4) and the Batch Location State Model (Figure 5).

8.4.1

The data in Table 15 (Variables Required for Substrate Object State Model Transitions) is required to be

available for the Substrate Object State Model transition collection events. Fixed buffer equipment must support

discrete state transitions for Substrate. Internal buffer equipment must support related state transitions that occur for

a group of Substrate objects. An equipment may support both discrete and related state transitions for Substrate.

8.4.2 The data in Table 16 (Variables Required for Substrate Location Object State Model Transitions) is required

to be available for the Substrate Location Object State Model transition collection events.

8.4.3 The data in Table 17 (Variables Required for Batch Location Object State Model Transitions) is required to be

available for the Batch Location Object State Model transition collection events.

8.5 Each Substrate Object instantiated on the equipment must maintain an independent instance of the Substrate

Object State Model. When discrete and unrelated state transitions occur for Substrate Object models, each shall

trigger a separate collection event. However, when related state transitions occur for a group of Substrate Object

models (such as with internal buffer equipment material transfers), each model does not trigger a separate collection

event. Instead, a single collection event shall be triggered (for all related Substrate Objects in the group). The data

items defined in Table 15 are required to be valid for collection events triggered by state model transitions in the

following way:

8.5.1 These variables from Table 15 must be valid for collection events triggered by discrete state transitions:

 AcquiredID (equipment with substrate ID readers only)

 SubstID

 SubstIDStatus (equipment with substrate ID readers only)

 SubstBatchLocID (batch process equipment only)

 SubstDestination

 SubstHistory

 SubstSubstLocID

 SubstLotID

 SubstMtrlStatus

 SubstPosInBatch (batch process equipment only)

 SubstProcState

 SubstSource

 SubstState

 SubstType

 SubstUsage

8.5.2 These variables from Table 15 must be valid for collection events triggered by a group of related state

transitions:

 AcquiredIDList (equipment with substrate ID readers only)

 SubstIDList

 SubstIDStatusList (equipment with substrate ID readers only)

 SubstBatchLocIDList (batch process equipment only)

 SubstDestinationList

 SubstHistoryList

 SubstLocIDList

 SubstLotIDList

 SubstMtrlStatusList

 SubstPosInBatchList (batch process equipment only)

 SubstProcStateList

 SubstSourceList

 SubstStateList