semi合集-English.pdf - 第5774页
SEMI P22-0699 © SEMI 1993 , 1999 4 Figure 9 Figure 10 Oversize On Opaque Pattern Oversize On Clear Pattern Figure 11 Figure 12 Undersize On Opaque Pattern Undersize On Clear Pattern Figure 13 Figure 14 Elongation On Opaq…
SEMI P22-0699 © SEMI 1993, 19993
Figure 3 Figure 4
Edge Extension Edge Intrusion
S1
1/2
1/2
S1
1/2
1/2
Figure 5 Figure 6
Corner Extension Corner Intrusion
Figure 7 Figure 8
Opaque Bridge Clear Bridge
SEMI P22-0699 © SEMI 1993, 1999 4
Figure 9 Figure 10
Oversize On Opaque Pattern Oversize On Clear Pattern
Figure 11 Figure 12
Undersize On Opaque Pattern Undersize On Clear Pattern
Figure 13 Figure 14
Elongation On Opaque Pattern Elongation On Clear Pattern
SEMI P22-0699 © SEMI 1993, 19995
Figure 15 Figure 16
Truncation On Opaque Pattern Truncation On Clear Pattern
Figure 17 Figure 18
Misplacement On Opaque Pattern Misplacement On Clear Pattern
Figure 19 Figure 20
Transmission Defect On Clear Pattern Transmission Defect On Opaque Pattern