semi合集-English.pdf - 第5679页

SEMI P10-0705 © SEMI 1990, 2005 174 PATTERN_ADDRESS_SIZE 0.25 END_PATTERN_GROUP_OPTIONS FID ! LEVEL_ID M111 PATTERN_NAME FILESNAME.04 START_PATTERN_OPTIONS 1CPO DIGITIZED_DATA_DARK F END_PATTERN_OPTIONS 1CPO END_PATTERN_…

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SEMI P10-0705 © SEMI 1990, 2005 173
!
START_CD 1
CD_DATA 1.250
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 1.300
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -53448.100, -43783.375
CD_LOCATION -53448.100, 55576.625
CD_LOCATION -49070.125, -53343.000
CD_LOCATION -49070.125, 47017.000
CD_FEATURE TUNING FORK
END_CD 1
END_PATTERN_OPTIONS 1PPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.02
START_PATTERN_OPTIONS 2PPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK T
!
START_CD 1
CD_DATA 2.25
CD_DIGITIZED T
CD_TONE_CLEAR T
CD_TARGET 2.30
CD_ORIENTATION HORIZONTAL
CD_REFERENCE_ONLY F
CD_TOLERANCE .12
CD_RANGE .12
NUMBER_OF_CDS 4
CD_LOCATION -33448.100, -53783.375
CD_LOCATION -33448.100, 45576.625
CD_LOCATION -39070.125, -13343.000
CD_LOCATION -39070.125, 27017.000
CD_FEATURE L BAR
END_CD 1
END_PATTERN_OPTIONS 2PPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP PRIMARY
!
!
PATTERN_GROUP_ID CLEAR_BOX ! Only for Mask M111
END_PATTERN_GROUP_OPTIONS CLEAR_BOX
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.03
START_PATTERN_OPTIONS 1CPO
PATTERN_ADDRESS_SIZE 0.25
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
END_PATTERN_GROUP CLEAR_BOX
!
PATTERN_GROUP_ID FID
SEMI P10-0705 © SEMI 1990, 2005 174
PATTERN_ADDRESS_SIZE 0.25
END_PATTERN_GROUP_OPTIONS FID
!
LEVEL_ID M111
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 1CPO
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS 1CPO
END_PATTERN_DEFINITION M111
!
LEVEL_ID M222
PATTERN_NAME FILESNAME.04
START_PATTERN_OPTIONS 2CPO
DIGITIZED_DATA_DARK T
END_PATTERN_OPTIONS 2CPO
END_PATTERN_DEFINITION M222
!
END_PATTERN_GROUP FID
!
!
END_MASK_GROUP G5555
END_MASK_SET S55555
END_ORDER O555555
CHECKSUM 118
SEMI P10-0705 © SEMI 1990, 2005 175
RELATED INFORMATION 6
SEMI PHOTOMASK ORDER EXAMPLE FOR UT1X RETICLES
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
!NOTE: Indentation is for clarity only and is not required.
!
START_ORDER ORDER11111
SEMI_REVISION P10-0704
CUSTOMER AAA CUSTOMER
VENDOR ANY VENDOR
FILE_DATE_TIME 01-Jan-2002, 12:00
OPERATOR_NAME AN OPERATOR
!
MASK_SET_ID ABC123
BILLING_CONTACT CONTACT NAME
BILLING_ADDRESS BILLING ADDRESS LINE 1
BILLING_ADDRESS BILLING ADDRESS LINE 2
PRICE_UNITS USD
SHIPPING_CONTACT CONTACT NAME
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 1
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 2
SHIPPING_ADDRESS SHIPPING ADDRESS LINE 3
!
DATA_MEDIUM FTP
DATA_PATTERN_NAME FILENAME01.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.1$
DATA_PATTERN_NAME FILENAME01.2$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME01.2$
DATA_PATTERN_NAME FILENAME02.1$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME02.1$
DATA_PATTERN_NAME FILENAME03.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME03.50
DATA_PATTERN_NAME FILENAME04.50
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME04.50
DATA_PATTERN_NAME FILENAME05.S$
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME05.S$
DATA_PATTERN_NAME FILENAME06.25
PATTERN_FORMAT MEBES_RETICLE
END_DATA_PATTERN_NAME FILENAME06.25
END_DATA_MEDIUM FTP