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SEMI C60-0305 © SEMI 2005 8 APPENDIX 1 GENERAL ANALYTIC AL PRACTICES NOTICE : The material in this appendix is an official par t of SEMI C59 and was approved by full letter ballot procedures on December 10, 2004 b y the …

SEMI C60-0305 © SEMI 2005 7

9.7.1 Detection Limit — 1.0 ppm (vol/vol).

9.7.2 Flow Requirements — Follow the flow requirements specified in the manufacturer’s instrument operation

manual.

9.7.3 Calibration Standards — Construct a calibration curve which contains at least three points covering the range

of interest. The standards employed will be verified independently by another analytical method.

NOTE 4: Other hygrometers may also be used, e.g. CRDS, FTIR, TDLAS, and vibrating quartz.

9.7.4 Sample System and Proper Operation

9.7.4.1 The sample system shall be as shown in Figure A1-2.

9.7.4.2 Attach sample system to nitrous oxide cylinder.

9.7.4.3 Partially open valve 2.

9.7.4.4 Open valve 1 and adjust pressure to 50 psig, ± 5 psig.

9.7.4.5 Adjust valve 2 until a flow of 500 mL/min, ± 50 mL/min is venting.

9.7.4.6 Tubing, valves and fittings are to be cleaned and passivated 316 stainless steel.

9.7.4.7 Keep tubing lengths to a minimum.

9.7.5 Operating Procedure

9.7.5.1 Follow the procedures outlined in the instrument manufacturer’s manual.

9.7.5.2 Allow the system to run until a stable reading is obtained for ten minutes.

9.7.5.3 Read the quantity of water on the analyzer meter. The result may not exceed the specification in Table 1 of

this standard.

SEMI C60-0305 © SEMI 2005 8

APPENDIX 1

GENERAL ANALYTICAL PRACTICES

NOTICE: The material in this appendix is an official part of SEMI C59 and was approved by full letter ballot procedures on

December 10, 2004 by the North American Regional Standards Committee.

A1-1 Introduce the calibration standard as many times as necessary to achieve the desired precision.

A1-2 All the gases used in the analysis of the sample should not contain more than 10% of the specified value at

the component of interest, unless otherwise specified.

Back Flush Vent

Sample

Vent

Column 1

Methanizer

FID

Figure A1-1

Valving Arrangement

N O

To Analyzer

1. Pressure Reducer

(316SS) heat traced to

approximately 100°F.

2. Needle valve heat

traced to 100°F.

3. Relief valve (100 psig)

reseatable.

4. Pressure gauge

(0-100 psig).

. Fl

ete

Figure A1-2

Nitrous Oxide Cylinder Sample System

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

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respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

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