semi合集-English.pdf - 第7060页

SEMI S17-0701 © SEMI 2001 8 hazardous wast e (such as lead, nickel cadm i um or lithium). NOTE 14: Di sposal r equire ments should com ply with national or local codes, reg ulations, and law s. NOTE 15: Per SEMI S2 envir…

SEMI S17-0701 © SEMI 20017

13.1.2 Malfunction Alarm — In the event of a

malfunction, the UTV should both light a lamp(s) and

generate an alarm sound to alert personnel.

NOTE 10: Malfunction alarms typically require the system to

be reset by a human operation.

13.1.3 Manual Operation Indicator — The UTV

should indicate if it is under manual operation, defined

as any control of a vehicle outside of automated

operation.

13.1.4 Sensor Disabled Lamp — The UTV should

light a lamp(s) to indicate when the non-contact

approach sensing device is disabled (for example,

because the UTV is negotiating a sharp turn).

13.2 Hazard Alarms and Lamps for Floor-Traveling

Vehicles — In addition to the indicators in Section 13.1,

the following indicators should also be provided on

floor-traveling vehicles:

13.2.1 Startup Alarm — When a floor-traveling

vehicle restarts after stopping for 5 seconds or more, the

vehicle should set off an audible alarm sound at least

one second before it begins to move.

13.2.2 Traveling Alarm — When the floor-traveling

vehicle is traveling, the vehicle should generate audible

alarm sounds either continuously or intermittently as

appropriate for the area in which the vehicle is

operating.

13.2.3 Turn Signal Lamps — To indicate a floor-

traveling vehicle is preparing to turn/spin-turn (right or

left) and during the turn cycle, the vehicle should light

turn signal lamp(s). Turn signal lamps should be

clearly visible from the side in the direction of the turn.

13.2.4 Automated Operation Indicator — The floor-

traveling vehicle should light lamp(s) to indicate it is in

automated operation.

13.3 Hazard Alarms and Lights for Space-Traveling

Vehicles — In addition to the indicators in Section 13.1,

the following indicator should also be provided on

space-traveling vehicles.

13.3.1 Hoist Alarm — The space-traveling vehicle

and/or hoist should generate audible alarm sounds

indicating that the hoisting mechanism is moving

(raising or lowering).

NOTE 11: The same audible alarm device can be used to

generate startup, traveling, hoist, or malfunction alarms,

provided that different sounds are used to indicate each

condition.

13.4 Visual Hazard Alerts for both Floor-Traveling

and Space-Traveling Vehicle Areas — To assure

personnel safety in the UTV operation area, information

about the recommended system of safety measures

should be provided by the UTV system supplier

(including items such as alerts, signs, color coding, and

safety poles for the vehicle operating area).

13.4.1 The UTV system supplier should provide

information about style and placement of road signs, for

posting along floor traveling vehicle paths and at

load/unload or maintenance stations.

NOTE 12: End user customers may need to provide additional

visual hazard alerts for posting on building structures (such as

walls, columns, and doors) and/or equipment surrounding the

UTV operation area.

13.5 Visual Hazard Alerts on Floor-Traveling

Vehicles — In addition to the information about

operational area visual hazard alerts (noted in Section

13.4), the floor-traveling vehicle supplier should

provide all visual hazard alerts required for the floor-

traveling vehicle. These visual hazard alerts should be

clearly visible from all sides of the UTV.

13.6 Visual Hazard Alerts for Space-Traveling

Vehicles — In addition to the operational area visual

hazard alerts noted in Section 13.4, the following visual

hazard alerts should also be provided by space-traveling

vehicle suppliers.

13.6.1 The UTV system supplier should provide

marking of maintenance station areas and their hazards,

as well as a method of marking the floor location where

maintenance descent occurs.

NOTE 13: End user customers may need to mark load/unload

stations to identify the existence of the hazard. UTV system

suppliers should suggest a method of marking these areas.

14 Hazardous Materials

14.1 Batteries for Floor-Traveling and Space-

Traveling Vehicles — If the UTV requires the use of

batteries, the following should be included in the

documentation provided by the UTV supplier.

14.1.1 Specifications provided by the UTV system

supplier for battery recharging, battery maintenance and

battery storage areas should specify the following. This

provision can be waived only if the batteries used are

sealed with no possibility of gas emission.

• Requirements for eye-washing equipment.

• Requirements for ventilation.

• Restrictions on smoking and other sources of

ignition.

• Personnel splash protection requirements during

electrolyte handling.

14.1.2 The UTV system supplier should provide

disposal requirements for batteries that constitute

SEMI S17-0701 © SEMI 2001 8

hazardous waste (such as lead, nickel cadmium or

lithium).

NOTE 14: Disposal requirements should comply with

national or local codes, regulations, and laws.

NOTE 15: Per SEMI S2 environmental guidelines, the UTV

system supplier should provide information on the nature,

volume, and risks of potential hazardous waste (such as lead

or lithium).

NOTE 16: Battery charging stations may have to meet

international, national, or local regulations (such as EU

Directives or U. S. Department of Labor, Occupational,

Safety and Health Act Regulations).

14.2 Spill Prevention for Floor-Traveling and Space-

Traveling Vehicles — If the UTV requires the use of

lubricants, the UTV supplier should meet the following

spill and slip hazard provisions.

14.2.1 Any UTV with an internal oil-reservoir (such as

a gearbox) should be structurally designed to prevent

any oil from dripping out of the vehicle.

14.2.2 Space-traveling vehicle track lubricants should

be restricted to those lubricant types and quantities that

will not drip from the vehicle or create a slip hazard.

14.2.3 Rail guided vehicle or track lubricants should

be restricted to those lubricant types and quantities that

will not drip (e.g., onto sub-Fab floors). Neither should

they create a slip hazard on the walking surfaces beside

the rail or on the top of the rail itself.

15 Related Documents

15.1 SEMI Standards

SEMI E33 — Specification for Semiconductor

Manufacturing Facility Electromagnetic Compatibility

SEMI E64  Provisional Specification for 300-mm

Cart to SEMI E15.1 Docking Interface Port

SEMI S1 — Safety Guideline for Visual Hazard Alerts

15.2 ANSI Standard

ANSI/ASME B56.5 — Safety Standard for Guided

Industrial Vehicles and Automated Functions of

Manned Industrial Vehicles

15.3 CEN Standards

EN 1525 — Safety of Industrial Trucks – Driverless

Trucks and their Systems

3 American National Standards Institute, 11 West 42nd St., 13th

Floor, New York, NY 10036

4 European Committee For Standardization, 36, rue de Stassart, B-

1050 Brussels, Belgium

15.4 U.S. Government Regulations

29 CFR 1910 — U. S. Department of Labor,

Occupational, Safety and Health Act Regulations

15.5 JIS Standards

JIS D 6801 — Glossary of Terms Relating to

Automatic Guided Vehicle Systems

JIS D 6802 — General Rules on the Safety of

Automatic Guided Vehicle Systems

JIS D 6803 — General Rules on the Design of

Automatic Guided Vehicles

JIS D 6804 — General Rules on the Design of

Automatic Guided Vehicle Systems

JIS D 6805 — Testing Method of Characteristics and

Functions of Automatic Guided Vehicles

15.6 VDI Standards

VDI 2510 — Automated Guided Vehicle Systems

(AGVS)

VDI-3643 — Self-Powered Trolley System – Load

500kg

NOTICE: SEMI makes no warranties or

representations as to the suitability of the guideline set

forth herein for any particular application. The

determination of the suitability of the guideline is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. This

guideline is subject to change without notice.

The user’s attention is called to the possibility that

compliance with this guideline may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this guideline, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this guideline. Users of this guideline

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

5 Code of Federal Regulations, Superintendent of Documents, U.S.

Government Printing Office, Washington, D.C. 20402

6 Japanese Industrial Standards available in Japanese language only

through Japanese Standards Association, 1-24, Akasaka 4-chome,

Minato-ku, Tokyo, Japan 107-8440

7 Verein Deutscher Ingenieure (VDI), Postfach 101139, D-40002

Düsseldorf, Germany

RELATED INFORMATION 1

PROTECTIVE DEVICE OPTION CONSIDERATION FOR LOAD/UNLOAD

OPERATIONS AT SEMICONDUCTOR MANUFACTURING EQUIPMENT

LOAD STATIONS

NOTE: This Related Information is not an official balloted part of SEMI S17. It is included to assist the user of the

document in making decisions about possible options.

R1-1 Purpose

R1-1.1 This Related Information should act as an

application note for consideration and selection of

safety devices that may be provided to protect

load/unload operations where risks are generated by

space traveling vehicles.

R1-1.2 Space traveling vehicle suppliers are not

required to provide such devices, except as necessary to

comply with local jurisdictional requirements.

NOTE R1-1: Refer to the main document for devices

recommended for protecting equipment.

R1-2 Scope

R1-2.1 Protective Devices  As related to UTV

equipment, devices designed to protect personnel or

equipment from injury or damage during raising or

lowering of loads into position.

R1-2.2 Protective devices should be considered when

space-traveling vehicles with hoisting mechanisms are

present.

R1-2.3 Protective devices function to warn of, or

prevent transfer of, loads when personnel or equipment

are at risk.

R1-2.3.1 This application note covers the following

types of devices:

• Sensors

• Shields

• Alarms

• Signs and visual alerts

• Communication protocol

NOTE R1-2: This should not be considered a complete list

there could be many other solutions.

R1-3 Limitations

R1-3.1 This Related Information is not intended to

apply to situations where load ports are installed only

in locations inaccessible to personnel walking on the

factory floor (such as SEMI E15.1 Option 2 load ports).

R1-3.2 This Related Information does not apply to

factories using only floor-traveling vehicles or PGVs.

R1-4 Considerations

R1-4.1 Protective devices should be considered for

preventing transfer of loads when personnel or

equipment are at risk.

R1-4.2 Protective device integration should be

considered a coordinated effort between UTV supplier,

manufacturing equipment supplier and the end user

customer.

R1-5 Lookdown Sensors

R1-5.1 Lookdown Sensors  Such sensors surround

the hoisting mechanism and look down to the loadport

to determine if anything is within the path of descent.

R1-5.2 Lookdown sensors are one type of protective

device that allows for the overhead vehicle to “see” if

there is anything in the expected path of descent.

R1-5.3 Lookdown sensors can serve the function of

protecting equipment from impact.

R1-5.4 Lookdown sensors should be capable of

communicating the need for operator intervention back

to a location that can notify the proper personnel.

R1-6 Shield Options

R1-6.1 Shield Device  Shield devices are physical

shielding which is placed to block access to a hazard

area.

R1-6.2 Shield devices, when selected, should be

capable of fitting within the dimensional limitations of

the load ports. (See SEMI E15.1 for dimensional

requirements and exclusion zones for 300 mm load

ports.)

R1-6.3 Shield device types include:

• Curtain Sensor

• Safety Guard

• Automatic Doors