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SEMI E32-0997 © SEMI 1994 , 1997 26 4.4.3 Parameter/Attribute Definition s — This sectio n gives further details on parameters not sufficiently defin ed above. It als o defin e s attribu te s of the defined object ty pes…

SEMI E32-0997 © SEMI 1994, 199725

CmdParameter Detail

Parameter RSP/CONF Description Form

CmdParmName M The name of the parameter. Text

CmdParmValue M Value of the parameter. Varies per Parameter

TRJobAlert

The equipment indicates the start or completion of a transfer job.

Parameter REQ/IND Description Form

TRJobID M Equipment’s identifier of the transfer job. Unsigned integer

TRJobName M Host created identifier of the transfer job. Text

TRJobMS* M Transfer job milestone. Enumerated

TRStatus M Status of the transfer milestone (i.e., success or failure). Structure

GetAttribute

Information related to a specific object (e.g., transfer job) is requested.

Parameter REQ/IND RSP/CONF Description Form

ObjType* M - Type of object for which attributes are desired. Enumerated

(List of) ObjectID C - Identifier of each object for which attributes are desired. If

omitted (i.e., list of zero elements), it implies a request for all

objects of the specified ObjType.

Varies according

to ObjType.

(List of) AttributeID* M - Identifier of requested attribute. Enumerated

(List of) AttrData - C Attribute data. Returns the requested attribute list for each

specified ObjectID (e.g., grouped per ObjectID). If the object

does not exist, an empty list is returned for that object, if an

attribute does not exist, a null member of the list is returned. If

the ObjType is unknown, a single null list is returned.

Varies per

attribute.

(List of) Status - C Reports any errors found in the GetAttribute request. (May be

list of 0.)

Structure

TRJobEvent

The equipment reports pertinent state changes related to a transfer job.

Parameter REQ/IND Description Form

TREventID* M Identifier of the specific event which occurred. Enumerated

TRJobID M Equipment’s identifier of the job to which the event refers. Unsigned integer

TREventData C Data related to the specific event. May be repeated if multiple data

parameters are reported.

Varies per parameter

reported.

SEMI E32-0997 © SEMI 1994, 1997 26

4.4.3 Parameter/Attribute Definition s — This section

gives further details on parameters not sufficiently

defined above. It also defines attributes of the defined

object types. Note that some parameters also serve as

attributes (e.g., TRJobName).

AtomicSpec — If a list of AtomicSpec parameters is

supplied, the order is important. The equipment shall

execute atomic transfers in the order specified on a per–

port basis.

AttributeID/AttrData — An attribute is a characteristic

which applies to all instances of that (type of) object.

Thus, the attributes available for an object depend upon

the ObjType. The three object types available for

material movement are TransferJob and

AtomicTransfer, and Equipment. Below are listed the

defined attributes for each.

Object (i.e., any object): ObjectID, ObjType.

TransferJob: TRJobState, TRAtomicList,

TRJobName, TRJobID (=ObjectID).

AtomicTransfer: TRAtomicState, TRLink,

TRPort, TRObjName, TRRole, TRRecipe,

TRPartner, TRPartnerPort, TRDirection, TRType,

TRLocation, TRAutoStart, TRObjType,

TRAtomicID (=Object ID).

Equipment: Name (=ObjectID).

ErrorCode — This parameter is used to report the

reasons why an activity was unsuccessful. This applies

to the TRJob Create, TRJobComplete, and the

TRJobCommand. While it is impossible to define all

possible errors, the following is a list of values which

may apply in many cases:

TRJobCreate:

• Parameters improperly specified.

• Insufficient parameters specified.

• Queue full or queuing not allowed.

• Error in atomic transfer specification.

• Material Location Status does not match Transfer

Specification.

• Primary Transfer Partner Role not supported.

• Active Participation not supported.

TRJobComplete:

• Failed due to hardware error.

• Failed due to transfer partner error.

• Failed due to error during atomic transfer.

• Transfer Job aborted by host.

• Transfer Job stopped by host.

• Transfer Job canceled by host.

TRJobCommand:

• Parameters missing or improperly specified.

• Requested service not available from this

equipment.

• Cancel not allowed after transfer start.

• Unknown Transfer Job.

GetAttribute:

• Invalid object type.

• Unknown objectid.

• Invalid attribute.

ObjType — The type or class of the object of interest.

The three types of objects contained in this document

are TransferJob, AtomicTransfer, and Equipment.

Timestamp — The format for this Text string is

YYYYMMDDhhmmsscc where:

YYYY= Year

MM= Month (01–12)

DD= Day (01–31)

hh= Hour (00–23)

mm= Minute (00–59)

ss= Second (00–59)

cc= Hundredths of Second (00–99)

TRCmdName/CmdParameter — Possible values are:

Command Parameter

CANCEL none

PAUSE none

RESUME none

ABORT none

STOP none

STARTHANDOFF TRAtomicID

TREventID/TREventData — The following table shows

the defined events and the data which are required to be

available. Any attribute of the object should be

available for reporting with an associated collection

event.

Event Typical Data

Committed To Transfer TRAtomicID, Timestamp

Waiting for StartHandoff TRAtomicID, Timestamp

Transfer Job Paused Timestamp

Transfer Job Started Timestamp

Atomic Transfer Started TRAtomicID, Timestamp

Atomic Transfer Complete TRAtomicID, Timestamp

TRJobMS — Identifies which transfer job milestone is

being alerted to the host. Possible values are:

• Transfer Job Started.

• Transfer Job Complete.

TRObjType — Identifies the type of object to be

transferred. This parameter is used only in cases where

a port is capable of transfers involving different object

types. As an example, a list of possible values might

include:

• Wafer Reticle Cassette

• 100 mm Wafer Carrier

• 125 mm Wafer Carrier

• 150 mm Wafer Carrier

• 200 mm Wafer Carrier

• 100 mm Wafer

• 125 mm Wafer

• 150 mm Wafer

• 200 mm Wafer

Attributes: (Note: Some parameters above are also

attributes.)

Name — Each equipment must have a unique Name

attribute, a factory-defined Text string.

TRAtomicList — List of the atomic transfers

(TRAtomicIDs) contained within the specified transfer

job. This is an attribute of a transfer job and is specified

in the GetAttribute service.

TRAtomicState — Attribute of an atomic transfer.

Possible values are defined by the state models defined

in Sections 4.2.3 and 4.3.3.

TRJobState — An attribute of transfer job. Possible

values are defined by the state models defined in

Sections 4.2.2 and 4.3.2.

4.5 Object Attribute Definitions — This section

defines the attributes of those objects required for

Material Movement Management: Equipment,

TransferJob, and AtomicTransfer.

4.5.1 Equipment — The attributes of the Equipment

object are defined in Table 4.5.

Table 4.5 Equipment Object Definition Table

Attribute Name Definition Access Requirement Form

ObjType Object type. RO Y Text = “Equipment”

ObjID User-definable name. RW Y Text