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SEMI E92-0302 E © SEMI 1999, 2003 12 BOLTS/Light SEMI E15.1-D1 FOUP HDP FDP BOLTS/Light Shelf BOLTS/M SEMI E15.1-D SEMI E15.1- D1 Docking Stroke BOLTS/M BOLTS/M BOLTS/Light Plan e FDP BOLTS/M BDP BOLTS/Light BOLTS/M Plan…

SEMI E92-0302

APPENDIX 1

APPLICATION NOTES

NOTE: The material in this appendix is an official part of SEMI E92 and was approved by full letter ballot procedures on

December 3, 1999 by the Japanese Regional Standards Committee.

A1-1 NOTICE: Usage of Loader Locating Pins

A1-1.1 In order to provide quick interchangeability

with accurate repeatability, it is recommended to use V

shaped groove to couple with the positioning pin and

use flat plane to couple with the anti-rotation pin as

shown in Figure 4.

A1-2 NOTICE: BOLTS/Light Shelf

A1-2.1 BOLTS/Light Shelf may be used in order to

keep compatibility with BOLTS/M interface. In this

case, BOLTS/M interface provides backward compati-

bility of equipment interface and BOLTS/Light inter-

face provides standardized precise quick attachment/

detachment interface. BOLTS/Light shelf is shown in

Figure A-1.

A1-3 NOTICE: Box Opener/Loader Compati-

bility

A1-3.1 It is recommended that equipment suppliers

design their process equipment to be capable of

accepting box opener/loaders that interface with either a

BOLTS/M interface or a BOLTS/Light interface. This

standard has been structured to make the BOLTS/Light

interface a component capable of being attached to a

BOLTS/M interface. (It is not physically feasible to

make the BOLTS/M interface an optional component

capable of being attached to a BOLTS/Light interface).

A1-3.2 If an equipment supplier provides a BOLTS/M

interface, their process equipment can be modularly

configured to interface with either type of box/opener

loader. This type of approach allows “two-way

compatibility”:

• Process equipment with a BOLTS/M interface can

attach a BOLTS/Light interface. This enables the

process equipment to now accept a box

opener/loader with a BOLTS/Light interface.

• Process equipment with a BOLTS/Light interface

can remove the BOLTS/Light interface to expose a

BOLTS/M interface. This enables the process

equipment to now accept a box opener/loader with

a BOLTS/M interface.

Equipment suppliers may provide only a BOLTS/Light

interface at their discretion. However, it should be

understood that process equipment designed in this

manner can not be modularly configured to accept a

box/opener loader with a BOLTS/M interface.

A1-4 NOTICE: Docking Stroke Variation for

Backward Compatibility

A1-4.1 In order to provide the “Backward compatibil-

ity” requested in I300I/J300 GJG

, vendors who want to

use this standard to put BOLTS/Light unit in their exist-

ing BOLTS/M compliant loadport unit may vary dock-

ing stroke as their option to accommodate their existing

designs. The unit that has a different docking stroke is

no more a BOLTS/Light-Full-Compliant unit, but could

be called as BOLTS/Light-Quasi-Compatible unit.

A1-5 NOTICE: Sliding Mechanism

A1-5.1 Actual design of the sliding mechanism is left

to the box opener/loader and/or equipment designer.

The equipment provides bottom interface planes as the

loading slider areas.

A1-5.1.1 This implies several types of bottom interface

planes are acceptable by the equipment; e.g., roller

guided, plastic material based, etc.

A1-6 NOTICE: Maintenance Cart

A1-6.1 If the box opener/loader is too heavy to

attach/detach manually by maintainer, this standard

provides for the possibility/capability of cart-based

maintenance.

A1-6.2 The cart may use the same cart to equipment

docking mechanism as the cart for FOUP delivery.

A1-6.3 The maintenance cart may also use a

connection with the bottom interface planes that are

defined in this standard. Specification of how to make

the carts is outside the scope of this standard.

A1-7 NOTICE: Finger Pinch Sensor

A1-7.1 This document does not define or specify a fin-

ger pinch sensor. Considering finger pinching with

edges, the following approach may be recommended.

• Finger pinching with edges is more serious than it

is with flat surfaces. So, it is recommended not to

place the box flange seal in a narrow tunnel

structure which have sharp edges but place it on a

flat surface (or in a dimple that has chamfered

edges).

1 I300I/J300 GJG — I300I/J300 Global Joint Guidance for 300 mm

Semiconductor Factories. SEMATECH, 2706 Montopolis Drive,

Austin, TX, 78741. http://www.sematech.org

SEMI E92-0302

BOLTS/Light

SEMI

E15.1-D1

FOUP

HDP

FDP

BOLTS/Light

Shelf

BOLTS/M

SEMI E15.1-D

SEMI E15.1-

Docking

Stroke

BOLTS/M

BOLTS/Light Plane

FDP

BOLTS/M

BDP

BOLTS/Light

BOLTS/M Plane

FOUP

BOLTS/Light

Shelf

BDP

HDP

BOLTS/M Seal

zone

BOLTS/Light

Seal zone

(on the back side)

Top View

Rear View

Side View

Equipment

panel

Forklifts

Exclusion

volume

Figure A-1

Usage of BOLTS Shelf (Adopter)

SEMI E92-0302

• Placement of a finger pinch sensor in the

approximately 11 mm space behind SEMI E15.1

D1 is recommended.

A1-8 NOTICE: Adjustment of BOLTS/Light Unit

A1-8.1 In order to maintain quick interchangeability

and interoperability and quick attachment/detachment,

adjustment capability should be provided separately by

the box opener/loader and equipment to ensure the port

is positioned correctly with respect to the wafer

handling robot.

A1-8.2 As a result, adjustment means will be necessary

on both the box opener/loader and the equipment. The

box opener/loader may have a capability to calibrate its

critical dimensions in advance, for example, the

parallelism between bottom interface surface and HDP.

In this case, it is not necessary to adjust the box

opener/loader after installation. The equipment should

have a capability to adjust bottom interface plane with

respect to the wafer-handling robot. In case of changing

the box opener/loader in the field, adjustment might

then not be necessary on both the box opener/loader

and the equipment side.

A1-8.3 A fixture may help facilitate this adjustment.

A1-8.4 If fine adjustment is needed after reattaching

the box opener/loader (due to deficient adjustment of

the box opener/loader or equipment side), it may be

done on the equipment side by means of adjusting

screws or other mechanism at bottom interface plane.

A1-9 NOTICE: Control Connection Area

A1-9.1 Connection should be completed after sliding

in the box opener/loader. Disconnection should be

completed before sliding out the box opener/loader.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standard set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of copy-

righted material or of an invention covered by patent

rights. By publication of this standard, SEMI takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.