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SEMI E138-0305 © SEMI 2005 2 6 Resources, Organization s, and Standards 6.1 Im portant resources and organization s used in the generation and definition of this document are found in: 6.1.1 XML Schema Part 2: Dataty pes…

SEMI E138-0305 © SEMI 2005 1

SEMI E138-0305

XML SEMICONDUCTOR COMMON COMPONENTS

This standard was technically approved by the Global Information and Control Committee and is the direct

responsibility of the North American Information and Control Committee. Current edition approved by the

North American Regional Standards Committee December 10, 2004. Initially available at www.semi.org

January 2005; to be published March 2005.

1 Purpose

1.1 This document is a central location for the definition of common XML elements that are not specific to a single

standard, but common across multiple standards.

2 Scope

2.1 This document currently defines the representation of Error. This common component is used in association

with other XML documents or schemas generated as part of a SEMI standard interface specification for

communication between software entities.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 The purpose of this document is to define basic components and to allow for future additions as common

components are discovered and required. Only one component (Error) is being defined at this time.

4 Referenced Standards

4.1 SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

4.2 Other References

Extensible Markup Language (XML) 1.0 (Second Edition) — W3C Recommendation, 6 October 2000

(http://www.w3.org/TR/2000/REC-xml-20001006)

XML Schema Part 1: Structures — W3C Recommendation, 2 May 2001 (http://www/w3/org/TR/xmlschema-1)

XML Schema Part 2: Datatypes — W3C Recommendation, 2 May 2001 (http://www/w3/org/TR/xmlschema-2)

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 W3C — World Wide Web Consortium

5.1.2 WWW — World Wide Web

5.1.3 XML — Extensible Markup Language

SEMI E138-0305 © SEMI 2005 2

6 Resources, Organizations, and Standards

6.1 Important resources and organizations used in the generation and definition of this document are found in:

6.1.1 XML Schema Part 2: Datatypes — W3C Recommendation

7 XML Type Definitions

7.1 XML Schema — This specification includes an XML schema file, “CommonComponents-V0305-Schema.xsd”,

and should be provided with this document. That XML schema file provides the normative definitions of the types

described here.

7.2 Data Type for Error Handling — Error handling in most cases even with standard interface specifications is

implementation-specific. It is not practical for one specification to define all possible error conditions, error codes,

descriptions and supplementary information that is needed to properly recover from the error. Regardless, a

common approach to communicating error conditions can simplify error management for standards implementers

and application developers.

7.3 Error Data Structure — The following data structure defines a common error structure that can be extended

with additional implementation-specific information that can be used by other standards or suppliers.

Error

Source

Code

Description

Extension

Figure 1

Error Structure

7.3.1 Source — The “Source” attribute represents the document from where the attribute code value is defined. For

error codes defined by SEMI standards, the content of Source is the urn representation of the standard number. For

error codes defined by a supplier, it is the urn representation of the supplier’s name. (i.e. For SEMI E132 errors, the

content of “Source” is: urn:semi-org:E132; for supplier ACME errors the content is: urn:ACME-com) Additional

information may be included by the supplier by adding such information after the “:” colon symbol and separating

the fields with a “.” period symbol.

Table 1 Example of Error Sources

# Source Comment

1 urn:semi-org:E005 Standard Error Codes for Equipment - SEMI E5.

2 urn:semi-org:E087 Standard Error Codes from Carrier Management.

3 urn:semi-org:E125 Standard Error Codes from Equipment Self Description.

4 urn:<Supplier>-com[:<SupplierFields>] Identification of the source of error codes.

7.3.2 Code — Error code is an integer value that directly maps to a particular specification error code list. The

following is an example of a list of code ranges. This specification does not require the allocation of any code range

by other specification. The following is just an example of codes.

Table 2 Example of Error Code Range

# Code Range Comment

1 1–63, 32768–65535 Standard Error Codes for Equipment - SEMI E5.

2 10000 – 10500 Equipment Supplier Specific enumerated error codes (Example).

3 5000 – 5999 Common Standardized Core Components Errors.

7.3.3 Description — This is a human readable description of the error code being reported. It maps directly to the

definition of the error code for each of the expected result of the services as defined by the specific standard.

Additional information may be supplied after this string to provide more detail about the error. Use the “:” colon

symbol as delimiter (i.e. Common Component, Code 5001, “Insufficient Arguments Provided:Argument

“SessionID” missing).

Table 3 Example of Error Descriptions

# Description Comment

1 “Unknown Object in Object Specifier” Error description for Code “1” as defined in SEMI E5.

2 “Loadport does not exist” Error code “49” description from E87 and defined in E5.

3 “Operation Not Supported” Error description for Error Code “5000”.

7.3.4 Extension — This attribute allows the supplier to include additional information regarding the error code

encountered. This field is used when the description does not explicitly cover the problem and more specific

information is required.

7.4 Common Standardized Errors — This section defines common errors to be reported by any application

processing a service. Most of these errors are related to the validation of the service.

Table 4 Common Standardized Error Codes

Code Description Comment

5000 Operation Not Supported [:Operation specific detail] Description of the actual error encountered.

Additional information may be included.

5001 Insufficient Arguments Provided [:Operation specific detail] One or more arguments are missing in the request.

5002 Invalid Arguments Provided [:Operation specific detail] One or more arguments in the request are invalid or

incompatible.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.