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SEMI E109-0305 © SEMI 2001, 2005 57 20.2.2 Data required to be available for this ev ent report:  BufferPartitionInfo 20.3 Pod Cl osed Event 20.3.1 If the pod is equipped with a door, an e vent shall be genera ted when …

SEMI E109-0305 © SEMI 2001, 2005 56

Parameter Name Req/Ind Rsp/Conf Description

ArrivingReticleList C — The list of reticles to remove from the reticle pod and place in the

equipment. Either ArrivingReticleList or DepartingReticleList must be

used.

DepartingReticleList C — The list of reticle to remove from the equipment and place in the reticle

pod. Either ArrivingReticleList or DepartingReticleList must be used.

RPMStatus — M Information concerning the result of the service.

18.5.20 Unclamp

18.5.20.1 The Unclamp service is used by the host if the equipment has separate mechanisms for unclamping the

carrier that are independent of opening the carrier. It is used to instruct equipment to disengage the independent

clamping mechanism. It is used by the host when “macro” instructions such as provided by Bind, PodNotification,

ProceedWithPod and ReticleTransferJob have not been provided by the host.

Table 55 Unclamp Service Parameter Definitions

Parameter Name Req/Ind Rsp/Conf Description

PodID C — The PodID of the pod to unclamp. Either the PodID or the PortID must

be specified.

PortID C — The PortID for which to unclamp a carrier. Either the PodID or the

PortID must be specified.

CMStatus — M Information concerning the result of the service.

19 Pod Tag Read/Write

19.1 Some technologies allow data to be stored on a PodID tag where it can be subsequently read and/or modified.

In one case the equipment can write information to the PodID tag. For example, the equipment will have knowledge

of the ReticleID of a reticle placed in a pod. At this time the equipment may write the ReticleID on the PodID tag.

In another case, it is the host that specifies when this data is written and read, because the equipment has no

knowledge of the contents of the data. The read operations shall be performed only when the pod is at the read

position. The write operations shall be performed only when the pod is at the write position.

NOTE 2: The read and write positions may be the same position. The host shall be able to both read and write whenever

PodHold switch is set to Host Release and the pod is at the respective read or write position. Once the host has completed all of

its read and write operations for that pod, then the host sends the PodRelease request to the equipment. The PodRelease service

informs the equipment that pod read or pod write is complete. The PodRelease service has a different purpose from the PodOut

service. The intent of the PodOut service request is to move the pod to a load port, while the intent of the PodRelease service

request is to inform equipment that it may move the pod away from the read or write position. Therefore, PodOut may also be

used with the PodRelease command. If PodHold is Host Release, then the pod shall be kept at the write position until an

PodRelease service request is received, regardless of when a PodOut is sent. If PodHold is set to Equipment Release, then the

PodRelease request has no effect.

20 Additional Events

20.1 This section identifies data collection events that are not related to State transitions for variable data items.

The intent of this section is to ensure certain data is available for specific events that are not related to state

transitions, not to define all the additional collection events for RPMS. Also, all state transitions in RPMS state

models are required to have associated event reports.

20.2 Buffer Capacity Changed Event

20.2.1 An event shall be generated whenever Buffer Capacity changes. This applies to all internal buffers and

internal buffer partitions.

SEMI E109-0305 © SEMI 2001, 2005 57

20.2.2 Data required to be available for this event report:

 BufferPartitionInfo

20.3 Pod Closed Event

20.3.1 If the pod is equipped with a door, an event shall be generated when a pod door has been closed.

20.3.2 Data required to be available for this event report:

 PodID,

 LocationID, and

 PortID (if valid).

20.4 Pod Location Change Event

20.4.1 An event shall be generated whenever a pod has changed location. This applies to both load ports, substrate

ports, and internal buffer locations.

20.4.2 Data required to be available for this event report:

 PodID,

 LocationID (new destination location), and

 PodLocationMatrix.

20.5 Pod Opened Event

20.5.1 If the pod is equipped with a door, an event shall be generated when a pod door has been opened.

20.5.2 Data required to be available for this event report:

 PodID,

 LocationID, and

 PortID (if valid).

20.6 PodID Read Fail Event

20.6.1 An event shall be generated when the equipment attempts to read a PodID and fails at a port in the NOT

ASSOCIATED STATE.

20.6.2 Data required to be available for this event report:

 PortID

20.7 ID Reader Unavailable Event

20.7.1 An event shall be generated whenever an id reader becomes unavailable for any reason. This applies to all

load ports.

20.7.2 Data required to be available for this event report:

 Port ID

20.8 ID Reader Available Event

20.8.1 An event shall be generated whenever an id reader becomes available. This applies to all load ports.

20.8.2

Data required to be available for this event report:

 Port ID

20.9 Reticle Usage Warning Limit Event

20.9.1 An Event shall be generated whenever a reticle is nearing the configurable limits of usage

SEMI E109-0305 © SEMI 2001, 2005 58

20.9.2 Data required to be available for this event

 ReticleID

20.10 ReticleTransferJob Complete Event

20.10.1 An event shall be generated whenever a ReticleTransferJob completes.

20.10.2 Data required to available for this event:

 PodID

21 Variable Data

21.1 The purpose of this section is to define the list of variable data requirements for RPMS equipment. Values of

these variables are available to the host via collection event reports and host status queries. Some of the data items

listed are valid for internal buffer production equipment only, and are marked as such.

21.2 Variable Data Definitions

21.2.1 The following table defines variable data that shall be provided by the production equipment. Also, for the

objects defined by Reticle and Pod Management, the identifier of that object and all of the attributes of that object

shall be available for inclusion in event reports associated with that object. Subscripted variables are used either as

items within a list or to differentiate data representing different entities. Subscripted variables are always valid.

Table 56 Variable Data Definitions

Variable Name Description Type Access Comment

AccessMode

The access mode for the i

load port.

Enumerated:

MANUAL,

AUTO

AlarmInfo The number of the error

ocurring.

List of 2 items

1. Alarm number

2. Alarm description

RO The supplier is free to add

additional errors beyond what

is defined in the Alarm

Information table, but the

support for alarms defined in

that table are required

AvailPartitionCapacity The current available buffer

capacity for a logical

partition inside internal

buffer equipment

(PartitionCapacity  # of

pods in partition).

Positive integer RO Only applicable to internal

buffer production equipment.

AvailPartitionCapacity

The AvailPartitionCapacity

for the i

PartitionID within

the internal buffer.

Positive integer RO Only applicable to internal

buffer production equipment.

BufferCapacityList The current PartitionType,

AvailPartitionCapacity, and

PartitionCapacity for all

logical buffer partitions.

List of n groups of items

1. BufferPartitionInfo

n. BufferPartitionInfo

RO Only applicable to internal

buffer production equipment.

BufferPartitionInfo The related information for a

logical buffer partition.

Structure of 4 items

PartitionID

PartitionType

AvailPartitionCapacity

PartitionCapacity

RO Only applicable to internal

buffer production equipment.