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SEMI P19-92 © SEMI 19 92, 1996 11 Figure 10 Staggered Contact Array

SEMI P19-92 © SEMI 1992, 1996 10

Figure 9

Contact Array Cell

SEMI P19-92 © SEMI 1992, 199611

Figure 10

Staggered Contact Array

SEMI P19-92 © SEMI 1992, 1996 12

Figure 11

Linearity Cell

Figure 12

Electrical Cell, 2 × n Configuration

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