semi合集-English.pdf - 第1217页

SEMI E5-1104 © SEMI 1982, 2004 159 Stream,Function Name (Mnemonic) Direction S12,F7 Map Data Send Type 1 (MDS1) M,H<-E,reply Description Used to send map data from th e equipment to the host in row or co lumn compress…

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SEMI E5-1104 © SEMI 1982, 2004 158
Stream,Function Name (Mnemonic) Direction
S12,F4 Map Set-up Data (MSD) S,H->E
Description
Used to send all of the map set-up data required to link the data map with the physical wafer.
Structure
L,15
1. <MID>
2. <IDTYP>
3. <FNLOC>
4. <ORLOC>
5. <RPSEL>
6. L,n
1. <REFP
x
REFP
y
>
.
.
n. <REFP
x
REFP
y
>
7. <DUTMS>
8. <XDIES>
9. <YDIES>
10. <ROWCT>
11. <COLCT>
12. <PRDCT>
13. <BCEQU>
14. <NULBC>
15. <MLCL>
Exception
A zero-length list returned means no such MID.
Stream,Function Name (Mnemonic) Direction
S12,F5 Map Transmit Inquire (MAPTI) S,H<-E,reply
Description
Used to prepare the host for map transmission. S12,F5 must precede all S12,F7-8,F9-10, & F11-12 transactions.
Structure
L,4
1. <MID>
2. <IDTYP>
3. <MAPFT>
4. <MLCL>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F6 Map Transmit Grant (MAPTG) S,H->E
Description
Provides permission to transfer.
Structure
<GRNT1>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 159
Stream,Function Name (Mnemonic) Direction
S12,F7 Map Data Send Type 1 (MDS1) M,H<-E,reply
Description
Used to send map data from the equipment to the host in row or column compressed format. If S12,F7 is multi-block, it must be
preceded by the S12,F5/S12,F6 Inquire/Grant transaction.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <RSINF
1
>
2. <BINLT
1
>
2. L,2
.
.
n. L,2
1. <RSINF
n
>
2. <BINLT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F8 Map Data Acknowledge Type 1 (MDA1) S,H->E
Description
Acknowledge or error
Structure
<MDACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F9 Map Data Send Type 2 (MDS2) M,H<-E,reply
Description
Used to send map data from the equipment in array format. If S12,F9 is multi-block, it must be preceded by the S12,F5/S12,F6
Inquire/Grant transaction.
Structure
L,4
1. <MID>
2. <IDTYP>
3. <STRP
x
STRP
y
>
4. <BINLT...>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 160
Stream,Function Name (Mnemonic) Direction
S12,F10 Map Data Acknowledge Type 2 (MDA2) S,H->E
Description
Acknowledge or error
Structure
<MDACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F11 Map Data Send Type 3 (MDS3) M,H<-E,reply
Description
Used to send map data from the equipment in cartesian coordinate format. Bin values may or may not be included in the
message. If S12,F11 is multi-block, it must be preceded by the S12,F5/S12,F6 Inquire/Grant transaction.
Structure
L,3
1. <MID>
2. <IDTYP>
3. L,n
1. L,2
1. <XYPOS1
x
XYPOS1
y
>
2. <BINLT1...>
2. L,2
.
.
n. L,2
1. <XYPOS
n
>
2. <BINLT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S12,F12 Map Data Acknowledge Type 3 (MDA3) S,H->E
Description
Acknowledge or error
Structure
<MDACK>
Exception
None