semi合集-English.pdf - 第1070页
SEMI E5-1104 © SEMI 1982, 2004 12 Name Format Description Values Where Used ATTRRELN 51 The re lationship that a specified qualifying value has to the value of an attribute of an object in stance (the valu e of interest)…
SEMI E5-1104 © SEMI 1982, 2004 11
Name Format Description Values Where Used
ACKC15 10 Return code for secondary
messages, 1 byte
0 = Accepted
1 = command will be performed
with completion signaled later
2 = DSNAME not found
3 = Permission not granted
4 = other error
5-63 Reserved
S15F50,F52
AGENT 20
S15F11, F12,
F21, F22, F25
ALCD 10 Alarm code byte
bit 8 = 1 means alarm set
bit 8 = 0 means alarm cleared
bit 7-1 is alarm category
0 = Not used
1 = Personal safety
2 = Equipment safety
3 = Parameter control warning
4 = Parameter control error
5 = Irrecoverable error
6 = Equipment status warning
7 = Attention flags
8 = Data integrity
>8 = Other categories
9-63 Reserved
S5F1, F6
ALED 10 Alarm enable/disable code, 1
byte
bit 8 = 1 means enable alarm
bit 8 = 0 means disable alarm
S5F3
ALID 3(), 5() Alarm identification
S5F1, F3, F5,
F6
ALTX 20 Alarm text limited to 40
characters
S5F1, F6
ATTRDATA 0, 10,
20, 3(),
4(), 5(),
11
Contains a specific attribute
value for a specific object
S1F20;
S3F17, F18;
S13F14, F16;
S14F1, F2, F3,
F4, F9, F10,
F11, F12, F13,
F14, F15, F16,
F17, F18;
S18F2, F3
ATTRID 20, 5() Identifier for an attribute for a
specific type of object
S1F19;
S3F17, F18;
S13F14, F16;
S14F1, F2, F3,
F4, F8, F9, F10,
F11, F12, F13,
F14, F15, F16,
F17, F18;
S18F1, F3
SEMI E5-1104 © SEMI 1982, 2004 12
Name Format Description Values Where Used
ATTRRELN 51 The relationship that a
specified qualifying value has
to the value of an attribute of
an object instance (the value
of interest):
0 = The qualifying value is
equal to
the value of interest,
1 = The qualifying value is not
equal to the value of interest,
2 = The qualifying value is
less than the value of interest,
3 = The qualifying value is
less than or equal to the value
of interest,
4 = The qualifying value is
greater than the value of
interest,
5 = The qualifying value is
greater than or equal to the
value of interest,
6 = The qualifying value is
present (contained in the set
of) the value of interest,
7 = The qualifying value is
absent (not contained in the set
of) the value of interest,
>7 = Reserved.
S14F1
BCDS 32, 52 Before Command Codes
Vector of all command codes
which defined command must
precede within the same block.
S7F22
BCEQU 20, 51 Bin code equivalents
Array of all codes that are to
be processed. Must be the same
format as BINLT and NULBC. Zero
length indicates all codes be
sent.
S12F3, F4
BINLT 20, 51 The Bin List
Is an array of bin values.
Format must be the same as used
in NULBC and BCEQU.
S12F7, F9, F11,
F14, F16, F18
BLKDEF 31, 51 Block Definition
Blocks define the range for
before/after code checking
(specified by BCDS, IBCDS,
NBCDS, ACDS, IACDS, and NACDS).
BLKDEF specifies whether the
command being defined starts a
block (+1), terminates a block
(-1), or is within the body of a
block (0). All other values are
invalid. The outermost block of
a process program is implicit,
and is bounded by the first and
last command of the process
program. Before/after checks
for a particular command are
performed with all other
commands in the same block and
at the same nesting level. For
the purpose of before/after
checking, a set of commands
making up a block is considered
to be a single body command of
its containing block. This
command has the before/after
restrictions of the start block
command which begins the block.
S7F22
BPD 10 Boot program Data
S8F2
SEMI E5-1104 © SEMI 1982, 2004 13
Name Format Description Values Where Used
BYTMAX 3(), 5() Byte Maximum
Maximum length of process
program. A value of zero
indicates no limit. Negative
values are invalid.
S7F22
CAACK 51 Carrier Action Acknowledge
Code, 1 byte
0 = Acknowledge, command has
been performed.
1 = Invalid command
2 = Can not perform now
3 = Invalid data or argument
4 = Acknowledge, request will
be performed with completion
signaled later by an event.
5 = Rejected. Invalid state.
6 = Command performed with
errors.
7-63 Reserved.
S3F18, F20,
F22, F24, F26,
F30, F32
CARRIERACTION 20 Specifies the action requested
for a carrier
S3F17
CARRIERID 20 The identifier of a carrier
S3F17
CARRIERSPEC 20 The object specifier for a
carrier. Conforms to
OBJSPEC.
F29, F31
CATTRDATA 0, 10,
20, 3(),
4(), 5(),
11
The value of a carrier
attribute
S3F17
CATTRID 20 The name of a carrier
attribute
S3F17
CCODE 20, 32,
34, 52,
54
Command Code
Each command code corresponds to
a unique process operation the
machine is capable of
performing.
S7F22, F23,
F26, F31, F39,
F43
CEED 11 Collection event or trace
enable/disable code, 1 byte
FALSE = Disable
TRUE = Enable
S2F37;
S17F5
CEID 20, 3(),
5()
Collected event ID
S2F35, F37;
S6F3, F8, F9,
F11, F13, F15,
F17;
S17F5, F9, F10,
F11, F12
CEPACK 0, 51 Command Enhanced
Parameter Acknowledge. If a
specific value of CPNAME is
defined to have a CEPVAL
that is a LIST, then CEPACK
shall have the same structure
as the corresponding list
format of CEPVAL as used in
S2,F49. Otherwise CEPACK
will be a 1 byte integer.
Enumerated:
0 = No error
1 = Parameter name (CPNAME)
does not exist
2 = Illegal value specified for
CEPVAL
3 = Illegal format specified
for CEPVAL
4 = Parameter name (CPNAME) not
valid as used
5-63 Reserved
S2F50