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SEMI P40-1103 © SEMI 2003 5 P 1 Mounting surf ace Flatnes s error Chuck Figure 3 Definition of Flatness Error P 1 is the best fit plane that minimiz es th e maximum deviation of the surface from P 1 . P 1 Mounting surf a…
SEMI P40-1103 © SEMI 2003 4
Table 1 Flatness of the Mounting Surface
Any Square Region with Specified Edge Length (millimeters) Peak-to-Valley Flatness (nanometers)
150 48
75 24
40 12
25 8
20 6
10 3
Table 2 Clamping Pressure
Mean Clamping Pressure (KPa) Maximum Range of Clamping Pressure within Flatness Quality
Area (KPa)
15 ± 1.5
3.0
Table 3 Minimum Effective Bending Stiffness of the Chuck Cross Section
Bending Stiffness (Newton-meter) (See Note 1.)
30,000
NOTE 1: The effective bending stiffness (D) of a chuck with a solid cross section is given by:
D =
Eh
3
12 1 −
ν
2
()
where E is the elastic modulus in N/m
3
, h is the thickness in meters and ν is Poisson’s ratio.
Table 4 Dimensions of Pins or Pedestals on Chuck Surface
Parameter Label for parameter in
Figure 5
Units Required Value
Maximum spacing S
p
millimeters 10
Period P
p
millimeters To be agreed upon between
user and supplier
Angle of sidewall
θ
degrees To be agreed upon between
user and supplier
Pin height H
p
microns To be agreed upon between
user and supplier
SEMI P40-1103 © SEMI 2003 5
P
1
Mounting surface
Flatness error
Chuck
Figure 3
Definition of Flatness Error
P
1
is the best fit plane that minimizes the maximum deviation of the surface from P
1
.
P
1
Mounting surface
Flatness error
Chuck
Figure 4
Definition of Flatness Error for a Pin or Pedestal Chuck
P
1
is the best fit plane that minimizes the maximum deviation from the surface that passes through the
highest points on the chuck surface.
SEMI P40-1103 © SEMI 2003 6
Pin sidewall angle
Chuck
Pin spacing, S
p
θ
Pin period, P
p
Pin height, H
p
Figure 5
Dimensions of Pins or Pedestals on the Chuck Surface
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