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SEMI E30.5-0302 © SEMI 2001, 2002 7 7.5.27 Process ing State Transit ion Table Table 1 Processing State Transition T able Transiti on # Current state Trigger New Stat e Actions Commen ts 1 INIT All e quipme nt initializa…
SEMI E30.5-0302 © SEMI 2001, 2002 6
7.5.9 INIT equipment initialization is occurring.
7.5.10 LOAD (EXECUTING Sub-state) the
equipment is determining if processing is complete. If
not, then the substrate is being transferred to the
equipment processing location, such as the stage. A
pre-alignment procedure may be performed prior to the
LOAD state.
7.5.11 PAUSE (PROCESS ACTIVE Sub-state)
PROCESS is suspended at the next opportunity.
Actions to put the equipment in a “safe state” shall be
performed. The equipment is awaiting a command
(RESUME, PP-UPDATE, STOP or ABORT), or for
alarm(s) to be cleared.
7.5.12 PAUSED (PROCESS PAUSE Sub-state)
PROCESS shall be suspended and the equipment is
waiting for a command (RESUME, PP-UPDATE,
STOP or ABORT).
7.5.13 PAUSING (PROCESS PAUSE Sub-state)
PROCESS has been suspended at the next opportunity
and the equipment is put in a “safe state”.
7.5.14 PROCESS (PROCESSING ACTIVE Sub-state)
this state is the parent of those sub-states which refer
to the active preparation and execution of a Process
Program.
7.5.15 PROCESSING ACTIVE this state is the
parent of all sub-states where the context of a Process
Program execution exists.
7.5.16 PROCESS PAUSE (PAUSE Sub-state) the
equipment is free of alarm conditions in the PAUSE
state.
7.5.17 MEASUREMENT COMPLETE (MEASURING
Sub-State) the equipment has completed collecting
data relative to an alignment location.
7.5.18 MEASURING (WORKING Sub-State) the
equipment is preforming an action between alignments.
7.5.19 READY (PROCESS Sub-state) the equipment
is ready to begin processing and is awaiting a START
command from the operator or host. If an
AUTOSTART is included, then the equipment starts
processing immediately.
7.5.20 SAMPLE COMPLETE (TAKE
MEASUREMENT Sub-state) the equipment
determines if additional samples need to be taken at this
site.
7.5.21 SETTING UP (PROCESS Sub-state) the
equipment is being set up so that external conditions are
satisfied to start processing the material. This includes
the receipt of any Process Programs and material to be
processed and their validation. Additional information
may come from the host during the processing.
7.5.22 STOPPING (PROCESSING ACTIVE Sub-state)
the equipment has completed a Process Program or
has been instructed to stop processing and shall do so
gracefully at the next opportunity. All cleanup
necessary is being completed within this state with
regard to material, data, control system, etc. Data is
normally preserved. Any alarm or error condition is
cleared before exit from this state.
7.5.23 TAKE MEASUREMENT (MEASURING Sub-
state) the equipment is in the process of collecting
data relative to an alignment location. (e.g. Site,
Region, Substrate).
7.5.24 TAKE SAMPLE (TAKE MEASUREMENT Sub-
state) the equipment collects data from a single
structure or of a single sample.
7.5.25 UNLOAD (EXECUTING Sub-state) the
substrate is being removed from the processing
location.
7.5.26 WORKING (EXECUTING Sub-state) the
equipment is processing a specific material.
SEMI E30.5-0302 © SEMI 2001, 20027
7.5.27 Processing State Transition Table
Table 1 Processing State Transition Table
Transition # Current state Trigger New State Actions Comments
1 INIT All equipment
initialization is
complete with no
alarms or error
conditions.
IDLE None If an alarm or error
occurs during INIT, the
equipment shall remain
in this state.
2 IDLE A process is queued or
a command is received.
SETTING UP The set up procedure is
equipment dependent.
Commit has been made
to set up.
3 SETTING UP All setup activity has
completed and the
equipment is ready to
receive a START
command.
READY The equipment is
waiting for a START
command. Start may be
initiated by an
operator.
The selected Process
Program is available for
execution.
4 READY The equipment receives
a START command.
LOAD The equipment
determines if
processing is
completed. If not, it
transfers the next
substrate to the
processing location.
LOAD is an
EXECUTING Substate.
5 EXECUTING The processing is
complete.
STOPPING None Equipment specific.
Supplier must chose
beween LOAD or
UNLOAD states for
completion.
6 PROCESS The equipment has
received a STOP
command.
STOPPING The equipment
unloads the material
and brings the
equipment to a clean
and safe state.
Data is typically
preserved and is valid.
7 PROCESS The equipment has
received an ABORT
command
ABORTING The equipment is put in
a "safe state” if
necessary.
Data may be invalid or
not available.
8 PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is
suspended and the
equipment is waiting
for all alarms to be
cleared.
ALARM PAUSED is a
PAUSE Substate.
9 PROCESS The equipment has
received a PAUSE
command.
PAUSING PROCESS shall be
suspended at the next
opportunity. Actions to
put the equipment in a
“safe state” shall be
performed.
PAUSING is a PAUSE
Substate.
10 PROCESS
PAUSED
The equipment has
received a RESUME
command.
Previous
PROCESS State
Proceed with the
suspended Substate.
PAUSED is a
PROCESS PAUSE
Substate.
11 CHECKING The equipment has
completed validating
any updates made to the
current Process
Program being
executed. Including a
PP_UPDATE
Previous
PROCESS State
Action is appropriate to
the state and the
changes made to the
Process Program
updated.
None
SEMI E30.5-0302 © SEMI 2001, 2002 8
Transition # Current state Trigger New State Actions Comments
12 STOPPING The equipment clean up
is complete and the
equipment is free of
alarms.
IDLE None None
13 PAUSE The equipment has
received a STOP
command.
STOPPING The equipment
proceeds with clean up.
Normally, data is
preserved and is valid.
14 PAUSE The equipment has
received an ABORT
command.
ABORTING Any unsafe condition is
resolved if possible.
Data may be invalid or
not available.
15 STOPPING The equipment has
received an ABORT
command.
ABORTING Any unsafe condition is
resolved if possible.
Data may be invalid or
not available.
16 ABORTING Unsafe conditions have
been resolved where
possible.
ABORTED The equipment is
waiting for alarm and
ABORT conditions to
be cleared.
The only state change
allowed is to IDLE.
17 ABORTED All alarms and abort
conditions have been
cleared.
IDLE None If needed the
CLEANUP command
clears the abort
conditions. IDLE is a
“clean” state.
18 IDLE An alarm is set. IDLE w/
ALARMS
The equipment waits
for all alarms to be
cleared.
None
19 IDLE w/
ALARMS
All alarms have been
cleared.
IDLE None IDLE is free of alarms.
20 PAUSING The equipment has
achieved a “safe state”.
PAUSED The equipment is
waiting for a command
(RESUME, STOP or
ABORT).
None
21 PROCESS
PAUSE
An alarm is set. ALARM
PAUSED
The equipment waits
for all alarms to be
cleared, or a STOP or
ABORT command.
None
22 ALARM
PAUSED
All alarms are cleared. PAUSED The equipment is
waiting for a command
(RESUME,
PP_UPDATE, STOP
or ABORT).
None
23 LOAD Material transfer to
processing location is
complete and global
alignment has been
completed.
WORKING The substrate is being
processed.
None
24 WORKING The processing of the
specific material being
processed ended
normally.
UNLOAD This material is
transferred from the
processing location.
“Normal” completion of
the substrate.
25 UNLOAD The material unload is
complete.
LOAD The equipment checks
if processing is
complete and, if not,
transfers the next
substrate to the
processing location.
None