semi合集-English.pdf - 第6557页

SEMI G84-0303 © SEMI 2001, 2003 7 3 . L , 2 1. <A TTRID = ' Colu mns '> 2. <AT TRDATA = 24> 4 . L , 2 1. <ATTRID = ' CellStatus'> 2. <ATT RDATA = 6> 5 . L , 2 1. <ATTRID = &…

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SEMI G84-0303 © SEMI 2001, 2003 6
10 Description
10.1 See SEMI G81 for further definitions of the strip map required items.
10.2 Strip Map Required Attributes
10.2.1 The following set of Data Items are mandatory in the uploads and downloads scenarios for strip maps.
• Strip ID
• Rows
• Columns
• OriginLocation
• CellStatus | CellGrade
10.2.2 Each equipment shall have an attribute for the product or strip type that will describe the standards process
direction and physical origin of the strip. If the physical origin and the factory defined origin are not the same, it is
the responsibility of the equipment to perform the appropriate translations to maintain integrity of the strip map
information.
10.3 Strip Map Data Protocol Examples
10.3.1 Strip Map Download (Example)
S14,F1 GetAttr Request (GAR) S,H<-E
10.3.1.1 Description: This message is used to request a set of specified attributes for one or more objects.
Structure: L,5
1. <OBJSPEC = ‘’>
2. <OBJTYPE = ‘StripMap’>
3. L,1
1. <OBJID1 = StripID = ‘A1000001’>
4. L,0 (always zero list, no filters defined)
5. L,5 (any length and order of data items)
1. <ATTRID = OriginLocation >
2. <ATTRID = ‘Rows '>
3. <ATTRID = ‘Columns '>
4. <ATTRID = ‘CellStatus'>
5. <ATTRID = ‘LotID'>
NOTE: This is an example only. Each equipment must request all mandatory data items and can additionally request any optional
data items that it needs to fully implement strip mapping capability.
S14,F2 GetAttr Data (GAD) M,H->E
10.3.1.2 Description: This message is used to transfer the set of requested attributes for the specified object(s). The
order of attributes is retained from the primary message.
Structure: L,2
1. L, 1
1. L,2
1. <OBJID = StripID = ‘A1000001’>
2. L,5
1. L,2
1. <ATTRID = ‘OriginLocation’ >
2. <ATTRDATA = ‘0’>
2. L,2
1. <ATTRID = ' Rows’>
2. <ATTRDATA = 6>
SEMI G84-0303 © SEMI 2001, 2003 7
3. L,2
1. <ATTRID = ' Columns '>
2. <ATTRDATA = 24>
4. L,2
1. <ATTRID = ' CellStatus'>
2. <ATTRDATA = 6>
5. L,2
1. <ATTRID = ' LotID '>
2. <ATTRDATA = 'Lot1>
2. L,2
1. <OBJACK = 0>
2. L,0
10.3.2 Strip Map Upload (Example)
S6,F11 Event Report M, H<-E
10.3.2.1 Description: This message is used to report the current map status. This event will occur at the end of a
strip as well as at any point during the processing of the strip when the equipment enters a condition where an
operator may have the opportunity to handle the strip or the equipment has an opportunity for error. This event shall
always be sent with the current status of the map at the time the equipment gets changed from local to remote.
10.3.2.1.1 For a description of filters, see S6,F11.
Structure: L,3
1. <DATAID>
2. <CEID>
3. L,1
1. L,2
1. <RPTID>
2. <L,n
1. <xxxx>
n. <yyyy>
S6,F12 Event Report Acknowledge H->E
Description: Acknowledge or Error
Structure: <ACKC6>
SEMI G84-0303 © SEMI 2001, 2003 8
11 Application Scenarios
11.1 Strip Map Download
Host Equipment
Equipment/Operator
Actions which should be
performed
Host Actions which should
be performed
GetAttr Request (GAR) S14,F1
Strip ID ok
OBJACK = 0
GetAttr Data (GAD) S14,F2
Equipment is started and loads the first
strip into the indexer. Equipment reads
the Strip ID from the strip and requests
the strip map.
Figure 1
Strip Map Download
Host Equipment
Equipment is started and loads the first strip
into the indexer. Equipment reads the Strip ID
from the strip and requests the strip map.
Equipment/Operator
Actions which should be
performed
Host Actions which should
be performed
GetAttr Request (GAR) S14,F1
Strip ID not found
OBJACK > 0
GetAttr Data (GAD) S14,F2
Equipment creates strip map according to
configuration setting on the equipment.
The equipment shall have the folllowing
modes of operations:
- autocreate: will automatically create the
strip map.
- user confirm: will query operator for
"Retry map request" or "Create map" or
"Abort".
Map Creation:
CellStatus will be initialized to
Unknown via a strip update
command. If an equipment initializes
CellStatus to Unknown it must
provide an update map at the end of
strip processings - see upload
scenario.
Figure 2
Strip Map Create