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SEMI E109-0305 © SEMI 2001, 2005 50 18.4.13 ProceedWithReticle 18.4.13.1 The Pro ceedWithReticle service is sent by the host to indicate that reticle operations may continue. In particular and in the normal case, this se…

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SEMI E109-0305 © SEMI 2001, 2005 49
18.4.10 PodComplete
18.4.10.1 The PodComplete service is used by the host to inform the equipment that all actions for transferring
reticles in and out of the pod are complete. This service is used when the equipment has not previously received a
ReticleTransferJob service for the pod. This service may also be used in the event of a Reticle Transfer Job that is
not completed successfully.
Table 31 PodComplete Parameters
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the Pod that is complete.
PortID C — The Port ID the Pod currently occupies.
CMStatus — M Information concerning the result of the service.
18.4.11 PodNotification
18.4.11.1 The PodNotification service is used by the host to inform the equipment that a Pod with the ID specified
will be arriving at the equipment. The load port is not specified; therefore no pod to load port association takes
place. A pod object with the ObjID equal to the PodID specified in the service is instantiated. The PodNotification
service will be rejected if the pod specified has already been instantiated through the Bind or PodNotification
service, or a PodID read.
Table 32 PodNotification Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod object to instantiate.
PodPropertiesList C The PropertiesList of the pod to instantiate.
CMStatus — M Information concerning the result of the service.
18.4.12 ProceedWithPod
18.4.12.1 The ProceedWithPod service is sent by the host to indicate that the pod operations may continue. When
using host based verification it is used by the host to indicate to the production equipment that the verification of
PodID and/or the Cassette Slot Map is correct. For successful production equipment based verification the
production equipment shall not require this message before proceeding with the pod. For failed production
equipment based verification the production equipment shall require either a CancelPod or ProceedWithPod service.
18.4.12.2 Using Table 33, for the Host based PodID verification case, the ProceedWithPod service sent by the host
after the first PodID read is referred to as ProceedWithPod #1, the ProceedWithPod service sent after slot map read
is referred to as ProceedWithPod #2.
Table 33 ProceedWithPod Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which processing may proceed.
PodID M — The PodID for which processing may proceed.
PodPropertiesList C — A list of name value pairs providing attributes for the pod object.
CMStatus — M Information concerning the result of the service.
SEMI E109-0305 © SEMI 2001, 2005 50
18.4.13 ProceedWithReticle
18.4.13.1 The ProceedWithReticle service is sent by the host to indicate that reticle operations may continue. In
particular and in the normal case, this service is used to change a Reticle, in the RETICLE WAITING FOR HOST
state from RETICLE WAITING FOR HOST to PARTICLE INSPECTION when particle inspection is required, and
from RETICLE WAITING FOR HOST to QUALIFIED if particle inspection is not required.
Table 34 ProceedWithReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — The ID of the reticle for which to change the
UNQUALIFIED RETICLE status.
Reticle Location ID C — The location of the reticle.
RPMStatus — M Information concerning the result of the service.
18.4.14 RejectReticle
18.4.14.1 The RejectReticle service is sent by the host to indicate that the reticle may no longer be used for
processing, unless it is requalified. The equipment shall change the reticle state model RETICLE AT EQUIPMENT
status to REJECTED.
Table 35 RejectReticle Service Parameter Definition
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — ReticleID to designate the RETICLE AT EQUIPMENT status.
RPMStatus — M Information concerning the result of the service.
18.4.15 SetQualificationIntervalTime
18.4.15.1 The SetQualifiactionIntervalTime service is sent by the host to change the time between inspection for a
specific or a list of specific reticles. This service uses SETATTR as defined in SEMI E39.
18.5 Additional Service Message Definitions
18.5.1 CancelAllPodOut
18.5.1.1 The CancelAllPodOut service is sent to internal buffer production equipment to cancel all PodOut services
in queue.
Table 36 CancelAllPodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
CMStatus — M Information concerning the result of the service.
18.5.2 CancelMoveReticle
18.5.2.1 The CancelMoveReticle service is sent by the host to cancel a MoveReticle service. The equipment shall
refrain from removing the reticle specified. This shall apply on if the move has not been started.
Table 37 CancelMoveReticle
Parameter Name Req/Ind Rsp/Conf Description
ReticleID M — The ReticleID which should not be removed.
RPMStatus — M Information concerning the result of the service.
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18.5.3 CancelPodOut
18.5.3.1 The CancelPodOut service is sent to internal buffer production equipment to cancel a queued PodOut.
Table 38 CancelPodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — PodID for the PodOut service that is being cancelled.
CMStatus — M Information concerning the result of the service.
18.5.4 CancelReservationAtPort
18.5.4.1 The CancelReservationAtPort service is sent by the host to cancel a reservation at the load port. The load
port will enter the UNRESERVED State after receiving this service. A Port reserved by the physical initiation of a
pod out operation may not be cancelled by this service.
Table 39 CancelReservationAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve.
CMStatus — M Information concerning the result of the service.
18.5.5 CancelReticleTransferJob
18.5.5.1 The CancelReticleTransferJob is sent by the host to cancel a previous ReticleTransferJob service.
Table 40 CancelReticleTransferJob Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod for which to cancel the load port to pod
association.
PortID M — The Port ID for which to cancel the load port to pod association.
OutputPortID M — The Port ID where the pod was to have been delivered after having
executed all reticle related actions.
RPMStatus — M Information concerning the result of the service.
18.5.6 Clamp
18.5.6.1 The Clamp service is used by the host if the equipment has separate mechanisms for clamping the carrier
that are independent of opening the carrier. It is used to instruct equipment to engage the independent clamping
mechanism. It is used by the host when “macro” instructions such as provided by Bind, PodNotification,
ProceedWithPod and ReticleTransferJob have not been provided.
Table 41 Clamp Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID C — The PodID of the pod to clamp. Either the PodID or the PortID must be
specified.
PortID C — The PortID for which to clamp a carrier. Either the PodID or the PortID
must be specified.
CMStatus — M Information concerning the result of the service.